초록 ▼

A system for measuring the spatial dimensions of a three-dimensional object employs a lens and at least two detectors. The combination of which defines two or more object planes. The combination of the lens and the detectors define an optical axis that is normal to the object planes and passes throu

A system for measuring the spatial dimensions of a three-dimensional object employs a lens and at least two detectors. The combination of which defines two or more object planes. The combination of the lens and the detectors define an optical axis that is normal to the object planes and passes through a focal point of the lens. At least a first and a second photodetector are optically aligned with the object through the lens. The first and second photodetectors or array of detectors are further parallel with the surface but have differing elevations relative to that surface. In addition, the first and second photodetectors are capable of motion relative to said object. Electrical output from the first and from the second photodetectors is provided to a processor that determines a distance of the object from the lens and thereby a height of the object. This system is particularly suited for measuring the spatial dimensions of solder balls mounted to a surface of a ball grid array (BGA) electronic package.

대표청구항 ▼

1. A system for measuring the spatial dimensions of a three-dimensional object positioned on an object plane, comprising:a light source for emitting wavelengths of light, said light source being positioned so as to direct said wavelengths of light at said object without any intermediate structures t

1. A system for measuring the spatial dimensions of a three-dimensional object positioned on an object plane, comprising:a light source for emitting wavelengths of light, said light source being positioned so as to direct said wavelengths of light at said object without any intermediate structures therebetween and so as to direct said wavelengths of light over an area of said object; a lens positioned to receive reflections of said wavelengths of light from said object, wherein said lens has a high degree of chromatic aberration; an optical axis normal to said object plane and passing through a focal point of said lens; a sensor a plurality of photodetectors, each of said plurality of photodetectors having electrical outputs, said sensor being positioned to receive said reflections of said wavelengths of light after said reflection pass through said lens, said sensor in optical alignment with said object along said optical axis; a diffraction grating disposed between said lens and said sensor for directing each of said wavelengths of light to a different one of said plurality of photodetectors, said diffraction grating in optical alignment with said sensor along said optical axis; a processor for receiving said electrical outputs from each of said plurality of photodetectors, said processor determining a distance of said object from said lens and thereby a height of said object. 2. The system of claim 1 wherein said lens has numerical aperture of at least about 0.1 to achieve a shallow depth of focus.3. The system of claim 1 wherein said lens is telecentric.4. The system of claim 1 wherein said object is capable of motion relative to said sensor.5. The system of claim 4 wherein said motion is orthogonal to said optical axis.6. The system of claim 4 wherein said motion periodically triggers data acquisition of the sensor to build up a three dimensional representation of the object.7. The system of claim 1 wherein said plurality of photodetectors forms a regular rectangular array.8. The system of claim 1 wherein said processor acts as a buffer to an electronic computer, said electronic computer managing one or more of motion control, sensor image acquisition, triggering and image analysis.9. The system of claim 8 wherein said electronic processing buffer converts said electronic signal from said sensor to a gray-scale value that is subsequently converted to a height measurement.10. The system of claim 8 wherein said buffer includes an algorithm to determine z-axis height position of points on the object with respect to said nominal object plane by means of contrast comparison of said plurality of photodetectors.11. The computer system as described in claim 8 that compares the three-dimensional representation of said object for conformance of said object to a stored quality standard.