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특허 상세정보

Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) C23C-016/26   
미국특허분류(USC) 427/249.7; 427/533; 427/165
출원번호 US-0003436 (2001-12-06)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Nixon & Vanderhye P.C.
인용정보 피인용 횟수 : 31  인용 특허 : 139
초록

A glass substrate is ion beam milled in order to smoothen the same and/or reduce or remove nano-cracks in the substrate surface before a coating system (e.g., diamond-like carbon (DLC) inclusive coating system) is deposited thereon. It has been found that such ion beam milling of the substrate prior to deposition of the coating system improves adherence of the coating system to the underlying milled substrate. Moreover, it has surprisingly been found that such ion beam milling of the substrate results in a more scratch resistant coated article when a DLC...

대표
청구항

1. A method of making a coated article, the method comprising:providing a glass substrate;ion beam milling substantially an entire surface of the glass substrate so as to reduce the thickness of the substrate by at least about 2 Å, wherein during the ion beam milling an ion beam is directed toward the glass substrate so as to hit the substrate at an angle of from about 40-60 degrees in order to mill the substrate; anddepositing a coating on the substrate over at least a portion of the ion beam milled surface thereof. 2. The method of claim 1, wher...

이 특허에 인용된 특허 (139)

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