초록 ▼

A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected toge

A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

대표청구항 ▼

1. A turbo-molecular pump comprising:a main body; a pump case for covering the main body; a first flange integrally formed with the pump case for connection to a second flange integrally formed with a vacuum chamber; a plurality of fastening bolts for fastening the first flange to the second flange;

1. A turbo-molecular pump comprising:a main body; a pump case for covering the main body; a first flange integrally formed with the pump case for connection to a second flange integrally formed with a vacuum chamber; a plurality of fastening bolts for fastening the first flange to the second flange; and clamping means for clamping the first and second flanges together by surrounding a portion of each of the first and second flanges. 2. A turbo-molecular pump according to claim 1; wherein the clamping means comprises an upper retainer for pressing an outer peripheral surface of the second flange in a first direction, a lower retainer for pressing an outer peripheral surface of the first flange in a second direction opposite to the first direction, and a plurality of fastening screws for fastening the upper and lower retainers together.3. A turbo-molecular pump according to claim 2; wherein each of the upper and lower retainers is generally arch-shaped.4. A turbo-molecular pump according to claim 1; wherein the clamping means is connected to the first and second flanges by the fastening bolts.5. A turbo-molecular pump according to claim 1; wherein the clamping means comprises a plurality of split rings and a plurality of split-ring connecting means for connecting the split rings together to form a generally ring-shaped member for clamping the first and second flanges together from outer peripheries thereof.6. A turbo-molecular pump according to claim 1; wherein the clamping means comprises a plurality of upper plates for covering the second flange from above, a plurality of lower plates for covering the first flange from below, and a plurality of plate connectors for connecting the upper and lower plates together so as to sandwich the first and second flanges therebetween.7. A turbo-molecular pump according to claim 6; wherein the upper plates have lower surfaces disposed on an upper surface of the second flange so that the clamping means is suspended from and supported by the second flange.8. A turbo-molecular pump according to claim 7; wherein each of the plate connectors comprises at least one abutment piece abutting against a side surface of the second flange so as to integrally connect the corresponding plate connector to the second flange.9. A turbo-molecular pump according to claim 8; wherein the at least one abutment piece comprises a screw screwed into the corresponding plate connector so as to abut against the side surface of the second flange.10. A turbo-molecular pump according to claim 7; wherein upper surfaces of the lower plates and a lower surface of the first flange are spaced apart at a distance equal to or greater than one thread pitch of one of the fastening bolts.11. A turbo-molecular pump according to claim 7; wherein upper surfaces of the lower plates and end surfaces of the fastening bolts are spaced apart at a distance equal to or greater than one thread pitch of the fastening bolts.12. In combination:a turbo-molecular pump having a first flange; a vacuum chamber having a second flange; connecting means for integrally connecting the first flange to the second flange; and clamping means for clamping the first and second flanges together. 13. A combination according to claim 12; wherein the clamping means comprises a first retainer for pressing an outer peripheral surface of the second flange in a first direction, a second retainer for pressing an outer peripheral surface of the first flange in a second direction opposite to the first direction, and a plurality of fastening members for fastening the first and second retainers together.14. A combination according to claim 12; wherein the clamping means comprises a plurality of split rings and a plurality of connecting members for connecting the split rings together to form a generally ring-shaped member for clamping the first and second flanges together from outer peripheries thereof.15. A combination according to claim 12; wherein the clamping means comprises a plurality of first plates disposed on an upper surface of the second flange, a plurality of second plates disposed on a lower surface of the first flange, and a plurality of connecting members for connecting the first and second plates together so as to sandwich the first and second flanges therebetween.16. A combination according to claim 12; wherein the connecting means comprises a plurality of bolts.17. An apparatus for connecting a turbo-molecular pump to a vacuum chamber, the apparatus comprising:a plurality of first connecting members for connecting a flange of the turbo-molecular pump to a flange of the vacuum chamber; at least one first clamping member configured to engage with a surface of the flange of the turbo-molecular pump; at least one second clamping member configured to engage with a surface of the flange of the vacuum chamber; and a plurality of second connecting members for connecting the first and second clamping members together when the first and second clamping members engage the surfaces of the respective flanges of the turbo-molecular pump and the vacuum chamber to thereby clamp the flanges together. 18. An apparatus according to claim 17; wherein each of the first and second clamping member is generally arch-shaped.19. An apparatus according to claim 17; wherein each of the at least one first clamping member and the at least one second clamping member comprises a plurality of first and second clamping members.20. An apparatus according to claim 17; wherein when connected together by the second connecting members, the first and second clamping members form a clamping structure for clamping the flanges so as to sandwich the flanges therebetween.