Substrate bonding apparatus for liquid crystal display device having alignment system with one end provided inside vacuum chamber
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G02F-001/1337
G02F-001/1333
G02F-001/13
출원번호
US-0259439
(2002-09-30)
우선권정보
KR-0015953 (2002-03-25); KR-0014182 (2002-03-15)
발명자
/ 주소
Lee, Sang Seok
Park, Sang Ho
출원인 / 주소
LG.Philips LCD Co., Ltd.
대리인 / 주소
Morgan, Lewis &
인용정보
피인용 횟수 :
2인용 특허 :
36
초록▼
A substrate bonding apparatus for a liquid crystal display device includes a vacuum processing chamber, a lower stage provided in an interior of the vacuum chamber, an upper stage provided in the interior of the vacuum chamber and having at least one first through hole, a stage moving system having
A substrate bonding apparatus for a liquid crystal display device includes a vacuum processing chamber, a lower stage provided in an interior of the vacuum chamber, an upper stage provided in the interior of the vacuum chamber and having at least one first through hole, a stage moving system having a stage moving axis connected to one of the lower and upper stages, and a driving motor, and at least one first alignment system having one end provided in the interior of the vacuum chamber for aligning a first substrate and a second substrate.
대표청구항▼
1. A substrate bonding apparatus for a liquid crystal display device, comprising:a vacuum processing chamber; a lower stage provided in an interior of the vacuum chamber; an upper stage provided in the interior of the vacuum chamber and having at least one first through hole; a stage moving system h
1. A substrate bonding apparatus for a liquid crystal display device, comprising:a vacuum processing chamber; a lower stage provided in an interior of the vacuum chamber; an upper stage provided in the interior of the vacuum chamber and having at least one first through hole; a stage moving system having a stage moving axis connected to one of the lower and upper stages, and a driving motor; and at least one first alignment system having one end provided in the interior of the vacuum chamber for aligning a first substrate and a second substrate. 2. The apparatus according to claim 1, wherein the first and second substrates each include a plurality of alignment marks, and the first alignment system faces each of the alignment marks.3. The apparatus according to claim 2, wherein the first alignment system passes through a top portion of the vacuum processing chamber.4. The apparatus according to claim 1, wherein one end of the first alignment system is provided in the interior of the vacuum processing chamber and is adjacent to a portion of the upper stage.5. The apparatus according to claim 1, wherein the first alignment system includes a first camera receiving portion having a first end provided in the interior of the vacuum processing chamber by passing through the vacuum chamber, and an alignment camera received in the camera receiving portion for checking alignment marks of the first and second substrates.6. The apparatus according to claim 5, wherein a first end of the alignment camera is connected to the stage moving axis of the stage moving system.7. The apparatus according to claim 5, wherein the first alignment camera is received in the first camera receiving portion, and the first end of the first camera receiving portion is aligned with the first through hole of the upper stage.8. The apparatus according to claim 1, further including at least one second alignment system provided at an exterior of the vacuum processing chamber.9. The apparatus according to claim 1, further including at least one second alignment system provided in the interior of the vacuum processing chamber.10. A substrate bonding apparatus of a liquid crystal display device, comprising:a vacuum processing chamber; lower and upper stages provided in lower and upper spaces of the vacuum processing chamber, respectively; a stage moving system having a moving axis connected to one of the lower and upper stages, and a driving motor; at least one first alignment system for aligning a first set of alignment marks positioned on a first substrate and a second substrate; and at least one second alignment system for aligning a second set of alignment marks positioned on the first and second substrates, wherein the first set of alignment marks is different from the second set of alignment marks, and wherein a first end of the first alignment system is provided in the interior of the vacuum processing chamber and aligned with the first set of alignment marks. 11. The apparatus according to claim 10, wherein a first end of the second alignment system is provided in the interior of the vacuum processing chamber and aligned with the second set of alignment marks.12. The apparatus according to claim 10, wherein a first end of the second alignment system is provided on an exterior of the vacuum processing chamber and aligned with the second set of alignment marks.13. The apparatus according to claim 10, wherein the first and second alignment systems focus on each of the first and second sets of alignment marks formed on the first and second substrates so as to check the location of the first and second sets of alignment marks.14. The apparatus according to claim 10, wherein the first and second alignment systems focus on each of the first and second sets of alignment marks formed on the first and second substrates so as to check a midpoint location between the first and second sets of alignment marks.15. The apparatus according to claim 10, wherein the first and second alignment systems read a location value of the first and second sets of alignment marks.16. The apparatus according to claim 10, wherein the first and second alignment systems read a location value of a central point between the first and second substrates.17. The apparatus according to claim 10, wherein the first alignment system checks a location of each of the first and second sets of alignment mark, and the second alignment system reads a location value of a midpoint between the first and second sets of alignment marks.18. A substrate bonding apparatus of a liquid crystal display device, comprising:a vacuum processing chamber; lower and upper stages provided in lower and upper spaces of the vacuum processing chamber, respectively; a stage moving system having a moving axis connected to one of the lower and upper stages, and a driving motor; at least one first alignment system for aligning a first set of alignment marks positioned on a first substrate and a second substrate; and at least one second alignment system for aligning a second set of alignment marks positioned on the first substrate and second substrates, wherein the first set of alignment marks is different from the second set of alignment marks, and wherein the first and second alignment systems focus on each of the first and second sets of alignment marks formed on the first and second substrates so as to check a midpoint location between the first and second sets of alignment marks. 19. The apparatus according to claim 18, wherein first ends of each of the first and second alignment systems are provided on an exterior of the vacuum processing chamber, and are aligned with the first and second sets of alignment marks.20. A substrate bonding apparatus of liquid crystal display device, comprising:a vacuum processing chamber; lower and upper stages provided in lower and upper spaces of the vacuum processing chamber, respectively; a stage moving system having a moving axis connected to one of the lower and upper stages, and a driving motor; at least one first alignment system for aligning a first set of alignment marks positioned on a first substrate and a second substrate; and at least one second alignment system for aligning a second set of alignment marks positioned on the first substrate and second substrate, wherein the first set of alignment marks is different from the second set of alignment marks, and wherein the first and second alignment systems read a location value of a central point between the first and second substrates. 21. The apparatus according to claim 20, wherein first ends of each of the first and second alignment systems are provided on an exterior of the vacuum processing chamber, and are aligned with the first and second sets of alignment marks.22. A substrate bonding apparatus of a liquid crystal display device, comprising:a vacuum processing chamber; lower and upper stages provided in lower and upper spaces of the vacuum processing chamber, respectively; a stage moving system having a moving axis connected to one of the lower and upper stages, and a driving motor; at least one first alignment system for aligning a first set of alignment marks positioned on a first substrate and a second substrates; and at least one second alignment system for aligning a second set of alignment marks positioned on the first substrate and second substrates, wherein the first set of alignment marks is different from the second set of alignment marks, and wherein the first alignment system checks a location of each of the first and second sets of alignment mark, and the second alignment system reads a location value of a midpoint between the first and second sets of alignment marks. 23. The apparatus according to claim 22, wherein first ends of each of the first and second alignment systems are provided on an exterior of the vacuum processing chamber, and are aligned with the first and second sets of alignment marks.
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이 특허에 인용된 특허 (36)
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