IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
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| 국제특허분류(IPC7판) |
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| 출원번호 |
US-0533893
(2000-03-22)
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발명자
/ 주소 |
- Barron, Richard J.
- Williams, Kirt R.
- Fuller, E. Nelson
- Hunnicutt, Harry A.
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| 출원인 / 주소 |
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| 대리인 / 주소 |
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| 인용정보 |
피인용 횟수 :
33 인용 특허 :
63 |
초록
▼
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in fluid communication with the cavity. The body also has first and second primary ports placed in fluid
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in fluid communication with the cavity. The body also has first and second primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator is operably coupled to the pilot valve for moving the pilot valve. A microvalve is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end and a second end. The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.
대표청구항
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1. A microvalve actuator, comprising a body defining a generally planar first pressure boundary layer, a generally planar second pressure boundary layer, and at least one intermediate layer disposed between said first pressure boundary layer and said second pressure boundary layer, said at least one
1. A microvalve actuator, comprising a body defining a generally planar first pressure boundary layer, a generally planar second pressure boundary layer, and at least one intermediate layer disposed between said first pressure boundary layer and said second pressure boundary layer, said at least one intermediate pressure boundary layer being sealingly fixed to said first pressure boundary layer and to said second pressure boundary layer, said intermediate pressure boundary layer defining stationary pressure boundary walls of a chamber bounded by said first pressure boundary layer, said second pressure boundary layer and said stationary pressure boundary walls of said at least one intermediate pressure boundary layer, said chamber containing an actuating member formed at least in part by said at least one intermediate pressure boundary for positioning a microvalve, said body further defining a pressure-reinforcing member extending between and being fixed to both said first pressure boundary layer and said second pressure boundary layer to resist movement of said first pressure boundary layer relatively away from said second pressure boundary layer if pressure in said chamber rises by reducing the surface areas of said first pressure boundary layer and said second pressure boundary layer that are continuously unsupported, said pressure-reinforcing member thus helping maintain the structural integrity of said body at a variety of pressures in said chamber.2. The microvalve actuator defined in claim 1, wherein said body is comprised of at least three layers including first and second layers defining a portion of a pressure boundary for said chamber, said chamber having a fluid therein which is in fluid communication with a microvalve actuated by said microvalve actuator, said body further comprising a third layer disposed between and bonded to said first and second layers, said third layer defining a peripheral pressure boundary of said chamber between said first and second layers, said pressure-reinforcing member comprising a pressure-reinforcing post, spaced apart from said peripheral pressure boundary and fixing a portion of said first layer to a portion of said second layer.3. The microvalve actuator defined in claim 2 wherein said pressure-reinforcing post is formed from one of said first, second, and third layers.4. The microvalve defined in claim 1 wherein said actuator further comprises:a movable spine; a plurality of pairs of extensible ribs, each of said ribs having a first portion and a second portion, each pair of extensible ribs being fixed between said body and said spine with said ribs of each pair on being disposed opposite sides of the spine, each pair of ribs being longitudinally spaced along said spine, a first portion of one of said ribs and a first portion of a longitudinally adjacent rib defining a first gap therebetween, said first gap having a first gap distance; and an extension body interposed between said second portion of said one of said ribs and said second portion of said longitudinally adjacent rib, said extension body and said second portion of said one of said ribs defining a second gap between said extension body and said second portion of said one of said ribs, said second gap having a second gap distance equal to said first gap distance, said extension body and said second portion of said longitudinally adjacent rib defining a third gap between said extension body and said longitudinally adjacent rib, said third gap having a third gap distance equal to said first gap distance. 5. The microvalve actuator defined in claim 4 wherein each of said first portions of said ribs defines a first width and each of said second portions of said ribs defines a second width less than said first width.6. The microvalve actuator defined in claim 4 wherein said extension body is a generally laterally extending portion of said spine.7. The microvalve actuator defined in claim 4 wherein said extension body is a generally laterally extending portion of said valve body.8. The microvalve actuator defined in claim 4 whereinsaid extension body is a generally laterally extending portion of said spine; each of said ribs further defines a third portion; and said valve body defines a second extension body interposed between said third portion of said one of said ribs and said third portion of said longitudinally adjacent rib, said second extension body being a generally laterally extending portion of said valve body, said second extension body and said third portion of said one of said ribs defining a fourth gap between said second extension body and said third portion of said one of said ribs, said fourth gap having a fourth gap distance equal to said first gap distance, said second extension body and said third portion of said longitudinally adjacent rib defining a fifth gap between said second extension body and said longitudinally adjacent rib, said fifth gap having a fifth gap distance equal to said first gap distance. 9. The microvalve defined in claim 1 wherein said actuator further comprises:a movable spine; a plurality of pairs of extensible ribs, each of said ribs having a first portion and a second portion, each pair of extensible ribs being fixed between said body and said spine with said ribs of each pair on being disposed opposite sides of the spine, each pair of ribs being longitudinally spaced along said spine, a first portion of one of said ribs and a first portion of a longitudinally adjacent rib defining a first gap therebetween, said first gap having a first gap distance; and an extension body interposed between said second portion of said one of said ribs and said second portion of said longitudinally adjacent rib, said extension body and said second portion of said one of said ribs defining a second gap between said extension body and said second portion of said one of said ribs, said second gap having a second gap distance equal to said first gap distance, said extension body and said second portion of said longitudinally adjacent rib defining a third gap between said extension body and said longitudinally adjacent rib, said third gap having a third gap distance equal to said first gap distance. 10. The microvalve actuator defined in claim 1 further comprising a movable spine; anda plurality of pairs of extensible ribs, each pair of said ribs being fixed between said body and said spine with said ribs of each pair being disposed on opposite sides of the spine, each pair of ribs being longitudinally spaced along said spine; wherein the pressure-reinforcing member is interposed between selected first longitudinally spaced ribs. 11. The microvalve actuator defined in claim 10 further comprising a second pressure-reinforcing member, wherein said second pressure-reinforcing member is interposed between selected second longitudinally spaced ribs.12. The microvalve actuator defined in claim 1 wherein the pressure-reinforcing member is disposed in the chamber and adjacent said actuator.13. A microvalve actuator, comprising a body defining stationary walls of a chamber, said body being comprised of at least three layers including first and second layers defining spaced-apart wall portions of a pressure boundary for said chamber, said chamber having a fluid therein which is in fluid communication with a microvalve actuated by a microvalve actuator contained in said chamber, said body further comprising a third layer disposed between and bonded to said first and second layers, said third layer defining a peripheral pressure boundary of said chamber between said first and second layers, said actuating member including a plurality of spaced apart pairs of ribs forming a plurality of chevrons fixed to a common central spine, said third layer defining a fixed body to which a plurality of said ribs are attached, a pressure-reinforcing member comprising a pressure-reinforcing peninsula extending from said fixed body to a region between two spaced-apart ribs of an adjacent pair of said chevrons, said pressure-reinforcing member being bonded to said first and second layers to fix a portion of said first layer to a portion of said second layer, said pressure-reinforcing member reinforcing the connections between the first and second layers by reducing the surface areas of the first and second layers that are continuously unsupported in the immediate vicinity of the ribs.14. A micromechanical actuation device comprising:a first layer, a second layer and a third layer, said third layer defining an actuator cavity and being disposed between said first and second layers; a microvalve actuator disposed in said actuator cavity defined by said third layer; and a pressure reinforcing member disposed in said actuator cavity and fixed to said first and second layers. 15. The micromechanical actuation device defined in claim 14 wherein said microvalve actuator is thermally actuated.
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