초록 ▼

A vacuum chamber includes chamber walls separating a chamber interior and a chamber exterior, with one or more access ports defined in the chamber walls. A viewing tube extends from the chamber exterior into the chamber interior and terminates in a window. A positioner for imaging devices is then pr

A vacuum chamber includes chamber walls separating a chamber interior and a chamber exterior, with one or more access ports defined in the chamber walls. A viewing tube extends from the chamber exterior into the chamber interior and terminates in a window. A positioner for imaging devices is then provided within the viewing tube, and is thus situated at least partially within the chamber interior with its imaging device(s) oriented towards the window of the viewing tube to allow imaging of areas within the vacuum chamber. The positioner preferably allows translation and/or rotation of an imaging device within the viewing tube within two perpendicular planes oriented along the axis of the viewing tube, thereby allowing the imaging device to view an area of interest from more angles oriented about the area of interest than would otherwise be possible if the imaging device was situated outside the vacuum chamber.

대표청구항 ▼

1. A vacuum chamber comprising:a. chamber walls interposed between a chamber interior and a chamber exterior;b. a port defined in the chamber walls;c. a viewing tube attending from the port into the chamber interior, wherein the viewing tube is closed by an at least partially transparent window;d. a

1. A vacuum chamber comprising:a. chamber walls interposed between a chamber interior and a chamber exterior;b. a port defined in the chamber walls;c. a viewing tube attending from the port into the chamber interior, wherein the viewing tube is closed by an at least partially transparent window;d. an imaging device positioner including:i. an arcuate track fixed with respect to the port;ii. a positioner carriage movable along the track;iii. a positioner subcarriage movably affixed to the positioner carriage; andiv. an imaging device situated on the positioner subcarriage. 2. The vacuum chamber of claim 1 wherein at least a portion of the imaging device extends through the port and into the viewing tube and chamber interior. 3. The vacuum chamber of claim 1 wherein:a. the positioner carriage moves along the track in a carriage plane;b. the positioner subcarriage is movable with respect to the positioner carriage:i. in a first plane oriented at least substantially perpendicular to the carriage plane; andii. in a second plane oriented at least substantially parallel to the carriage plane. 4. The vacuum chamber of claim 1 further comprising:a. one or more springs interposed between the positioner carriage and positioner subcarriage, wherein the springs bias the positioner carriage and positioner subcarriage apart; andb. one or more threaded members extending between the positioner carriage and positioner subcarriage, wherein rotation of the threaded members repositions the positioner subcarriage with respect to the positioner carriage. 5. A vacuum chamber comprising:a. chamber walls surrounding a chamber interior;b. a port defined in the chamber walls, the port extending between the chamber interior and a chamber exterior;c. a viewing tube:i. extending from the port into the chamber interior, andii. being closed by a window situated within the chamber interior, the window being at least partially transparent. 6. The vacuum chamber of claim 5 wherein the viewing tube includes a flange removably affixed to the port, whereby the viewing tube may be removed from the port. 7. The vacuum chamber of claim 5 wherein the entirety of the viewing tube extends between:a. a circumferential flange affixed to the port, andb. the window. 8. The vacuum chamber of claim 5 wherein the viewing tube decreases in diameter between the port and the window. 9. The vacuum chamber of claim 5 further comprising:a. an imaging device; andb. an imaging device positioner movably mounting the imaging device at least partially within the viewing tube and the chamber interior. 10. The vacuum chamber of claim 9 wherein the imaging device positioner includes:a. an arcuate track fixed with respect to the port;b. a positioner carriage movable along the track; andc. a positioner subcarriage whereupon the imaging device is situated, the positioner subcarriage being movably affixed to the positioner carriage. 11. A vacuum chamber comprising:a. chamber walls surrounding a chamber interior;b. a port defined in the chamber walls, the port extending between the chamber interior and a chamber exterior;c. an imaging device positioner including:i. an arcuate track fixed with respect to the port;ii. a positioner carriage movable along the track;iii. a positioner subcarriage movably affixed to the positioner carriage; andiv. an imaging device situated on the positioner subcarriage. 12. The vacuum chamber of claim 11 wherein the arcuate track has a center of curvature situated within the chamber interior. 13. The vacuum chamber of claim 11 wherein the positioner carriage includes wheels engaging opposing sides of the track. 14. The vacuum chamber of claim 13 wherein the positioner carriage further includes a pinion engaging the track. 15. The vacuum chamber of claim 11 wherein one or more springs are interposed between the positioner carriage and positioner subcarriage, and wherein the springs bias the positioner carriage and positioner subcarriage apart. 16. The vacuum chamber of claim 15 further comprising one or more threaded members extending between the positioner carriage and positioner subcarriage, wherein rotation of the threaded members repositions the positioner subcarriage with respect to the positioner carriage. 17. The vacuum chamber of claim 11 wherein:a. the positioner carriage moves along the track in a carriage plane, andb. a first threaded member extends between the positioner subcarriage and the positioner carriage, and rotation of the first threaded member moves the positioner subcarriage relative to the positioner carriage in a direction at least substantially perpendicular to the carriage plane. 18. The vacuum chamber of claim 17 further comprising a second threaded member extending between the positioner subcarriage and the positioner carriage, wherein rotation of the second threaded member moves the positioner subcarriage relative to the positioner carriage in a direction at least substantially parallel to the carriage plane. 19. The vacuum chamber of claim 11 wherein at least a portion of the imaging device extends through the port and within the chamber interior. 20. The vacuum chamber of claim 11 further comprising a viewing tube:a. extending from the port into the chamber interior, andb. being closed by a window situated within the chamber interior, the window being at least partially transparent,wherein the imaging device extends at least partially into the viewing tube. 21. A vacuum chamber comprising:a. chamber walls interposed between a chamber interior and a chamber exterior, and surrounding the chamber interior;b. a port defined in the chamber walls between the chamber interior and the chamber exterior;c. a viewing tube extending from the port into the chamber interior, wherein the viewing tube is closed by an at least partially transparent window situated within the chamber interior;d. an imaging device positioner including:i. an arcuate track fixed with respect to the port;ii. a positioner carriage movable along the track;iii. a positioner subcarriage movably affixed to the positioner carriage; andiv. an imaging device situated on the positioner subcarriage, wherein at least a portion of the imaging device extends through the port and into the viewing tube and chamber interior. 22. The vacuum chamber of claim 21 wherein:a. the positioner carriage moves along the track in a carriage plane;b. the positioner subcarriage is movable with respect to the positioner carriage:i. in a first plane oriented at least substantially perpendicular to the carriage plane; andii. in a second plane oriented at least substantially parallel to the carriage plane. 23. The vacuum chamber of claim 21 further comprising:a. one or more springs interposed between the positioner carriage and positioner subcarriage, wherein the springs bias the positioner carriage and positioner subcarriage apart; andb. one or more threaded members extending between the positioner carriage and positioner subcarriage, wherein rotation of the threaded members repositions the positioner subcarriage with respect to the positioner carriage. 24. The vacuum chamber of claim 21 wherein the viewing tube decreases in diameter between the port and the window.