[특허]Wafer management system and methods for managing wafers

[미국특허] Wafer management system and methods for managing wafers 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65G-049/07
출원번호	US-0016610 (2001-10-30)
발명자 / 주소	McGowan, Richard
출원인 / 주소	Freescale Semiconductor, Inc.
인용정보	피인용 횟수 : 10 인용 특허 : 12

초록 ▼

A wafer management system has a first stationary wafer storage system ( 100 ) with a first buffer ( 110 ) for storing a plurality of wafers in slots, a first load-and-unload station ( 115 ) for transferring the wafers between the first buffer ( 110 ) and intra-bay pods ( 120, 130 ) assigned to a first bay ( 160 ), and a second load-and-unload station ( 184 ) for transferring wafers between the first buffer ( 110 ) and further pods ( 520, 530 ). The storage system ( 100 ) and the bay ( 160 ) form a single unit. Multiple units are linked together by tracks ( 500 ).

대표청구항 ▼

1. A method for transporting wafers from a first processing tool assigned to a first bay to a second processing tool assigned to a second bay, comprising the following steps:transferring said wafers from said first processing tool to at least one first intra-bay pod;transporting said at least one intra-bay pod to a first stationary storage system comprising a first buffer for storing a plurality of wafers out of pods;transferring said wafers into said first buffer via a first load-and-unload station;reading information from the wafers and labeling the wafers in the first buffer, wherein said labeling comprises storing information on the wafers as to a place of storage in the first stationary storage system;transferring said wafers from said first buffer to at least one pod;transporting said at least one pod to a second stationary storage system comprising a second buffer for storing a plurality of wafers out of pods;transferring said wafers from said at least one pod into said second buffer;reading information from the wafers and labeling the wafers in the second buffer;transferring said wafers from said second buffer to at least one second intra-bay pod;transporting said at least one second intra-bay pod to said second processing tool; andtransferring said wafers from said at least one second intra-bay pod to said second processing tool. 2. The method according to claim 1, further comprising the step of transferring said wafers from said first stationary storage system to said second stationary storage system where the first stationary storage system reaches capacity. 3. The method of claim 1, wherein labeling comprises lot identification. 4. The method of claim 1, wherein reading comprises processing status. 5. The method of claim 1, wherein labeling comprises wafer identification.

이 특허에 인용된 특허 (12) 인용/피인용 타임라인 분석

Conboy Michael R. ; Shedd Danny C. ; Coss ; Jr. Elfido, Automated material handling system for a manufacturing facility divided into separate fabrication areas.
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Beaver ; II Robert I. (Menlo Park CA) Adams Michael J. (San Jose CA) Prodanovich George L. (Campbell CA) Key Paul F. (San Martin CA) Rawlings Don O. (San Jose CA) Santhanam P. (Sunnyvale CA) Hunt Sus, Buffer storage apparatus for semiconductor wafer processing.
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Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transpo.
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Huber, Ronald; Klaebsch, Rolf-Arno, Installation for processing wafers.
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Bonora Anthony C. ; Gould Richard H., Integrated roller transport pod and asynchronous conveyor.
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Whelan Paul L. (Dallas TX), Material handling system and method for manufacturing line.
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Shimoyashiro Sadao (Fujisawa JPX) Iwasaki Takemasa (Yokohama JPX) Kawaji Hiroyuki (Yokohama JPX) Hamada Toyohide (Yokohama JPX) Ikeda Minoru (Yokohama JPX) Kikuchi Hiroshi (Hiratsuka JPX) Nagatomo Hi, Method and apparatus for carrying a variety of products.
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Iwasaki Junji,JPX, Method and apparatus for controlling semiconductor wafer fabrication equipment based on a remaining process time applicable to the processors.
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White John M. ; Blonigan Wendell T. ; Richter Michael W., Method of controlling gas flow in a substrate processing system.
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Yang Pan SG, Semiconductor manufacturing system.
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Wu Hong Jen (Hsin chu TWX) Chen Taylor (Hsin chu TWX) Lai Jack (Hsin chu TWX) Chen I. I. (Hsin chu TWX), Single semiconductor wafer transfer method and manufacturing system.
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Heinrich, Harald; Osterreich, Peter; Recklies, Jorg; Odrich, Falk; Welzk, Andre, Transport system and method for controlling the transport system.
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이 특허를 인용한 특허 (10) 인용/피인용 타임라인 분석

Mariano,Thomas R.; McCabe,Timothy A.; Johnson,Carl, Growth model automated material handling system.
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Chang, Ko-Pin; Shih, Jui-An; Liu, Hui-Tang, Integrated transport system.
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Fukuhara,Keiji; Aoki,Yasutsugu; Kobayashi,Yoshitake; Fujimura,Hisashi, Intermediate product manufacturing apparatus, and intermediate product manufacturing method.
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Tan, Mark, Method and apparatus for damping vibrations in a semiconductor wafer handling arm.
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Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
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Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
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Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
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Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
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Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
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Yamagishi, Takashi; Kato, Kazufumi; Miura, Takuma; Ozawa, Katsutoshi, Transportation state notification system and method, program, and information storage medium.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Wafer management system and methods for managing wafers 원문보기