IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0257621
(2001-04-17)
|
우선권정보 |
JP-0119326 (2000-04-20) |
국제출원번호 |
PCT/JP01/03277
(2002-10-16)
|
§371/§102 date |
20021016
(20021016)
|
국제공개번호 |
WO01/82341
(2001-11-01)
|
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
5 |
초록
▼
A thermal processing system for heating a to-be-processed object while rotating the to-be-processed object by a placement part, and for performing thermal processing on the to-be-processed object by supplying a predetermined gas into a processing chamber. An outer ring part provided outside the proc
A thermal processing system for heating a to-be-processed object while rotating the to-be-processed object by a placement part, and for performing thermal processing on the to-be-processed object by supplying a predetermined gas into a processing chamber. An outer ring part provided outside the processing chamber and an inner ring part provided inside the processing chamber have pluralities of circumferentially arranged magnetic poles. The magnetic poles apply magnetic forces between the outer ring part and inner ring part so that the inner ring part will follow the rotation of the outer ring part. The number of magnetic poles of the outer ring part and inner ring part are selected to achieve an allowable angular error when between the outer ring part and inner ring part during rotation.
대표청구항
▼
1. A thermal processing system heating a to-be-processed object while rotating the to-be-processed object by a placement part, and supplying a predetermined gas into a processing chamber and performing thermal processing on the to-be-processed object therein, said system comprising:an outer ring par
1. A thermal processing system heating a to-be-processed object while rotating the to-be-processed object by a placement part, and supplying a predetermined gas into a processing chamber and performing thermal processing on the to-be-processed object therein, said system comprising:an outer ring part provided outside of said processing chamber, and having a plurality of magnetic poles arranged circumferentially; an inner ring part provided inside of said processing chamber, having a plurality of magnetic poles arranged circumferentially for applying magnetic forces between the magnetic poles of said outer ring part and those of said inner ring part so that said inner ring part follows said outer ring part and rotates therewith; a bearing part provided between said inner ring part and processing chamber; and said placement part rotating together with said inner ring part in said processing chamber, wherein the number of the magnetic poles of said outer ring part and inner ring part is determined such that a torque transmitted to said inner ring part from said outer ring part is larger than a friction torque applied to said inner ring part by said bearing part when said outer ring part is rotated, for an angular difference between said inner ring part and said outer ring part corresponding to a required allowable angular error of the to-be-processed object. 2. A thermal processing system comprising:a thermal processing part having a to-be-processed object placed in a predetermined orientation on a placement part in a processing chamber, heating the to be-processed object while rotating the to-be-processed object by said placement part, and performing thermal processing on the to-be-processed object with supplying a predetermined gas into said processing chamber; a conveying room connected with said processing chamber of said processing part through a gate valve in an airtight manner; and another thermal processing part including a processing chamber and connected with said conveying room via a gate valve in an airtight manner, wherein one of said thermal processing parts performs thermal processing on the to-be-processed object, the to-be-processed object is then conveyed into the other thermal processing part, and said other processing part then performs thermal processing on the to-be-processed object, wherein said one of said thermal processing parts comprises: an outer ring part provided outside of said processing chamber, and having a plurality of magnetic poles arranged circumferentially; an inner ring part provided inside of said processing chamber, having a plurality of magnetic poles arranged circumferentially for applying magnetic forces between the magnetic poles of said outer ring part and those of said inner ring part so that said inner ring part follows said outer ring part and rotates therewith; a bearing part provided between said inner ring part and processing chamber; and said placement part rotating together with said inner ring part in said processing chamber, wherein the number of the magnetic poles of said outer ring part and inner ring part is determined such that a torque transmitted to said inner ring part from said outer ring part is larger than a friction torque applied to said inner ring part by said bearing part when said outer ring part is rotated, for an angular difference between said inner ring part and said outer ring part corresponding to a required allowable error in orientation of the to-be-processed object. 3. The system as claimed in claim 2, wherein orientation of the to-be-processed object is determined as a result of the to-be-processed object being fitted into an orienting part of a placement part of said other thermal processing part.4. The system as claimed in claim 1, wherein said bearing part comprises a plurality of rolling members made of ceramic and a self-lubricative holder holding said plurality of rolling members.5. The system as claimed in claim 2, wherein said bearing part comprises a plurality of rolling members made of ceramic and a self-lubricative holder holding said plurality of rolling members.6. The system as claimed in claim 1, wherein the number of the magnetic poles of said inner ring part and outer ring part is determined such that it is larger than another number of the magnetic poles in which case the torque curve of the torque with respect to the angular difference has the maximum torque value, and also, the inclination of the torque curve for the determined number of magnetic poles at an increasing part thereof is larger than that in the case of said other number of the magnetic poles.7. The system as claimed in claim 2, wherein the number of the magnetic poles of said inner ring part and outer ring part is determined such that it is larger than another number of the magnetic poles in which case the torque curve of the torque with respect to the angular difference has the maximum torque value, and also, the inclination of the torque curve for the determined number of magnetic poles at an increasing part thereof is larger than that in the case of said other number of the magnetic poles.8. The system as claimed in claim 1, wherein said required allowable error is 0.3 degrees.9. The system as claimed in claim 2, wherein said required allowable error is 0.3 degrees.10. The system as claimed in claim 1, wherein the magnetic poles of one of said outer ring part and inner ring part are made of neodymium magnets, and the magneitic poles of the other thereof are made of martensitic stainless steel.11. The system as claimed in claim 2, wherein the magnetic poles of one of said outer ring part and inner ring part are made of neodymium magnets, and the magneitic poles of the other thereof are made of martensitic stainless steel.12. The system as claimed in claim 1, wherein the to-be-processed object is heated through radiant heat.13. The system as claimed in claim 2, wherein the to-be-processed object is heated through radiant heat.14. A thermal processing method comprising the steps of:a) heating a to-be-processed object while rotating the to-be-processed object by a placement part; and b) performing thermal processing on the to-be-processed object with supplying a predetermined gas into a processing chamber, wherein said method is performed by means of: an outer ring part provided outside of said processing chamber, and having a plurality of magnetic poles arranged circumferentially; an inner ring part provided inside of said processing chamber, having a plurality of magnetic poles arranged circumferentially for applying magnetic forces between the magnetic poles of said outer ring part and those of said inner ring part so as to follow said outer ring part and rotate therewith; a bearing part provided between said inner ring part and processing chamber; and said placement part rotating together with said inner ring part in said processing chamber, wherein the number of the magnetic poles of said outer ring part and inner ring part is determined such that a torque transmitted to said inner ring part from said outer ring part is larger than a friction torque applied to said inner ring part by said bearing part when said outer ring part is rotated, for an angular difference between said inner ring part and said outer ring part corresponding to a required allowable error in orientation of the to-be-processed object. 15. A method of calculating the number of magnetic poles in the thermal processing system claimed in any one of the claims 1 through 13,wherein the number of the magnetic poles of the outer ring part and inner ring part is determined such that a torque transmitted to the inner ring part from the outer ring part is larger than a friction torque applied to the inner ring part by the bearing part when the outer ring part is rotated, for an angular difference between the inner ring part and the outer ring part corresponding to a required allowable angular error of the to-be-processed object. 16. The method as claimed in claim 15, wherein the determination of the number of magnetic poles is performed by utilizing torque curves provided for particular numbers of magnetic poles.
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