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Method for fabricating semiconductor components with conductors having wire bondable metalization layers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0617936 (2003-07-10)
발명자 / 주소
  • Farnworth, Warren M.
출원인 / 주소
  • Micron Technology, Inc.
인용정보 피인용 횟수 : 25  인용 특허 : 22

초록

A semiconductor component includes a semiconductor die, a low k polymer layer on the die and redistribution conductors on the polymer layer. The component also includes bonding pads on the conductors with a metal stack construction that includes a conductive layer, a barrier/adhesion layer and a non

대표청구항

1. A method for fabricating a semiconductor component comprising:providing a semiconductor die comprising a die contact and at least one integrated circuit in electrical communication with the die contact; forming a polymer layer on the die; forming a redistribution conductor on the polymer layer in

이 특허에 인용된 특허 (22)

  1. Bhansali Ameet S. (Fremont CA) Samuelson Gay M. (Tempe AZ) Murali Venkatesan (San Jose CA) Gasparek Michael J. (Tempe AZ) Chen Shou H. (Mesa AZ) Mencinger Nicholas P. (Tempe AZ) Lee Ching C. (Penang , Bonding pad structure having an interposed rigid layer.
  2. David R. Hembree ; Jorge L. de Varona, Bumped semiconductor component having test pads, and method and system for testing bumped semiconductor components.
  3. Trask Philip A. (Laguna Hills CA) Pillai Vincent A. (Irvine CA) Gierhart Thomas J. (Fountain Valley CA), Electrical interconnection substrate with both wire bond and solder contacts, and fabrication method.
  4. Charles W. Eichelberger ; James E. Kohl ; Michael E. Rickley, Electroless metal connection structures and methods.
  5. Sharangpani Rahul ; Tay Sing-Pin, High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques.
  6. Brown Vernon L. ; Magera Yaroslaw A., Metallization and termination process for an integrated circuit chip.
  7. Farnworth, Warren M.; Wood, Alan G.; Hembree, David R., Method for fabricating semiconductor components and interconnects with contacts on opposing sides.
  8. Warren M. Farnworth ; Ford Grigg, Method for fabricating solder bumps by wave soldering.
  9. Matsuki Hirohisa,JPX ; Kado Kenichi,JPX ; Watanabe Eiji,JPX ; Imamura Kazuyuki,JPX ; Yurino Takahiro,JPX, Method for manufacturing semiconductor device with pad structure.
  10. Chan Seung Hwang KR; Seung Ouk Jung KR, Method for manufacturing semiconductor devices having redistribution patterns with a concave pattern in a bump pad area.
  11. Carlos J. Sambucetti ; Daniel C. Edelstein ; John G. Gaudiello ; Judith M. Rubino ; George Walker, Method for preparing a conductive pad for electrical connection and conductive pad formed.
  12. Hembree, David R.; de Varona, Jorge L., Method for testing bumped semiconductor components.
  13. Akram Salman, Microbump interconnect for semiconductor dice.
  14. Iwaya Akihiko,JPX ; Wada Tamaki,JPX ; Masuda Masachika,JPX ; Tsubosaki Kunihiro,JPX ; Nishimura Asao,JPX, Resin-molded semiconductor device having a lead on chip structure.
  15. Patrick W. Tandy, Selectively coating bond pads.
  16. Fumihiko Taniguchi JP; Kouhei Orikawa JP; Tadashi Uno JP; Fumihiko Ando JP; Akira Takashima JP; Hiroshi Onodera JP; Eiji Yoshida JP; Kazuo Teshirogi JP, Semiconductor device having protruding electrodes higher than a sealed portion.
  17. Aiba, Yoshitaka; Sato, Mitsutaka, Semiconductor device manufacturing method having a step of applying a copper foil on a substrate as a part of a wiring connecting an electrode pad to a mounting terminal.
  18. Watanabe Eiji,JPX ; Matsuki Hirohisa,JPX ; Kado Kenichi,JPX ; Nagashige Kenichi,JPX ; Onodera Masanori,JPX ; Kodama Kunio,JPX ; Yoda Hiroyuki,JPX ; Fujimori Joji,JPX ; Nakada Minoru,JPX ; Makino Yuta, Semiconductor device with flip chip bonding pads and manufacture thereof.
  19. Warren M. Farnworth ; Alan G. Wood ; Mike Brooks, Stackable semiconductor package having conductive layer and insulating layers and method of fabrication.
  20. Warren M. Farnworth ; Alan G. Wood ; Mike Brooks, Stackable semiconductor package having conductive layer and insulating layers and method of fabrication.
  21. Goodman Dale E. ; Hoffmeyer Mark K. ; Krabbenhoft Roger S., Universal surface finish for DCA, SMT and pad on pad interconnections.
  22. Kung Ling-Chen,TWX ; Chu Tsung-Yao,TWX, Wafer level packaging method and devices formed.

이 특허를 인용한 특허 (25)

  1. Morris, Thomas Scott; Madsen, Ulrik Riis; Sawyer, Brian D.; Shah, Milind; Siomkos, John Robert; Crandall, Mark Alan; Carey, Dan, Compartmentalized shielding of selected components.
  2. Hiner, David J.; Warren, Jr., Waite R.; Leahy, Donald Joseph; Jandzinski, David; Morris, Thomas Scott; Halchin, David; Shah, Milind; Held, Mark Charles; Calhoun, Brian Howard; Sawyer, Brian D.; Madsen, Ulrik Riis, Conformal shielding employing segment buildup.
  3. Hiner, David J.; Warren, Jr., Waite R.; Jandzinski, David, Conformal shielding process using flush structures.
  4. Leahy, Donald Joseph; Warren, Jr., Waite R.; Parker, Stephen, Conformal shielding process using process gases.
  5. Leahy, Donald Joseph; Warren, Jr., Waite R.; Parker, Stephen, Conformal shielding process using process gases.
  6. Morris, Thomas Scott; Madsen, Ulrik Riis; Leahy, Donald Joseph, Connection using conductive vias.
  7. Morris, Thomas Scott; Madsen, Ulrik Riis; Leahy, Donald Joseph, Connection using conductive vias.
  8. Morris, Thomas Scott; Madsen, Ulrik Riis; Leahy, Donald Joseph, Connection using conductive vias.
  9. Dang, Thong; Haji-Rahim, Mohsen; Bullis, Joseph Byron, Electronic modules having grounded electromagnetic shields.
  10. Leahy, Donald Joseph; Sawyer, Brian D.; Parker, Stephen; Morris, Thomas Scott, Electronic modules having grounded electromagnetic shields.
  11. Madsen, Ulrik Riis; Ubbesen, Lars Sandahl, Field barrier structures within a conformal shield.
  12. Rao, Jayanti Jaganatha; Morris, Thomas Scott; Shah, Milind, Heat sink formed with conformal shield.
  13. Swan, Geoff; Warren, Jr., Waite R., Integrated shield for a no-lead semiconductor device package.
  14. Swan, Geoff; Warren, Jr., Waite R., Integrated shield for a no-lead semiconductor device package.
  15. Hiner, David J.; Warren, Jr., Waite R., Isolated conformal shielding.
  16. Johnson, Chris; Johnson, David; Pays-Volard, David; Martinez, Linnell; Westerman, Russell; Grivna, Gordon M., Method and apparatus for plasma dicing a semi-conductor wafer.
  17. Carey, Dan; Walker, Jeffrey Scott; Messner, Gary D., Method for forming an electronic module having backside seal.
  18. Morris,Thomas Scott; Shah,Milind; Leahy,Donald Joseph; Law, II,Lewis Kermit, Method of making a conformal electromagnetic interference shield.
  19. Carey, Dan; Walker, Jeffrey Scott; Messner, Gary D., Method of manufacturing a module.
  20. Leahy, Donald Joseph; Sawyer, Brian D.; Parker, Stephen; Morris, Thomas Scott, Method of manufacturing an electronic module.
  21. Carey, Dan; Calhoun, Brian Howard, Methods of forming a microshield on standard QFN package.
  22. Carey, Dan; Calhoun, Brian Howard, Methods of forming a microshield on standard QFN package.
  23. Carey, Dan; Walker, Jeffrey Scott; Messner, Gary D., Process for manufacturing a module.
  24. Farnworth,Warren M., Semiconductor component having conductors with wire bondable metalization layers.
  25. Shah, Milind; Leahy, Donald Joseph; Morris, T. Scott, Sub-module conformal electromagnetic interference shield.
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