IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0581313
(1999-10-13)
|
우선권정보 |
JP-0291218 (1998-10-13); JP-0067166 (1999-03-12) |
국제출원번호 |
PCT/JP99/05655
(1999-10-13)
|
국제공개번호 |
WO00/21877
(2000-04-20)
|
발명자
/ 주소 |
- Kamijima, Shunji
- Yonekubo, Masatoshi
- Takeda, Takashi
- Nishikawa, Takao
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
10 |
초록
▼
A micromachine and a manufacturing method are provided for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and which functions as an optical element. The second microstruct
A micromachine and a manufacturing method are provided for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and which functions as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion, or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. When a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low.
대표청구항
▼
1. A micromachine comprising:a first microstructured portion; anda second microstructured portion of a predetermined shape, at least a part of which is formed by mold transfer, the first microstructured portion connected to the second microstructured portion for driving the second microstructured po
1. A micromachine comprising:a first microstructured portion; anda second microstructured portion of a predetermined shape, at least a part of which is formed by mold transfer, the first microstructured portion connected to the second microstructured portion for driving the second microstructured portion to cause substantially all reflected incident light from a light source to travel in a direction almost perpendicular to an area between the first and second microstructured portions. 2. The micromachine according to claim 1, said second microstructured portion having a switching function. 3. The micromachine according to claim 1, said second microstructured portion performing as an optical switching element. 4. The micromachine according to claim 1, said first microstructured portion and said second microstructured portion being arranged in an array. 5. The micromachine according to claim 1, further comprising:a third microstructured portion of a predetermined shape not driven by said first microstructured portion, at least a part of said third microstructured portion which relates to said second microstructured portion being formed by mold transfer. 6. The micromachine according to claim 5, one of a predetermined gap and a predetermined step being provided between said second microstructured portion and said third microstructured portion. 7. The micromachine according to claim 1, said first microstructured portion being formed by photolithography techniques. 8. The micromachine according to claim 1, said second microstructured portion comprising a resin. 9. The micromachine according to claim 8, said second microstructured portion comprising a photosetting resin. 10. The micromachine according to claim 8, a boundary surface between said first microstructured portion and said second microstructured portion comprising a non-metallic material. 11. A micromachine manufacturing method for manufacturing a micromachine, in which a first microstructured portion is operative to drive a second microstructured portion of a predetermined shape, the method comprising:a first microstructured portion providing step of providing a first microstructured portion; anda molding step of forming at least a part of said second microstructured portion on said first microstructured portion by mold transfer, after said first microstructured portion is provided so that substantially all reflected incident light from a light source travels in a direction almost perpendicular to an area between the first and second microstructured portions. 12. The micromachine manufacturing method according to claim 11, said second microstructured portion having a switching function. 13. The micromachine manufacturing method according to claim 11, said second microstructured portion performing as an optical switching element. 14. The micromachine manufacturing method according to claim 11, further comprising a plurality of first microstructured portions and a plurality of second microstructured portions arranged in an array, a part of each of the plurality of second microstructured portions arranged in the array being transferred using a same mold used in said molding step. 15. The micromachine manufacturing method according to claim 11, said micromachine comprising a third microstructured portion not driven by said first microstructured portion, at least a part of said third microstructured portion which relates to said second microstructured portion being transferred using a same mold used in said molding step. 16. The micromachine manufacturing method according to claim 15, one of a predetermined gap and a predetermined step being formed between said second microstructured portion and said third microstructured portion in said molding step. 17. The micromachine manufacturing method according to claim 11, further comprising:a photolithography step performed before said molding step, said first microstructured portion being formed by photolithography techniques in sa id photolithography step. 18. The micromachine manufacturing method according to claim 17, further comprising:an etching step of etching a sacrifice layer after said molding step, said sacrifice layer, which is provided around said first microstructured portion, not being etched at said photolithography step. 19. The micromachine manufacturing method according to claim 17, no metallic film being formed on a boundary surface, on which said second microstructured portion is stacked, in said photolithography step. 20. The micromachine manufacturing method according to claim 11, further comprising:a sacrifice layer providing step of providing a sacrifice layer around said first microstructured portion before said molding step. 21. The micromachine manufacturing method according to claim 11, further comprising:a planarizing step of planarizing said first microstructured portion and surroundings thereof during or following said molding step. 22. The micromachine manufacturing method according to claim 11, a mold used in said molding step being formed on a silicon substrate by a combination of anisotropic etching and isotropic etching in such a manner so as to have a predetermined shape. 23. The micromachine manufacturing method according to claim 11, a mold used in said molding step being adapted to transmit light. 24. The micromachine manufacturing method according to claim 11, a mold used in said molding step being a secondary mold obtained by reverse-forming of a first mold. 25. The micromachine manufacturing method according to claim 11, said molding step comprising a pressure reducing step of reducing ambient pressure in a state, in which a mold is used, in such a way as to be lower than atmospheric pressure. 26. The micromachine manufacturing method according to claim 11, said molding step comprising a pressure reducing step of reducing ambient pressure in a state, in which a mold is used, in such a way as to realize an almost vacuum condition. 27. The micromachine manufacturing method according to claim 11, said molding step comprising a second microstructured forming step of forming said second microstructured portion by removing a part of said second microstructured after being molded by mold transfer.
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