IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0129338
(2001-09-03)
|
우선권정보 |
JP-0268839 (2000-09-05); JP-0187945 (2001-06-21); JP-0234569 (2001-08-02) |
국제출원번호 |
PCT/JP01/07608
(2002-05-03)
|
국제공개번호 |
WO02/21086
(2002-03-14)
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발명자
/ 주소 |
- Ishizuya, Tohru
- Suzuki, Junji
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
12 인용 특허 :
11 |
초록
▼
A thermal displacement element comprises a substrate, and a supported member supported on the substrate. The supported member includes first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and
A thermal displacement element comprises a substrate, and a supported member supported on the substrate. The supported member includes first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat. Each of the first and second displacement portions has at least two layers of different materials having different expansion coefficients and stacked on each other. The first displacement portion is mechanically continuous to the substrate without through the heat separating portion. The radiation absorbing portion and the second displacement portion are mechanically continuous to the substrate through the heat separating portion and the first displacement portion. The second displacement portion is thermally connected to the radiation absorbing portion. A radiation detecting device comprises a thermal displacement element and a displacement reading member fixed to the second displacement portion of the thermal displacement element and used for obtaining a predetermined change corresponding to a displacement in the second displacement portion.
대표청구항
▼
1. A thermal displacement element comprising:a substrate; anda supported member that is supported on said substrate at a portion of the supported member, with another portion of the supported member floating in an air space relative to the substrate,said supported member including first and second d
1. A thermal displacement element comprising:a substrate; anda supported member that is supported on said substrate at a portion of the supported member, with another portion of the supported member floating in an air space relative to the substrate,said supported member including first and second displacement portions which displace respectively depending on heat, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat,wherein each of said first and second displacement portions has at least two films of different, materials having different expansion coefficients and stacked on each other,said first displacement portion is mechanically continuous to said substrate without through said heat separating portion,said second displacement portion is mechanically continuous to said substrate through said heat separating portion and said first displacement portion in this order, andsaid second displacement portion is thermally connected to said radiation absorbing portion. 2. A thermal displacement element according to claim 1, wherein a direction of said first displacement portion from a proximal end toward a distal end of said first displacement portion is substantially opposite to a direction of said second displacement portion from a proximal end toward a distal end of said second displacement portion, andat least said two films of said first displacement portion and at least said two films of said second displacement portion are composed of the same materials and stacked in the same sequence. 3. A thermal displacement element according to claim 2, wherein a length of said first displacement portion from a proximal end toward a distal end of said first displacement portion is substantially equal to a length of said second displacement portion from a proximal end toward a distal end of said second displacement portion. 4. A thermal displacement element according to claim 3, wherein a position of the proximal end of said first displacement portion is substantially the same as a position of the distal end of said second displacement portion as viewed in a widthwise direction of said first and second displacement portions. 5. A thermal displacement element according to claim 2, wherein said at least two films of said first displacement portion and said at least two films of said second displacement portion have a same laminated structure and the respective corresponding films of the first and second displacement portions are ones formed simultaneously. 6. A thermal displacement element according to claim 1, wherein a direction of said first displacement portion from a proximal end toward a distal end of said first displacement portion is substantially the same as a direction of said second displacement portion from a proximal end toward a distal end of said second displacement portion, andat least said two films of said first displacement portion and at least said two films of said second displacement portion are composed of the same materials and stacked in the reversed sequence. 7. A thermal displacement element according to claim 6, wherein a length of said first displacement portion from a proximal end toward a distal end of said first displacement portion is substantially equal to a length of said second displacement portion from a proximal end toward a distal end of said second displacement portion. 8. A thermal displacement element according to claim 1, wherein when said first and second displacement portions are set in an unbent state, a tier on which at least one of said first displacement portion, said second displacement portion, at least a part of said heat separating portion and said radiation absorbing portion is positioned, is different from a tier on which the rest of them are positioned. 9. A thermal displacement element according to claim 1, further comprising a shielding portion for substantially shielding said first displ acement portion from the radiation. 10. A thermal displacement element according to claim 1, wherein said radiation absorbing portion includes a radiation reflection portion having such a characteristic as to reflect some of the incident radiation,and said radiation absorbing portion is disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflects the radiation. 11. A radiation detecting device comprising:a thermal displacement element claimed in claim 1; anda displacement reading member fixed to said second displacement portion and used for obtaining a predetermined change corresponding to a displacement in said second displacement portion. 12. A radiation detecting device according to claim 11, wherein said displacement reading member is a reflection portion reflecting received reading beams. 13. A radiation detecting device according to claim 11, wherein maid displacement reading member is a movable reflection portion and includes a fixed reflection portion fixed to said substrate, andsaid movable reflection portion and said fixed reflection portion substantially configure reflection type diffraction gratings and reflect the received reading beams as diffraction light. 14. A radiation detecting device according to claim 11, wherein said displacement reading member is a half-mirror portion reflecting only some of the received reading beams and including a reflection portion fixed to said substrate in a way that faces to said half-mirror portion. 15. A radiation detecting device according to claim 11, wherein said displacement reading member is a reading beam reflection portion reflecting the received reading beams, and includes a half-mirror portion fixed to, said substrate in a way that faces to said reading beam reflection portion and reflecting only some of the received reading beams. 16. A radiation detecting device according to claim 15, wherein said displacement reading member serves as a radiation reflection portion disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflecting the radiation. 17. A radiation detecting device according to claim 11, wherein said displacement reading member is a movable electrode portion and includes a fixed electrode portion fixed to said substrate in a way that faces to said movable electrode portion. 18. A radiation detecting device according to claim 17, wherein said fixed electrode portion is disposed on the opposite side to said substrate with respect to said movable electrode portion. 19. A radiation detecting device according to claim 18, wherein said movable electrode portion serves as a radiation reflection portion disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflecting the radiation. 20. A thermal displacement element comprising:a substrate; anda supported member supported on said substrate,said supported member including a heat separating portion exhibiting a high thermal resistance, a radiation absorbing portion receiving a radiation and converting it into heat and first and second displacement portions,wherein each of said first and second displacement portions has a plurality of individual displacement portions,each of said plurality of individual displacement portions of said first displacement portion has at least two layers stacked on each other and composed of different materials having different expansion coefficients;each of said plurality of individual displacement portions of said second displacement portion has at least two layers stacked on each other and composed of different materials having different expansion coefficients;said first displacement portion is mechanically continuous to said substrate without through said heat separating portion,said radiation absorbing portion and said second displacement portion are mechanically continuous to said substrate through said heat separating portion and said first displacement portion, andsaid second displacement portion is thermally connected to said radiation absorbing portion. 21. A thermal displacement element according to claim 20, wherein said plurality of individual displacement portions of said first displacement portion are sequentially mechanically connected in a predetermined direction from the proximal end of said first displacement portion toward the distal end of said first displacement portion,said plurality of individual displacement portions of said second displacement portion are sequentially mechanically connected in a predetermined direction from the proximal end of said second displacement portion toward the distal end of said second displacement portion,a direction of said first displacement portion from a proximal end toward a distal end of said first displacement portion is substantially opposite to a direction of said second displacement portion from a proximal end toward a distal end of said second displacement portion, andat least said two layers of each of said plurality of individual displacement portions of said first displacement portion and at least said two layers of each of said plurality of individual displacement portions of said second displacement portion, are composed of the same materials and stacked in the same sequence. 22. A thermal displacement element according to claim 20, wherein there is provided such a structure that at least said two layers of each of said plurality of individual displacement portions of said first displacement portion and at least said two layers of each of said plurality of individual displacement portions of said second displacement portion can be formed simultaneously for every corresponding layer. 23. A thermal displacement element according to claim 20, wherein when said first and second displacement portions are set in an unbent state, a tier on which at least one of said plurality of individual displacement portions of said first displacement portion, said plurality of individual displacement portions of said second displacement portion, at least a part of said heat separating portion and said radiation absorbing portion is positioned, is different from a tier on which the rest of them are positioned. 24. A thermal displacement element according to claim 20, further comprising a shielding portion for substantially shielding said first displacement portion from the radiation. 25. A thermal displacement element according to claim 20, wherein said radiation absorbing portion includes a radiation reflection portion having such a characteristic as to reflect some of the incident radiation,and said radiation absorbing portion is disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflects the radiation. 26. A radiation detecting device comprising:a thermal displacement element claimed in claim 20; anda displacement reading member fixed to said second displacement portion and used for obtaining a predetermined change corresponding to a displacement in said second displacement portion. 27. A radiation detecting device according to claim 26, wherein said displacement reading member is a reflection portion reflecting received reading beams. 28. A radiation detecting device according to claim 26, wherein said displacement reading member is a movable reflection portion and includes a fixed reflection portion fixed to said substrate, ands aid movable reflection portion and said fixed reflection portion substantially configure reflection type diffraction gratings and reflect the received reading beams as diffraction light. 29. A radiation detecting device according to claim 26, wherein said displacement reading member is a half-mirror portion reflecting only some of the received reading beams and including a reflection portion fixed to said substrate in a way that faces to said half-mirror portion. 30. A radiation detecting device according to claim 26, wherein said displacement reading member is a reading beam reflection portion reflecting the received reading beams, and includes a half-mirror portion fixed to said substrate in a way that faces to said reading beam reflection portion and reflecting only some of the received reading beams. 31. A radiation detecting device, according to claim 30, wherein said displacement reading member serves as a radiation reflection portion disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflecting the radiation. 32. A radiation detecting device according to claim 26, wherein said displacement reading member is a movable electrode portion and includes a fixed electrode portion fixed to said substrate in a way that faces to said movable electrode portion. 33. A radiation detecting device according to claim 32, wherein said fixed electrode portion is disposed on the opposite side to said substrate with respect to said movable electrode portion. 34. A radiation detecting device according to claim 33, wherein said movable electrode portion serves as a radiation reflection portion disposed from said radiation absorbing portion at an interval substantially given by nλ 0 /4, where n is an odd-number, and λ 0 is a central wavelength of a desired wavelength band of the radiation, and substantially totally reflecting the radiation.
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