초록 ▼

The application discloses methods of plasma treatment that employ an ion sheath in a capacitively-coupled system to increase the hydrophilicity of porous articles, including microporous articles having pore sizes of 0.05 to 1.5 micrometers, both on their surfaces and in their pores such that the art

The application discloses methods of plasma treatment that employ an ion sheath in a capacitively-coupled system to increase the hydrophilicity of porous articles, including microporous articles having pore sizes of 0.05 to 1.5 micrometers, both on their surfaces and in their pores such that the articles' bulk wetting properties are improved.

대표청구항 ▼

1. A method of modifying the hydrophilicity of a porous article, said method comprising:providing a reaction chamber having a capacitively-coupled system comprising at least one grounded electrode and at east one electrode powered by an RF source; generating a plasma in the chamber thereby causing a

1. A method of modifying the hydrophilicity of a porous article, said method comprising:providing a reaction chamber having a capacitively-coupled system comprising at least one grounded electrode and at east one electrode powered by an RF source; generating a plasma in the chamber thereby causing an ion sheath to form around at least one of the electrodes; locating a porous article in the ion sheath wherein the article pores are smaller than the mean free path of any species in the plasma; and treating the article by allowing reactive species from the plasma to react with the article surface and pore interiors whereby thc hydrophilicity of the article is increased such that the bulk wetting properties of the article are improved. 2. The method of claim 1 wherein treatment of the porous article is continuous.3. The method of claim 1 wherein the plasma comprises silicon.4. The method of claim 1 wherein the porous article is within the ion sheath formed around the powered electrode.5. The method of claim 1 wherein a shadow mask is placed between the porous article and the plasma during treatment in order to produce an article having a patterned treated area.6. The method of claim 1 wherein a shadow mask is placed between the porous article and the plasma during treatment in order to produce an article having a hydrophilicity gradient.7. The method of claim 1 wherein the partial pressures of thc species in the plasma are controlled to provide thc desired elemental composition for the resulting article.8. The method of claim 1 wherein the powered electrode is a rotating drum.9. The method of claim 8 further comprising a second rotating drum powered electrode.10. The method of claim 1 wherein the article has two parallel major surfaces and is treated on one major surface.11. The method of claim 10 wherein thc article is also treated on its second major surface.12. The method of claim 1 wherein the treatment comprises attaching to the article surface and pore interiors by covalently bonding two or more species selected from the group consisting of oxygen, nitrogen, silicon, carbon, hydrogen, sulfur, and combinations thereof.13. The method of claim 12 wherein a silicon-containing film is deposited and the article is post-treated with an oxygen plasma.14. The method of claim 13 wherein the silicon-containing film is a diamond-like glass.