초록 ▼

A flow controller ( 1 ), comprising a valve body ( 4 ) having flow paths forming an inlet and an outlet of fluid, a diaphragm ( 6 ) held fixedly between the valve body and a bonnet ( 5 ), and an operating mechanism ( 7 ) moving the diaphragm vertically, wherein the valve body flow paths communicate

A flow controller ( 1 ), comprising a valve body ( 4 ) having flow paths forming an inlet and an outlet of fluid, a diaphragm ( 6 ) held fixedly between the valve body and a bonnet ( 5 ), and an operating mechanism ( 7 ) moving the diaphragm vertically, wherein the valve body flow paths communicate with each other through a projection-free communication path ( 8 ), the a diaphragm is formed so that, when lowering, it comes into close contact with the communication path so that it closes the flow path and, when rising, the center part thereof is recessed so that an area near the outer peripheral part is raised, and a curved surface ( 52 ), to which the outer upper surface ( 63 ) of the raised part is closely fitted, is formed on a bonnet on the inner lower surface of a diaphragm holding part ( 51 ).

대표청구항 ▼

1. The fluid controller, which is a fluid controller ( 1 ) comprising: a valve body ( 4 ) having flow paths used as inlet and outlet for fluid; a diaphragm ( 6 ) held fixedly between the valve body and a bonnet ( 5 ); and an operation mechanism ( 7 ) moving the diaphragm in vertical direction, where

1. The fluid controller, which is a fluid controller ( 1 ) comprising: a valve body ( 4 ) having flow paths used as inlet and outlet for fluid; a diaphragm ( 6 ) held fixedly between the valve body and a bonnet ( 5 ); and an operation mechanism ( 7 ) moving the diaphragm in vertical direction, wherein said flow paths of the valve body communicate with each other through a protrusion-free communication path ( 8 ), said diaphragm is fitted closely to the communication path when lowered so as to close the flow path and when raised, the center part of the diaphragm is recessed and its part near the outer periphery part is protruded, a curved surface ( 52 ) to which an outer upper surface ( 63 ) of said protruded part is closely fitted is formed on said bonnet at the inner lower surface of a diaphragm holding part ( 51 ), in said valve body, from an upper surface, a hole on the inlet flow path ( 91 , 94 ) thirled toward to an inlet flow path and a hole on the outlet flow path ( 92 , 93 ) thirled toward to an outlet flow path are provided, a bottom face ( 91 a , 94 a ) that is orthogonal direction with an inflow axis of said hole on the inlet flow path and/or a bottom face ( 92 a , 93 a ) that is orthogonal direction with an inflow axis of a hole on the outlet flow path incline downward to a bottom face ( 2 a , 13 a ) of said inlet flow path and/or a bottom face ( 3 a , 12 a ) of said outlet flow path, said diaphragm have double layered structure comprised a lower part diaphragm ( 61 ) and an upper part diaphragm ( 62 ), annular ridges, which comprised outside annular ridge ( 66 ) and inside annular ridge ( 64 ), near the periphery part of the lower part diaphragm ( 61 ) is formed, and said outside annular ridge is projecting in vertical direction. 2. The fluid controller described in claim 1, wherein said flow paths provided on the valve body are comprised said inlet flow path ( 2 ) and said outlet flow path ( 3 ) which are arranged on the identical axis line. 3. The fluid controller described in claim 1, wherein said flow path provided on a valve body is a T-letter shaped flow path comprising a penetration flow path ( 12 ) penetrating the valve body and a branch flow path ( 13 ) branched from the penetration flow path and a bottom surface of the penetration flow path exists at the same level as a bottom surface of the communication path. 4. The fluid controller described in claim 1, wherein said inlet flow path and said outlet flow path are a T-letter shaped flow path comprising a penetration flow path penetrating the valve body and a branch flow path branched from the penetration flow path, the penetration flow path is where a central axis line thereof is positioned below a bottom of said communication path, and a communication surface ( 14 ) from the penetration flow path to the communication path is formed as an inclination horizontally or downward when the penetration flow path is arranged horizontally and the branch flow path is arranged downward. 5. The fluid controller described in claim 4, wherein the diameter of said penetration flow path is larger than the diameter of the branch flow path.