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Combinatorial electrochemical deposition and testing system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/26
출원번호 US-0694176 (2000-10-23)
발명자 / 주소
  • Warren, Christopher J.
  • Haushalter, Robert C.
  • Matsiev, Leonid
  • Devenney, Martin
  • McFarland, Eric
  • Danielson, Earl
출원인 / 주소
  • Symyx Technologies, Inc.
인용정보 피인용 횟수 : 20  인용 특허 : 32

초록

An electrochemical deposition and testing system consisting of individually addressable electrode arrays, a fully automated deposition head, and a parallel screening apparatus is described. The system is capable of synthesizing and screening millions of new compositions at an unprecedented rate.

대표청구항

1. A system for electrochemically screening an array of materials, said system comprising:(a) an array of different materials having an individually addressable electrode corresponding to each different material in the array; and(b) means associated with each of said electrodes for simultaneously te

이 특허에 인용된 특허 (32)

  1. Chow Calvin Y. H., Analytical system and method.
  2. Langenskild Carl G. (Stockholm SEX) Olin Stefan (Hagersten SEX) Hallberg Mats A. (Lidingall of SEX), Apparatus and method for electroplating.
  3. Lester Ronald F. (Chelmsford GBX), Apparatus for selectively coating part of a member.
  4. Cavicchi Richard (Washington Grove MD) Semancik Stephen (Mt. Airy MD) Suehle John S. (Westminster MD) Gaitan Michael (Gaithersburg MD), Application of microsubstrates for materials processing.
  5. Nakashima Takashi (Kitakyushu JPX), Ball grid assembly type semiconductor device having a heat diffusion function and an electric and magnetic shielding fun.
  6. Sugihara Hirokazu,JPX ; Oka Hiroaki,JPX ; Shimono Ken ; Ogawa Ryuta,JPX ; Taketani Makoto, Cell potential measuring electrode and measuring apparatus using the same.
  7. Southern Edwin (Oxford GBX), Electrochemical treatment of surfaces.
  8. Carey Charles Francis (Endicott NY) Fallon Kenneth Michael (Vestal NY) Markovich Voya Rista (Endwell NY) Powell Douglas Oliver (Endicott NY) Vlasak Gary Paul (Owego NY) Zarr Richard Stuart (Apalachin, Electroplating apparatus.
  9. Denofrio Charles (117 Oregon Ave. West Dundee IL 60118), Electroplating apparatus.
  10. Kawachi Norio (Hiratsuka JPX) Ito Midori (Tokyo JPX) Naka Toshiharu (Abiko JPX) Tsuji Hidenori (Fujisawa JPX), Electroplating apparatus.
  11. Saito Tadashi (Tochigi-ken JPX) Sato Atsushi (Tochigi-ken JPX) Misumi Hisashi (Tochigi-ken JPX), Electroplating apparatus.
  12. Griego Thomas P. (Grants NM), Electroplating apparatus and electroplating method of small articles.
  13. Lazaro Anton Ernest ; Tremmel Peter Heinrich, Electroplating system and process.
  14. Finkelstein Walter (Rockville MD) Hall John H. (San Jose CA), Flat panel display having improved electrode array.
  15. Havens John R. ; Krihak Michael K. ; Greef Charles H. ; Raymond Daniel E. ; Heller Michael J., Inorganic permeation layer for micro-electric device.
  16. Hawkins Gilbert A. (Mendon NY) Revelli Joseph F. (Rochester NY) Williams David J. (Fairport NY), Integrated electro-optical scanner with photoconductive substrate.
  17. Warren Christopher J. ; Haushalter Robert C. ; Matsiev Leonid, Method for creating and testing a combinatorial array employing individually addressable electrodes.
  18. Igarashi, Yusuke; Sakamoto, Noriaki; Kobayashi, Yoshiyuki; Nakamura, Takeshi, Method for fabricating a circuit device.
  19. Bok Hendrik F. (52 Thompson St. Fairhaven MA 02719) Birbara Philip J. (52 Elm St. Windsor Locks CT 06096), Method for uniform film coating of substrates.
  20. Francis William L. (3409 Greenview Dr. New Albany IN 47150) Renshaw William L. (3410 Deerwood Dr. New Albany IN 47150) Hartley Steven P. (Rte. 2 ; Box 578 Georgetown IN 47122), Method of continuous electroplating and continuous electroplating machine for printed circuit board terminals.
  21. Barrett John R. (Wayland MA), Method of fabricating a PbS-PbSe IR detector array.
  22. Dehnert ; Heinz, Method of forming a comb-like electrode structure.
  23. Ohsawa Kenji,JPX ; Ito Makoto,JPX, Method of manufacturing a semiconductor package.
  24. Yee Hee-Jin (Seoul KRX), Multi-electrode biosensor and system and method for manufacturing same.
  25. Eric McFarland ; Earl Danielson ; Martin Devenney ; Christopher J. Warren, Potential masking systems and methods for combinatorial library synthesis.
  26. Tzanavaras George (2674 Park Wilshire Dr. San Jose CA 95124) Cohen Uri (765 San Antonio Rd. ; #53 Palo Alto CA 94303), Precision high rate electroplating cell and method.
  27. Mori Seiki (Tokyo JPX) Ohtoh Yasutoshi (Tokyo JPX) Beppu Masaaki (Tokyo JPX), Process and apparatus for composite electroplating a metallic material.
  28. Vecellio, Anthony M., Robot painting system for automobiles.
  29. Shimizu Hiroya,JPX ; Nishimura Asao,JPX ; Miyamoto Tosiho,JPX ; Tanaka Hideki,JPX ; Miura Hideo,JPX, Semiconductor device.
  30. Ishimaru, Kazunari, Semiconductor device with fuse to be blown with energy beam and method of manufacturing the semiconductor device.
  31. Semancik Stephen (Mt. Airy MD) Cavicchi Richard E. (Washington Grove MD) Gaitan Michael (Gaithersburg MD) Suehle John S. (Westminister MD), Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation.
  32. Hunter Ian W. (6 Oakdale La. Lincoln MA 01773) Lafontaine Serge R. (11 Mill St. Extention Lincoln MA 01773) Madden John D. (3290 Cypress St. Vancouver B.C. CAX V6J 3N6 ), Three dimensional microfabrication by localized electrodeposition and etching.

이 특허를 인용한 특허 (20)

  1. Weiner, Kurt H.; Chiang, Tony P.; Francis, Aaron; Schmidt, John, Advanced mixing system for integrated tool having site-isolated reactors.
  2. Yang, Michael X.; Kovarsky, Nicolay Y., Anolyte for copper plating.
  3. Satitpunwaycha, Peter; Endo, Richard; Fresco, Zachary; Kumar, Nitin, Combinatorial processing including rotation and movement within a region.
  4. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  5. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  6. Chandrasekhar, Prasanna, Complimentary polymer electrochromic device.
  7. Jiang, Rongzhong; Chu, Deryn, Electrochemical test apparatus and method for its use.
  8. Chandrasekhar, Prasanna; Zay, Brian J.; Laganis, Edward J.; Romanov, Vasily V.; LaRosa, Anthony J., Electrochromic eyewear.
  9. Lazovsky, David E.; Malhotra, Sandra G.; Boussie, Thomas R., Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region.
  10. Lazovsky, David E.; Malhotra, Sandra G.; Boussie, Thomas R., Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region.
  11. Lazovsky,David E.; Malhotra,Sandra G.; Boussie,Thomas R., Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region.
  12. Chiang, Tony P.; Lazovsky, David E.; Boussie, Thomas R.; Gorer, Alexander, Methods for discretized processing of regions of a substrate.
  13. Lazovsky,David E.; Chiang,Tony P.; Keshavarz,Majid, Molecular self-assembly in substrate processing.
  14. Chandrasekhar, Prasanna; Chai, Yanjie, Potentiostat/galvanostat with digital interface.
  15. Chiang, Tony P.; Lazovsky, David E.; Malhotra, Sandra G., Processing substrates using site-isolated processing.
  16. Fresco, Zachary; Lang, Chi-I; Malhotra, Sandra G.; Chiang, Tony P.; Boussie, Thomas R.; Kumar, Nitin; Tong, Jinhong; Duong, Anh, Substrate processing including a masking layer.
  17. Weiner, Kurt H.; Chiang, Tony P.; Pinto, Gustavo A., System and method for increasing productivity of combinatorial screening.
  18. Chiang, Tony P.; Lazovsky, David E.; Boussie, Thomas R.; McWaid, Thomas H.; Gorer, Alexander, Systems for discretized processing of regions of a substrate.
  19. Chandrasekhar, Prasanna, Variable-emittance electrochromic devices and methods of preparing the same.
  20. Francis, Aaron; Schmidt, John; Williams, Kenneth Alfred, Vented combinatorial processing cell.
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