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FinFET SRAM cell with chevron FinFET logic 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
  • H01L-021/336
출원번호 US-0605907 (2003-11-05)
발명자 / 주소
  • Anderson, Brent A.
  • Bryant, Andres
  • Nowak, Edward J.
출원인 / 주소
  • International Business Machines Corporation
대리인 / 주소
    Schmeiser, Olsen &
인용정보 피인용 횟수 : 93  인용 특허 : 8

초록

An electronic device, and SRAM and a method of forming the electronic device and SRAM. The semiconductor device including: a pass gate transistor having a fin body having opposing sidewalls aligned in a first direction and having a first majority carrier mobility and a gate adjacent to both sidewall

대표청구항

1. An electronic device comprising:a semiconductor device comprising: a pass gate transistor including a first fin body and a first gate, said first fin body having opposing sidewalls, each sidewall aligned in a first direction having a first majority carrier mobility, said first gate adjacent to bo

이 특허에 인용된 특허 (8)

  1. Krivokapic, Zoran; An, Judy Xilin; Buynoski, Matthew S., FinFET-based SRAM cell.
  2. Chenming Hu ; Tsu-Jae King ; Vivek Subramanian ; Leland Chang ; Xuejue Huang ; Yang-Kyu Choi ; Jakub Tadeusz Kedzierski ; Nick Lindert ; Jeffrey Bokor ; Wen-Chin Lee, Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture.
  3. Bin Yu, Method of forming a double gate transistor having an epitaxial silicon/germanium channel region.
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  7. Inaba, Satoshi; Ohuchi, Kazuya, Semiconductor device having MIS field effect transistors or three-dimensional structure.
  8. Wollesen Donald L., Short channel non-self aligned VMOS field effect transistor.

이 특허를 인용한 특허 (93)

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