초록

The present invention relates to an improved method for forming a UBM pad and solder bump connection for a flip-chip which eliminates at least two mask steps required in standard UBM pad forming processes when repatterning the bond pad locations.

대표청구항 ▼

1. A semiconductor device for flip-chip attachment to a substrate comprising: a semiconductor substrate including a plurality of circuits thereon, each circuit of said plurality of circuits connected to a bond pad, a first passivation layer thereon covering said plurality of circuits and having an

1. A semiconductor device for flip-chip attachment to a substrate comprising: a semiconductor substrate including a plurality of circuits thereon, each circuit of said plurality of circuits connected to a bond pad, a first passivation layer thereon covering said plurality of circuits and having an aperture therethrough at each said bond pad, a plurality of solder wettable conductive traces, each trace of said plurality of solder wettable conductive traces having a portion thereof connected to said bond pad and having said portion thereof located on a portion of said first passivation layer, a second insulative passivation layer comprising a polyamide material being one of an absorbing material and a non-absorbing material covering said plurality of solder wettable conductive traces and said portion of said first passivation layer, said second insulative passivation layer including a plurality of sloped-wall vias therethrough located over said portion of said each of said plurality of solder wettable conductive traces, and a solder material located in each sloped-wall via of said plurality of sloped-wall vias in said second insulative passivation layer, said solder material directly contacting said portion of at least one solder wettable conductive trace of said plurality of solder wettable conductive traces, said at least one sloped-wall via of said plurality of sloped-wall vias including: said portion of said at least one solder wettable conductive trace of said plurality of solder wettable conductive traces directly contacting said solder material, said at least one solder wettable conductive trace of said plurality of solder wettable conductive traces in electrical communication with integrated circuitry carried by said semiconductor substrate connected to at least one circuit of said plurality of circuits, said portion of said at least one solder wettable conductive trace of said plurality of solder wettable conductive traces formed by selective removal of a portion of a metal layer over a portion of said first passivation layer.2. The semiconductor device of claim 1, wherein said plurality of solder wettable conductive traces are formed by selective removal of a metal layer over said first passivation layer and extending into said each sloped-wall via of said plurality of sloped-wall vias, said selective removal being effected by etching said metal layer over said first passivation layer.3. The semiconductor device of claim 1, wherein said second insulative passivation layer comprising said polyamide material includes a polyamide material for absorbing stresses.4. The semiconductor device of claim 3, wherein said polyamide material includes an isotropic polyamide material.5. The semiconductor device of claim 3, wherein said polyamide material includes an anisotropic polyamide material.6. A semiconductor device for flip-chip attachment to a substrate comprising: a semiconductor substrate having at least one circuit thereon connected to a bond pad, a first passivation layer thereon covering said at least one circuit and having an aperture therethrough for said bond pad, at least one solder wettable conductive trace having a portion thereof connected to said bond pad and located on a portion of said first passivation layer, a second passivation layer having a stress absorbing insulation material covering said at least one solder wettable conductive trace and said portion of said first passivation layer, said second passivation layer being one of an isotropic material and an anisotropic material, said second passivation layer having a sloped-wall via therethrough for contacting said portion of said at least one solder wettable conductive trace, and a solder material located in said at least one sloped-wall via in said second passivation layer, said solder material intimately contacting said portion of said at least one solder wettable conductive trace, said at least one sloped-wall via including: said portion of said at least one solder wettable conductive trace intimately contacting a portion of said solder material, said at least one solder wettable conductive trace electrically connected to integrated circuitry of said semiconductor substrate connected to said at least one circuit.7. A semiconductor memory die for flip-chip attachment to a substrate comprising: a semiconductor substrate including at least one circuit thereon connected to a bond pad, a first passivation layer thereon covering at least a portion of said at least one circuit and having an aperture therethrough for said bond pad, at least one solder wettable conductive trace having a portion thereof connected to said bond pad and located on a portion of said first passivation layer, a substantially non-conductive second passivation layer having a stress absorbing material covering said at least one solder wettable conductive trace and said portion of said first passivation layer, said second passivation layer being one of an isotropic material and an anisotropic material, said substantially non-conductive second passivation layer having a sloped-wall via therethrough located over said portion of said at least one solder wettable conductive trace, and a solder material located in said at least one sloped-wall via in said non-conductive second passivation layer, said solder material intimately contacting said portion of said at least one solder wettable conductive trace, said at least one sloped-wall via including: said portion of said at least one solder wettable conductive trace intimately contacting said solder material, said at least one solder wettable conductive trace connected to a portion of integrated circuitry of said semiconductor substrate connected to said at least one circuit.