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|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||403/325; 411/371.2; 411/544; 269/091; 451/365|
|발명자 / 주소||
|대리인 / 주소||
|인용정보||피인용 횟수 : 6 인용 특허 : 10|
A plurality of latches are employed for detachably holding a semiconductor wafer to a ring support during processing. Each latch is rotatably mounted on a post which is secured to the ring so that it can move to engage and disengage the wafer, alternately clamping and releasing it from the ring. Each latch has two opposed rollers, one to engage and disengage the wafer and the other to engage the ring. The latches should be freely rotatable into and out of engagement with the wafer. The ring usually has two pairs of opposed dimples such that each roller i...
1. A latch for releasably holding a semiconductor wafer to a wafer supporting device comprising:a latch body having a transverse opening extending there through,a mounting device extending through the opening,a ball bearing having an inner and an outer race, mounted for rotation on the mounting device,a spacing device on the mounting device for engaging only the top of the inner race of the ball bearing,a biasing member engaged between the outer race of the ball bearing and the latch body biasing the inner race of the ball bearing against the spacing dev...