[특허]Packaged strain actuator

[미국특허] Packaged strain actuator 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-041/08
출원번호	US-0300137 (1999-04-27)
발명자 / 주소	Lazarus, Kenneth B. Lundstrom, Mark E. Moore, Jeffrey W. Crawley, Edward Russo, Farla Yoshikawa, Shoko Fitch, Eric
출원인 / 주소	Cymer, Inc.
대리인 / 주소	Cray William
인용정보	피인용 횟수 : 33 인용 특허 : 26

초록 ▼

A modular actuator assembly includes one or more plates or elements of electro-active material bonded to an electroded sheet, preferably by a structural polymer to form a card. The card is sealed, and may itself constitute a practical device, such as a vane, shaker, stirrer, lever, pusher or sonicator for direct contact with a solid or immersion in a fluid, or may be bonded by a stiff adhesive to make a surface-to-surface mechanical coupling with a solid workpiece, device, substrate machine or sample. The structural polymer provides a bending stiffness such that the thin plate does not deform to its breaking point, and a mechanical stiffness such that shear forces are efficiently coupled from the plate to the workpiece. In further embodiments, the card may include active circuit elements for switching, powering or processing signals, and/or passive circuit elements for filtering, matching or damping signals, so that few or no connections to outside circuitry are required. The actuator assembly can be manufactured in quantity, to provide a versatile actuator with uniform mechanical and actuation characteristics, that introduces negligible mass loading to the workpiece. The cards themselves may be arranged as independent mechanical actuators, rather tan strain-transfer actuators, in which the induced strain changes the position of the card. Various arrangements of pinned or cantilevered cards may act as a pusher, bender or other motive actuator, and structures such as powered bellows may be formed directly by folding one or more suitably patterned cards.

대표청구항 ▼

1. An actuator device comprising:a first and a second electro-active element each in plate form and mounted between two sheets of a stiff strong polymer, at least one of said sheets, defining a contact sheet, having a thickness of between one half mil and two mil and being clad with an electrode material on both sides; anda first and a second conductor,wherein said first conductor is in direct electrical contact with said first electro-active element through said contact sheet; and second conductor is in direct electrical contact with said second electro-active element through said contact sheet; andwherein said first and second electro-active elements and said conductors are arranged such that said device forms a generally sigmoidal shape upon activation of said first and second electro-active elements;wherein said first and second electro-active elements are bonded to said electrode sheet with a structural polymer to form a sealed card, andwherein said structural polymer and said two sheets of stiff strong polymer provides a bending stiffness sufficient to prevent deformation of the card to a breaking point and mechanical stiffness such that shear forces are efficiently coupled from the card to a workpiece.

이 특허에 인용된 특허 (26) 인용/피인용 타임라인 분석

Bird Larry (1715 Capital of Texas Hwy. Austin TX 78746), Anti-icing and deicing device.
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Bicos Andrew S. (Arcadia CA), Apparatus for passive damping of a structure.
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Itsumi Kazuhiro (Kawasaki JPX) Izumi Mamoru (Tokyo JPX), Automatic focus control apparatus for a video camera.
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Hanafy Amin M. (Los Altos Hills CA), Broadband phased array transducer design with frequency controlled two dimension capability and methods for manufacture.
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Hanafy Amin M. (Los Altos Hills CA) Maslak Samuel H. (Woodside CA) Plugge Jay S. (Mountain View CA), Broadband phased array transducer design with frequency controlled two dimension capability and methods for manufacture.
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Holt Lyn (Maidenhead GB2), Device sensitive to pressure waves.
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Edelman Seymour (9115 Glenridge Rd. Silver Spring MD 20910), Drag modification piezoelectric panels.
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McKee John M. (Coral Springs FL), Dual mode transducer.
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Crawley Edward F. (Arlington MA) de Luis Javier (Boston MA), Embedded piezoelectric structure and control.
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Cruz-Uribe Antonio S. (Cobalt CT) Hubbard David W. (Stamford CT) Raman Gopalan (Bethel CT), Impulse ink jet print head and method of making same.
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Iten Thomas (Zug CHX), Laminated piezoelectric keyboard.
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Hamada Akira (Iwaki JPX) Funakoshi Akira (Iwaki JPX) Ohira Keiichi (Iwaki JPX), Lead structure for a piezoelectric array-type ultrasonic probe.
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Dvorsky George R. (Manhattan Beach CA) Love David W. (Lakewood CA), Method for encapsulating a ceramic device for embedding in composite structures.
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Lazarus Kenneth B. (Boston MA) Lundstrom Mark E. (Cambridge MA) Moore Jeffrey W. (Concord MA) Crawley Edward F. (Cambridge MA), Packaged strain actuator.
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Schnoeller Manfred (Haimhausen DEX) Mohaupt Jutta (Munich DEX) Wersing Wolfram (Kirchheim DEX) Lubitz Karl (Ottobrunn DEX), Piezo-electric transducer having electrodes that adhere well both to ceramic as well as to plastics.
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Okuyama Hidenori (Hinagahigashi JPX) Aoyagi Katsumi (Agatagaoka JPX), Piezo-electric vibrator pump.
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Chida Yukio (Yokohama JPX) Nishimura Tetsunhiko (Yokohama JPX) Oguri Yasuo (Yokohama JPX), Piezoelectric bending actuator.
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Kiraly Louis J. (Brookpark OH), Piezoelectric composite materials.
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Sadler Michael (Burton-on-Trent GB2), Piezoelectric stress wave transducer with boron nitride piezo support.
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Tosi Kenneth F. (Plantation FL) McKee John M. (Coral Springs FL), Piezoelectric transducer arrangement with integral terminals and housing.
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Kaneko Nagao (Yokohama JPX) Nakamura Nanao (Kawasaki JPX) Koyama Masao (Yokohama JPX) Saitoh Shiroh (Yokohama JPX) Honda Hiroki (Yokohama JPX), Polymeric piezoelectric ultrasonic probe.
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Hathaway ; Richard Allen, Positionable transducing mounting structure and driving system therefor.
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Hellbaum Richard F. (Hampton VA) Bryant Robert G. (Poquoson VA) Fox Robert L. (Hayes VA), Thin layer composite unimorph ferroelectric driver and sensor.
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Lapetina Robert A. (Salt Lake City UT) Snow Gordon L. (Salt Lake City UT) Baird David P. (Salt Lake City UT), Two-dimensional piezoelectric transducer assembly.
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Snyder Jonathan E. (Whitefish Bay WI), Ultrasonic transducer array having laser-drilled vias for electrical connection of electrodes.
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Tanaka Toshiharu (Hirakata JA), Vibration detecting device having a piezoelectric ceramic plate and a method for adapting the same for use in musical in.
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이 특허를 인용한 특허 (33) 인용/피인용 타임라인 분석

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Shih, Wan Y.; Shih, Wei-Heng; Markidou, Anna; Szweczyk, Steven T.; Yegingil, Hakki, All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Shih, Wan Y.; Shih, Wei-Heng; Markidou, Anna; Szweczyk, Steven T.; Yegingil, Hakki, All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Shih, Wan Y.; Shih, Wei-Heng; Markidou, Anna; Szweczyk, Steven T.; Yegingil, Hakki, All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Shih, Wan Y.; Shih, Wei-Heng; Markidou, Anna; Szweczyk, Steven T.; Yegingil, Hakki, All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Shih,Wan Y.; Shih,Wei Heng; Markidou,Anna; Szweczyk,Steven T.; Yegingil,Hakki, All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Shih, Wan Y.; Shih, Wei-Heng; Markidou, Anna; Sweczyk, Steven T.; Yengingil, Hakki, All-electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement.
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Gipson, Timothy R.; Hanly, Stephen; Keegan, Noel Jared, Bussed haptic actuator system and method.
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Shih, Wan Y.; Capobianco, Joseph; Shih, Wei-Heng, Determination of dissociation constants using piezoelectric microcantilevers.
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Matthews, Fred Timothy; Meyer, Paul Aloysius; Krohn, Matthew Harvey; Smith, Nathan John; Vigano, Adeodato Maria, Device for measuring material thickness.
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Shih, Wan Y.; Shih, Wei-Heng; Zhu, Qing, Enhanced detection sensitivity with piezoelectric microcantilever sensors.
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Shih, Wei-Heng; Shih, Wan Y.; Li, Huidong, Lead-free piezoelectric ceramic films and a method for making thereof.
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Mortet, Vincent; Petersen, Rainer, Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment.
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Shih, Wan Y.; Shih, Wei-Heng; Shen, Zuyan; McGovern, John-Paul; Zhu, Qing; Capobianco, Joseph, Piezoelectric microcantilever sensors for biosensing.
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Shih, Wan Y.; Shih, Wei-Heng; Shen, Zuyan; Zhu, Qing, Piezoelectric microcantilevers and uses in atomic force microscopy.
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Pletner, Baruch; Kessenich, Grace R.; Horth, Wesley T., Unimorph/bimorph piezoelectric package.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Packaged strain actuator 원문보기