IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0227135
(2002-08-23)
|
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
10 인용 특허 :
12 |
초록
A robust, compact spectrometer apparatus for determining respective concentrations or partial pressures of multiple gases in a gas sample with single as well as multiple and even overlapping, absorption or emission spectra that span a wide spectral range.
대표청구항
▼
1. A spectrometer comprising:an infrared source for projecting an infrared beam;a gas sample cell positioned in the path of the infrared beam;a scanning mirror bearing a diffraction grating comprising a plurality of parallel lines and positioned in the path of the infrared beam after passage thereof
1. A spectrometer comprising:an infrared source for projecting an infrared beam;a gas sample cell positioned in the path of the infrared beam;a scanning mirror bearing a diffraction grating comprising a plurality of parallel lines and positioned in the path of the infrared beam after passage thereof through the gas sample cell;a mirror drive for oscillating the scanning mirror about an axis parallel to the diffraction grating lines;a first focusing mirror positioned to focus at least one band of interest of the infrared beam as diffracted by the diffraction grating;a first detector positioned to receive the at least one focused band of interest;a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; anda synchronizer operatively coupled to the mirror drive and the detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit. 2. The spectrometer of claim 1, wherein the mirror drive is an electrostatic drive or a magnetic drive. 3. The spectrometer of claim 1, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first detector readout circuit. 4. The spectrometer of claim 1, wherein the synchronizer is responsive to a signal received from the mirror drive. 5. The spectrometer of claim 1, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 6. The spectrometer of claim 1, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the beam passes through the gas sample cell. 7. The spectrometer of claim 6, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 8. The spectrometer of claim 1, further including a collimator positioned to receive and collimate the infrared beam projected from the source. 9. The spectrometer of claim 1, further comprising:a dichroic splitter positioned in the path of the diffracted infrared beam from the scanning mirror for separating the diffracted infrared beam into discrete bands of interest traveling respective paths;a second focusing mirror positioned in a respective path of the discrete bands of interest;a second detector positioned to receive a focused discrete band of interest; anda second detector readout circuit operatively coupled to the second detector to receive a signal from the second detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits. 10. The spectrometer of claim 9, wherein the mirror drive is an electrostatic drive or a magnetic drive. 11. The spectrometer of claim 9, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first or the second detector readout circuits. 12. The spectrometer of claim 9, wherein the synchronizer is responsive to a signal received from the mirror drive. 13. The spectrometer of claim 9, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 14. The spectrometer of claim 9, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the beam passes through the gas sample cell. 15. The spectrometer of claim 14, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 16. The spectrometer of claim 9, further including a collimator positioned to re ceive and collimate the infrared beam projected from the source. 17. The spectrometer of claim 1, wherein the scanning mirror is a scanning flat grating mirror. 18. The spectrometer of claim 17, wherein the mirror drive is an electrostatic drive or a magnetic drive. 19. The spectrometer of claim 17, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest. 20. The spectrometer of claim 17, wherein the synchronizer is responsive to a signal received from the mirror drive. 21. The spectrometer of claim 17, further comprising a sensor mounted in proximity to the scanning flat grating mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 22. The spectrometer of claim 17, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning flat grating mirror after the infrared beam passes through the gas sample cell. 23. The spectrometer of claim 22, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning flat grating mirror. 24. The spectrometer of claim 1, wherein the scanning mirror is a concave scanning and focusing mirror to focus at least one band of interest of the infrared beam as diffracted by the diffraction grating. 25. The spectrometer of claim 24, wherein the mirror drive is an electrostatic drive or a magnetic drive. 26. The spectrometer of claim 24, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest. 27. The spectrometer of claim 24, wherein the synchronizer is responsive to a signal received from the mirror drive. 28. The spectrometer of claim 24, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the concave scanning and focusing mirror to provide an input signal to the synchronizer. 29. The spectrometer of claim 24, further comprising a turning mirror, positioned to reflect the infrared beam toward the concave scanning and focusing mirror after the beam passes through the sample cell. 30. The spectrometer of claim 24, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the concave scanning and focusing mirror. 31. A spectrometer comprising:an infrared source for projecting an infrared beam;a gas sample cell positioned in the path of the infrared beam;a scanning mirror positioned in the path of the infrared beam after passage thereof through the gas sample cell;a mirror drive for oscillating the scanning mirror;a first focusing mirror bearing a diffraction grating comprising a plurality of parallel lines, wherein the first focusing mirror is positioned in the path of the infrared beam reflected from the scanning mirror for reflecting, diffracting, and focusing a band of interest from the infrared beam;a first detector positioned in the path of the band of interest;a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; anda synchronizer operatively coupled to the mirror drive and the detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit. 32. The spectrometer of claim 31, wherein the mirror drive is an electrostatic drive or a magnetic drive. 33. The spectrometer of claim 31, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first detector readout circuit. 34. The spectrometer of claim 31, wherein the synchronizer is responsive to a signal received from the mirror drive. 35. The spectrometer of claim 31, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 36. The spectrometer of claim 31, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the beam passes through the sample cell. 37. The spectrometer of claim 36, the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 38. The spectrometer of claim 31, further including a collimator positioned to receive and collimate the infrared beam projected from the source. 39. The spectrometer of claim 31, further comprising:a dichroic splitter positioned in the path of the infrared beam reflected from the scanning mirror for splitting the infrared beam into a plurality of bands of interest;a second focusing mirror bearing a diffraction grating comprising a plurality of lines, wherein the second focusing mirror positioned in a path of a band of interest for reflecting, diffracting, and focusing a respective band of interest;a second detector positioned to receive a reflected, focused band of interest; anda second detector readout circuit operatively coupled to the first or the second detector to receive a signal from the first or the second detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits. 40. The spectrometer of claim 39, wherein the mirror drive is an electrostatic drive or a magnetic drive. 41. The spectrometer of claim 39, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first or the second detector readout circuits. 42. The spectrometer of claim 39, wherein the synchronizer is responsive to a signal received from the mirror drive. 43. The spectrometer of claim 39, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 44. The spectrometer of claim 39, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the infrared beam passes through the gas sample cell. 45. The spectrometer of claim 44, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 46. The spectrometer of claim 39, further including a collimator positioned to receive and collimate the infrared beam projected from the source. 47. The spectrometer of claim 31, wherein the scanning mirror is a scanning flat mirror. 48. The spectrometer of claim 47, wherein the mirror drive is an electrostatic drive or a magnetic drive. 49. The spectrometer of claim 47, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest. 50. The spectrometer of claim 47, wherein the synchronizer is responsive to a signal received from the mirror drive. 51. The spectrometer of claim 47, further comprising a sensor mounted in proximity to the scanning flat mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 52. The spectrometer of claim 47, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning flat mirror after the beam passes through the gas sample cell. 53. The spectrometer of claim 52, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning flat mirror. 54. A spectrometer comprising:an infrared source for projecting an infrared beam;a gas sample cell positioned in the path of the infrared beam;a scanning mirror positioned in the path of the infrared beam after passage thereof through the gas sample cell;a mirror drive for oscillating the scanning mirror;a first diffraction grating positioned in the path of the infrared beam as reflected from the scanning mirror for diffracting the infrared beam;a first focusing mirror positioned in the path of a portion of the diffracted infrared beam to focus a band of interest;a first detector positioned to receive a focused band of interest;a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; anda synchronizer operatively coupled to the mirror drive and the first detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit. 55. The spectrometer of claim 54, wherein the mirror drive is an electrostatic drive or a magnetic drive. 56. The spectrometer of claim 54, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first detector readout circuit. 57. The spectrometer of claim 54, wherein the synchronizer is responsive to a signal received from the mirror drive. 58. The spectrometer of claim 54, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 59. The spectrometer of claim 54, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the beam passes through the sample cell. 60. The spectrometer of claim 59, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 61. The spectrometer of claim 54, further including a collimator positioned to receive and collimate the infrared beam projected from the source. 62. The spectrometer of claim 54, further comprising:a first dichroic splitter positioned to receive the infrared beam reflected from the scanning mirror and divide the infrared beam into a plurality of bands;a second diffraction grating positioned to receive at least one band of interest from the first dichroic splitter;a second focusing mirror positioned in the path of the at least one band of interest after diffraction thereof;a second detector positioned in the path of the at least one diffracted band of interest focused by the second focusing mirror; anda second detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits. 63. The spectrometer of claim 62, wherein the mirror drive is an electrostatic drive or a magnetic drive. 64. The spectrometer of claim 62, wherein the synchronizer is a phase lock loop synchronizer programmed to locate a preselected spectral region of interest from the output of the first or the second detector readout circuits. 65. The spectrometer of claim 62, wherein the synchronizer is responsive to a signal received from the mirror drive. 66. The spectrometer of claim 62, further comprising a sensor mounted in proximity to the scanning mirror for determining positions of the scanning mirror to provide an input signal to the synchronizer. 67. The spectrometer of claim 62, further comprising a turning mirror, positioned to reflect the infrared beam toward the scanning mirror after the beam passes through the gas sample cell. 68. The spectrometer of claim 67, wherein the turning mirror is positioned to reflect the infrared beam through the gas sample cell a second time before the infrared beam reaches the scanning mirror. 69. The spectrometer of claim 62, further including a collimator positioned to receive and collimate the infrared beam projected from the source. 70. The spectrometer of claim 62, further comprising:a third diffraction grating positioned to receive at least one band of interest from the first o r the second dichroic splitter;a third focusing mirror positioned in the path of a band of interest after diffraction thereof;a third detector positioned in the path of a diffracted band of interest focused by one of the first, the second, or the third focusing mirror; anda third detector readout circuit operatively coupled to the first, the second, or the third detector to receive a signal from the first, the second, or the third detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with one of the first, the second, and the third detector readout circuits.
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