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Microelectronic die including low RC under-layer interconnects 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0428449 (2003-04-30)
발명자 / 주소
  • Parks, Jay S.
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Schwegman, Lundberg, Woessner & Kluth, P.A.
인용정보 피인용 횟수 : 4  인용 특허 : 52

초록

A microelectronic die comprises a first area, a second area and an under-layer of conductive material formed in the second area to interconnect components. A method of making a microelectronic die comprises forming a layer of insulative material on a substrate; forming at least one trench in the lay

대표청구항

1. A method of making a microelectronic die, comprising:forming a layer of insulative material on a substrate;forming at least one trench in the layer of insulative material spaced above the substrate and extending from proximate one edge of the microelectronic die to proximate another edge of the m

이 특허에 인용된 특허 (52)

  1. Dingsor Andrew Dwight, Apparatus, method and article of manufacture for carrier frequency compensation in a FM radio receiver.
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  3. Esquivel Agerico L. (13912 Waterfall Way Dallas TX 75240) Mitchell Allan T. (2913 Green Meadow Garland TX 75042), Buried multilevel interconnect system.
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  5. Chen Liang-Yuh ; Tao Rong ; Guo Ted ; Mosely Roderick Craig, Dual damascene metallization.
  6. Gonzales Fernando (Boise ID), Dynamic random access memory array having a cross-point layout, tungsten digit lines buried in the substrate, and vertic.
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  8. Yamamoto Tadashi (Kawasaki JPX) Sawada Shizuo (Yokohama JPX), Dynamic random access memory having bit lines buried in semiconductor substrate.
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  10. Lee Kyu-Woong (Arlington MA) Durschlag Mark S. (Natick MA) Day John (Lexington MA), Evaporated thick metal and airbridge interconnects and method of manufacture.
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  32. Tam Gordon (Chandler AZ) Granick Lisa R. (Philadelphia PA), Method of fabricating airbridge metal interconnects.
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  34. Liu Chung-Shi,TWX ; Yu Chen-Hua,TWX, Method of forming a smooth copper seed layer for a copper damascene structure.
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  38. Fujii Hiroyuki (Hyogo JPX) Harada Shigeru (Hyogo JPX), Method of manufacturing semiconductor device having multilayer interconnection structure.
  39. Cha Sung W. (Cambridge MA) Suh Nam P. (Sudbury MA) Baldwin Daniel F. (Medford MA) Park Chul B. (Cambridge MA), Microcellular thermoplastic foamed with supercritical fluid.
  40. Nakano Hirofumi (Itami JPX), Multi-layer wiring.
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  49. Bertin Claude L. (South Burlington VT) Farrar ; Sr. Paul A. (South Burlington VT) Kalter Howard L. (Colchester VT) Kelley ; Jr. Gordon A. (Essex Junction VT) van der Hoeven Willem B. (Jericho VT) Whi, Three dimensional multichip package methods of fabrication.
  50. Bertin Claude L. (South Burlington) Farrar ; Sr. Paul A. (South Burlington) Kalter Howard L. (Colchester) Kelley ; Jr. Gordon A. (Essex Junction) van der Hoeven Willem B. (Jericho) White Francis R. (, Three-dimensional multichip packages and methods of fabrication.
  51. Kenney Donald M. (Shelburne VT), Trench interconnect for CMOS diffusion regions.
  52. Lu Chih-Yuan (Hsin-chu TWX), Vertical DRAM cross point memory cell and fabrication method.

이 특허를 인용한 특허 (4)

  1. Crisp, Richard Dewitt; Haba, Belgacem; Zohni, Wael, Co-support for XFD packaging.
  2. Crisp, Richard Dewitt; Haba, Belgacem; Zohni, Wael, Co-support for XFD packaging.
  3. Crisp, Richard Dewitt; Zohni, Wael; Haba, Belgacem; Chen, Yong, In-package fly-by signaling.
  4. Crisp, Richard Dewitt; Zohni, Wael; Haba, Belgacem; Chen, Yong, In-package fly-by signaling.
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