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Strained Fin FETs structure and method 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-0310328
  • H01L-02701
출원번호 US-0439886 (2003-05-16)
발명자 / 주소
  • Clark, William F.
  • Fried, David M.
  • Lanzerotti, Louis D.
  • Nowak, Edward J.
출원인 / 주소
  • International Business Machines Corporation
대리인 / 주소
    McGinn &
인용정보 피인용 횟수 : 138  인용 특허 : 1

초록

A method and structure for a transistor that includes an insulator and a silicon structure on the insulator. The silicon structure includes a central portion and Fins extending from ends of the central portion. A first gate is positioned on a first side of the central portion of the silicon structur

대표청구항

1. A fin-type field effect transistor (FinFET) comprising:a fin having source and drain regions and a channel region between said source and drain regions; and a strain-inducing layer on only one side of said channel region of said fin. 2. The FinFET in claim 1, wherein said strain-inducing layer st

이 특허에 인용된 특허 (1)

  1. Bin Yu, Method of forming a double gate transistor having an epitaxial silicon/germanium channel region.

이 특허를 인용한 특허 (138)

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