초록 ▼

A means to accurately measure the pressure distribution across a rigid or semi-rigid surface, or between two rigid or semi-rigid surfaces with high special resolution is disclosed. The present invention relates to measuring a pressure distribution. The present invention would be ideal for use in var

A means to accurately measure the pressure distribution across a rigid or semi-rigid surface, or between two rigid or semi-rigid surfaces with high special resolution is disclosed. The present invention relates to measuring a pressure distribution. The present invention would be ideal for use in various types of manufacturing tooling and various in situ industrial machine controls. The present invention uses an array of commercial micro-machined silicon pressure sensing die attached to a substrate and encapsulated in an elastomer.

대표청구항 ▼

1. An apparatus for sensing the pressure produced by rigid or semi-rigid surface comprising:a substrate; one or more pressure sensors having a first surface secured to the substrate and a second surface including a sensing element; and at least one planar elastomeric layer having a third surface cov

1. An apparatus for sensing the pressure produced by rigid or semi-rigid surface comprising:a substrate; one or more pressure sensors having a first surface secured to the substrate and a second surface including a sensing element; and at least one planar elastomeric layer having a third surface covering the second surface of the pressure sensor and a fourth surface for receiving a force resulting from said rigid or semi-rigid surface and transferring the force from the fourth surface of the elastomeric layer to the sensing element of the pressure sensor. 2. The apparatus of claim 1 wherein the one or more pressure sensors are a plurality of pressure sensors secured to the substrate each being covered by the planar elastometric layer, wherein the elastomenc layer covering the pressure sensors forms a flat upper surface to receive a force from said rigid or semi-rigid surface and transfer the force from the flat upper surface of the elastomeric layer to the plurality of pressure sensors.3. The apparatus of claim 2 further comprising a rigid barrier surrounding at least one of the pressure sensors.4. The apparatus of claim 1 wherein the substrate is rigid.5. The apparatus of claim 1 wherein the substrate is an elastomer.6. The apparatus of claim 1 wherein the substrate is a printed circuit board.7. The apparatus of claim 1 wherein the substrate is vented or pourous and the pressure sensor is a gauge type pressure sensor.8. The apparatus of claim 1 wherein the pressure sensor includes a Wheatstone Bridge.9. A apparatus of claim 1 wherein the pressure sensor is a silicon micro-machined die embedded in the elastomer.10. The apparatus of claim 1 further comprising a low friction layer covering the elastomeric layer, wherein said rigid or semi-rigid surface comes into contact with the low friction layer and a force is transferred through the low friction layer and the elastomeric layer to the sensing element of the pressure sensor.11. A method of manufacturing an apparatus for sensing the pressure produced by a rigid or semi-rigid surface comprising:securing a first portion of one or more pressure sensors to a substrate, each pressure sensor including an upper surface having a sensing element; and covering the upper surface of each pressure sensor with an elastomeric layer so that a force applied to the elastomeric layer by said rigid or semi-rigid surface is transferred through the elastomeric layer to the sensing element of each pressure sensor. 12. The method of claim 11 further comprising calibrating the apparatus for thickness variations in the elastomeric layer.13. The method of claim 11 further comprising sensing the temperature of the substrate or pressure sensor and calibrating the apparatus for temperature variations.14. A method of measuring the pressure exerted by a rigid or semi-rigid surface comprising:transferring a force exerted by said rigid or semi-rigid surface through a planar elastomeric layer to a sensing element on an upper surface of one or more pressure sensors that are covered by the planar elastomeric layer; and producing an electric signal corresponding to the force transferred to the sensing element. 15. The method of claim 14 wherein the electric signal is calibrated to compensate for variations in temperature or variations in thickness of the planar elastomeric layer.16. The method of claim 14 further comprising processing one or more electric signals with one or more amplifiers, and sampling the electric signals with one or more analog-to-digital converters.17. The method of claim 14 further comprising organizing the one or more pressure sensors in an array segment, wherein forces exerted by said rigid or semi-rigid surface are measured by moving the array segment across said rigid or semi-rigid surface.18. An apparatus for sensing the pressure produced by a rigid or semi-rigid surface comprising:a pressure sensor having a bottom surface and top surface, the top surface including a sensing element; means for supporting the pressure sensor secured to the bottom surface; and means for receiving said rigid or semi-rigid surface and transferring a force to the sensing element of the pleasure sensor while an applied force resulting from the rigid or semi-rigid surface is spread out over an area at least as large as the top surface of the pressure sensor. 19. The apparatus of claim 18 wherein the pressure sensor is a silicon micro-machined die.20. The apparatus of claim 18 wherein the pressure sensor includes a Wheatstone Bridge.