초록 ▼

A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one upstanding pod door opening casting are self registering and allow frames for wafer fabrication systems of

A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one upstanding pod door opening casting are self registering and allow frames for wafer fabrication systems of any normally desired configuration to be produced out of a small number of cast modules. More specifically, in a preferred embodiment, frames configured to mate with one to four commercially available loaders may be readily assembled out of the aluminum castings.

대표청구항 ▼

1. In a wafer fabrication system, a modular frame comprising:a generally rectangular integrally formed base casting having a predetermined depth and width, said base casting having a front member, a rear member, and left and right side members, said base casting having a top surface generally defini

1. In a wafer fabrication system, a modular frame comprising:a generally rectangular integrally formed base casting having a predetermined depth and width, said base casting having a front member, a rear member, and left and right side members, said base casting having a top surface generally defining a first plane;a generally rectangular integrally formed pod door opening casting having a predetermined width and height, said pod door opening casting including a bottom member, a top member, left and right side members and at least one cross member extending from said left side member to said right side member, said pod door opening casting including at least one opening between said left and right side members, said top member and said bottom member sized to receive a loader, said pod door opening casting generally defining a second plane;said bottom member of said door opening casting being mounted to said front member of said base casting such that said second plane is perpendicular to said first plane;said base casting and said pod door opening casting each have at least one dowel pin receiving opening, said at least one dowel pin receiving opening being in opposed coaxial relation when said pod door opening casting is disposed in a mounting position with respect to said base casting; anda dowel pin having first and second ends, said first and second ends disposed in respective openings of said base casting and said pod door opening casting to align said pod door opening casting with respect to said base casting in said mounting position. 2. The modular frame of claim 1 wherein said integrally formed pod door opening casting further includes a vertical dividing member mid-way between said left and right side members, and said integrally formed pod door opening casting includes first and second openings sized to mate with respective loaders, wherein said first opening is defined by said left side member, maid dividing member, maid top member and said bottom member and said second opening is defined by said right side member, said dividing member, maid top member and said bottom member of said pod door opening casting. 3. The modular frame of claim 1 wherein said base casting and said pod door opening casting comprise aluminum castings. 4. In a wafer fabrication system, a modular frame comprising:a plurality of integrally formed base castings having a front member portion, a rear member portion and left and right side member portions, each one of said plurality of base castings having a respective depth and width;a plurality of integrally formed generally rectangular pod door opening castings corresponding in number to the number of base castings, each pod door opening casting having a bottom member portion, a top member portion and left and right side member portions;a first plurality of fasteners extending through openings in the front member of said base castings and engaging respective pod door opening castings to mount each pod door opening casting to the corresponding base casting in a plane generally perpendicular to the respective base casting;each of said base castings and said pod door opening castings have at least one dowel pin receiving opening, said at least one dowel pin receiving opening being in opposed coaxial relation when said pod door opening castings are disposed in a mounting position with respect to said base castings; anda plurality of dowel pins each having first and second ends, said first and second ends disposed in respective openings of said base castings and said pod door opening castings to align said pod door opening castings with respect to said base castings in said mounting position;at least one second fastener mechanically coupling one side member of one of said plurality of base castings in abutting relation with a side member of another one of said plurality of base castings; andat least one third fastener mechanically coupling a side member portion of one of said plurality of pod door opening castings in abutting relation with a side member portion of another one of said plurality of pod door opening castings. 5. The modular frame of claim 4 wherein said base castings and said pod door opening castings comprise aluminum castings. 6. The modular frame of claim 4 wherein one of said plurality of base castings has a width greater than the width of another one of said plurality of base castings. 7. The modular frame of claim 4 wherein said plurality of base castings includes first and second base castings and said plurality of pod door opening castings includes first and second pod door opening castings. 8. The modular frame of claim 7 wherein said first pod door opening casting includes a single opening sized to mate with a first loader and said second pod door opening casting includes two openings sized to mate with second and third loaders. 9. The modular frame of claim 8 wherein the width of said second pod door opening casting is generally the same as the width of said second base casting. 10. The modular frame of claim 7 wherein said first and second pod door opening castings each have two openings sized to mate with two loaders. 11. The modular frame of claim 10 wherein the width of said second pod door opening casting is generally the same as the width of said second base casting. 12. The modular frame of claim 7 wherein the width of said first and second pod door opening castings are generally the same as the width of the corresponding first and second base castings. 13. The modular frame of claim 1 wherein at least one said cross-members includes registration means for accurately aligning a vertically mounted linear track to the respective pod door opening casting. 14. The modular frame of claim 1 wherein at least one said cross-member includes registration means for accurately aligning a robot to the respective pod door opening casting.