IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0328853
(2002-12-24)
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발명자
/ 주소 |
- Bacchi, Paul
- Filipski, Paul S.
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출원인 / 주소 |
|
대리인 / 주소 |
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인용정보 |
피인용 횟수 :
11 인용 특허 :
14 |
초록
▼
An optical scanning assembly detects positions of wafer specimens stored in a transport box. The scanning assembly includes first and second spaced-apart optical component mounts operatively connected to a deployment mechanism that moves them between extended and retracted positions. The extended po
An optical scanning assembly detects positions of wafer specimens stored in a transport box. The scanning assembly includes first and second spaced-apart optical component mounts operatively connected to a deployment mechanism that moves them between extended and retracted positions. The extended positions facilitate specimen scanning operation, and the retracted positions facilitate carrier box front side access during specimen non-scanning processing. A preferred embodiment is a scanning assembly of a differential optical type.
대표청구항
▼
1. A deployable specimen scanning mechanism, comprising:a support configured to receive a carrier box in which a specimen set of one or more specimens is stored, the carrier box having a front side that when open allows specimen delivery for or specimen removal from storage;a scanning assembly inclu
1. A deployable specimen scanning mechanism, comprising:a support configured to receive a carrier box in which a specimen set of one or more specimens is stored, the carrier box having a front side that when open allows specimen delivery for or specimen removal from storage;a scanning assembly including first and second spaced-apart optical component mounts operatively connected to a deployment mechanism that moves the first and second optical component mounts between deployed and retracted positions;a light emitter and a light sensor operatively associated with the first and second optical component mounts in the deployed positions to form a beam of light propagating along a light propagation path between the light emitter and light sensor and intersecting the first and second optical component mounts; anda positioning mechanism for imparting controlled relative movement between the specimen set stored in the carrier box and the first and second optical component mounts, the relative movement taking place with the stored specimen set occupying a space between the first and second optical component mounts in the deployed positions, the first and second optical component mounts in the deployed positions straddling the specimen set stored in the carrier box so that the light propagation path intersects and is thereby interrupted by each specimen in the specimen set scanned by the first and second optical component mounts, and the first and second optical component mounts in the retracted positions providing clearance for access to the open front side of the carrier box during specimen non-scanning processing. 2. The scanning mechanism of claim 1, in which the operative association of the light emitter and the light sensor with the first and second optical component mounts entails different ones of the first and second optical component mounts supporting the light emitter and the light sensor. 3. The scanning mechanism of claim 2, in which the light propagation path when uninterrupted forms a continuous straight line path between the first and second optical component mounts. 4. The scanning mechanism of claim 1, in which the first and second optical component mounts of the scanning assembly are operatively connected to a component of a front-opening interface mechanical standard system. 5. The scanning mechanism of claim 4, in which the component of the front-opening interface mechanical standard system is nonstationary. 6. The scanning mechanism of claim 4, in which the component has a front surface that defines a front surface plane and the deployment mechanism points the first and second optical component mounts in the deployed positions such that the light emitter and the light sensor are positioned in front of the front surface plane and in the retracted positions such that the light emitter and the light sensor are positioned in back of the front surface plane. 7. The scanning mechanism of claim 4, in which the component includes a port door of a front-opening interface mechanical standard system transport box load interface. 8. The scanning mechanism of claim 7, in which the port door has a front surface that defines a port door front surface plane, the first and second optical component mounts are operatively connected for curvilinear movement relative to the port door, and the deployment mechanism moves the first and second optical component mounts along curvilinear paths to the deployed and retracted positions, the deployed positions pointing the first and second optical component mounts outwardly of the port door front surface plane and the deployed positions stowing the first and second optical component mounts behind the port door front surface plane. 9. The scanning mechanism of claim 7, in which the front side of the carrier box has a front side margin that defines a front side datum plane, and further comprising an elevator assembly operatively coupled to the port door, the elevator assembly cooperating with the positioning mechanism by moving the port door and thereby the light propagation path along a travel path portion that is generally parallel to the front side datum plane. 10. The scanning mechanism of claim 7, in which the front side of the carrier box has a front side margin that defines a front side datum plane, and further comprising an elevator assembly operatively coupled to the port door, the elevator assembly cooperating with the positioning mechanism by moving the port door and thereby the light propagation path along a travel path portion that intersects each specimen in the specimen set scanned by the first and second optical component mounts. 11. The scanning mechanism of claim 1, in which the front side of the carrier box has a front side margin that defines a front side datum plane; in which the light emitter, the light sensor, the beam of light, and the light propagation path constitute, respectively, a first light emitter, a first light sensor producing a first output signal, a first beam of light, and a first light propagation path; and in which the first light propagation path is inclined at a first angle of known rotational sense relative to a reference datum plane that is oriented transversely of the front side datum plane, the scanning mechanism further comprising:a second light emitter and a second light sensor operatively associated with the first and second optical component mounts in their deployed positions to form a second beam of light propagating along a second light propagation path between the second light emitter and second light detector and intersecting the first and second optical component mounts, the second light sensor producing a second output signal and the second light propagation path inclined at a second angle of known rotational sense relative to the reference datum plane;a position tracking device responsive to the relative movement to provide information from which a position of each specimen in the specimen set scanned by the first and second optical component mounts can be derived; anda signal processor receiving and taking the difference of the first and second output signals produced by the respective first and second light sensors as each specimen in the specimen set interrupts the first and second light propagation paths in response to the relative movement, the signal processor cooperating with the position tracking device to provide position information about each specimen in the specimen set scanned by the first and second optical component mounts. 12. The scanning mechanism of claim 11, further comprising a port door of a front-opening interface mechanical standard system transport box load interface, the first and second optical component mounts operatively coupled to the port door. 13. The scanning mechanism of claim 12, in which the port door has a front surface that defines a port door front surface plane, the first and second optical component mounts are operatively connected for curvilinear movement relative to the port door, and the deployment mechanism moves the first and second optical component mounts along curvilinear paths to the deployed and retracted positions, the deployed positions pointing the first and second optical component mounts outwardly of the port door front surface plane and the deployed positions stowing the first and second optical component mounts behind the port door front surface plane. 14. A deployable specimen position sensing mechanism, comprising:a support configured to receive a carrier box in which a specimen set of one or more specimens is stored, the carrier box having a front side that when open allows specimen delivery for or specimen removal from storage;a specimen position sensing mechanism including first and second spaced-apart optical component mounts that are operatively connected to respective first and second deployment mechanisms that move the first and second optical component mounts between deployed and retracted positi ons; anda light emitter carried by the first optical component mount and a light sensor carried by the second optical component mount, the first and second optical component mounts in the deployed positions causing the light emitter and the light sensor to propagate between them a light beam positioned for interruption by the specimen set stored in the carrier box to give indications of positional relationships of each specimen in the specimen set, and the first and second optical component mounts in the retracted position providing clearance for access to the open front side of the carrier box. 15. The position sensing mechanism of claim 14, in which the first and second optical component mounts are operatively connected to a component of a front-opening interface mechanical standard system. 16. The scanning mechanism of claim 14, in which the first and second deployment mechanisms are operatively connected to a common drive.
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