초록

To further enhance the chamber material performance of anodized aluminum alloy materials against fluorine and oxygen plasma attack, a ceramic-based surface coating, high purity yttrium oxide coating, is provided on the anodized aluminum alloy parts.

대표청구항 ▼

1. A processing chamber component resistant to a plasma including fluorine and oxygen species, said component comprising:a high purity aluminum substrate where particulates formed from mobile impurities have a particle size distribution such that no more than 0.2% of the particles are larger than 20

1. A processing chamber component resistant to a plasma including fluorine and oxygen species, said component comprising:a high purity aluminum substrate where particulates formed from mobile impurities have a particle size distribution such that no more than 0.2% of the particles are larger than 20 μm, with no particles being larger than 50 μm;an anodized coating on a surface of the high purity aluminum substrate; anda protective coating comprising yttrium oxide overlying the anodized coating. 2. A processing chamber component in accordance with claim 1, wherein said high purity aluminum substrate particle size distribution with respect to particulates formed from mobile impurities is such that at least 95% of all particles must be less than 5 μm in size, with no more than 0.1% of the particles being larger than 20 μm, and with no particles being larger than 40 μm. 3. A processing chamber component in accordance with claim 1, wherein said protective coating includes aluminum oxide up to about 10% by weight. 4. A process chamber component in accordance with claim 1, wherein said protective coating is 99.95% by weight or greater yttrium oxide. 5. A process chamber component in accordance with claim 1, wherein said protective coating applied using a method selected from the group consisting of spray coating, chemical vapor deposition, and physical vapor deposition. 6. A process chamber component in accordance with claim 5, where the coating comprising yttrium oxide has been mechanically finished to remove loose particles.