[특허]Integrated circuit inductor with a magnetic core

[미국특허] Integrated circuit inductor with a magnetic core 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01F-005/00
출원번호	US-0996653 (2004-11-23)
§371/§102 date	20020619 (20020619)
발명자 / 주소	Ahn, Kie Y. Forbes, Leonard
출원인 / 주소	Micron Technology, Inc.
대리인 / 주소	Knobbe Martens Olson &
인용정보	피인용 횟수 : 15 인용 특허 : 22

초록 ▼

An inductor is fabricated on a substrate having a top surface and a bottom surface. The inductor includes a plurality of holes extending through the substrate, wherein the plurality of holes interconnect the top surface and the bottom surface of the substrate. The inductor also includes a plurality of conductive posts formed in the plurality of holes and a plurality of conductive segments formed on the top surface and on the bottom surface that interconnect the conductive posts such that a continuous conductive coil is formed. The inductor also includes a magnetic core that occupies substantially the entire volume enclosed by the conductive coil.

대표청구항 ▼

1. A computer system comprising:a processor; an inductor comprising: a substrate; a magnetic core formed within the substrate; a plurality of vias filled with a metallic material providing a plurality of metallic posts through the substrate; and a plurality of conductive segments interconnecting the plurality of conductive posts to form a conductive coil surrounding the magnetic core. 2. The system of claim 1, wherein the plurality of vias comprises extend entirely through the substrate.3. The system of claim 1, wherein the plurality of vias comprises two substantially parallel rows of vias extending through the substrate.4. The system of claim 1, wherein the substrate comprises a semiconductor wafer.5. The system of claim 1, wherein the substrate comprises silicon.6. The system of claim 1, wherein the substrate comprises silicon carbide.7. The system of claim 1, wherein the substrate comprises germanium.8. The system of claim 1, wherein the magnetic core comprises a magnetic oxide.9. The system of claim 1, wherein forming the magnetic core comprises depositing ferromagnetic material by chemical vapor deposition.10. The system of claim 1, wherein the magnetic core comprises a porous region in the substrate.11. The system of claim 10, wherein the porous region is filled with a ferromagnetic material.12. The system of claim 1, wherein the conductive coil comprises copper.13. The system of claim 1, wherein the conductive coil comprises aluminum.14. The system of claim 1, wherein the substrate has at least two substantially parallel surfaces, and wherein the conductive posts are substantially perpendicular to the parallel surfaces.15. The system of claim 1, wherein the metallic posts have circular cross-sections.16. The system of claim 1, wherein the metallic posts are at least partially surrounded by an insulating material.17. The system of claim 16, wherein the insulating material comprises polyimide.18. The system of claim 1, wherein the inductor has an inductance of at least 1 nanohenry.19. The system of claim 1, further comprising a passivation layer covering the conductive coil.20. The system of claim 19, wherein the passivation layer is configured to electrically insulate the inductor and to protect the inductor from physical damage.21. The system of claim 1, wherein the inductor is part of a memory circuit in the computer system.22. A computer memory device comprising:a memory array on a substrate; an inductor comprising: a magnetic core formed within the substrate; a plurality of vias filled with a metallic material providing a plurality of metallic posts through the substrate; and a plurality of conductive segments interconnecting the plurality of conductive posts to form a conductive coil surrounding the magnetic core. 23. The memory device of claim 22, wherein the substrate comprises a semiconductor wafer.24. The memory device of claim 22, wherein the substrate comprises silicon.25. The memory device of claim 22, wherein the conductive segments comprise a second metallic material.26. The memory device of claim 22, wherein the magnetic core comprises a porous region of the substrate treated with a ferromagnetic material.

이 특허에 인용된 특허 (22) 인용/피인용 타임라인 분석

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A62	인명구조; 소방(사다리 E06C)
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[미국특허] Integrated circuit inductor with a magnetic core 원문보기

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