IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
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| 국제특허분류(IPC7판) |
|
| 출원번호 |
US-0328083
(2002-12-23)
|
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발명자
/ 주소 |
- Grube, Gary W.
- Mathieu, Gaetan L.
- Madsen, Alec
|
| 출원인 / 주소 |
|
| 인용정보 |
피인용 횟수 :
50 인용 특허 :
40 |
초록
▼
An elongate, columnar micro-mechanical structure disposed along a central longitudinal axis; the structure is made up of laminated structural layers, each comprised of a structural material. The layers define a substantially rigid base portion at a proximal end of the structure, a resilient intermed
An elongate, columnar micro-mechanical structure disposed along a central longitudinal axis; the structure is made up of laminated structural layers, each comprised of a structural material. The layers define a substantially rigid base portion at a proximal end of the structure, a resilient intermediate portion extending from the base portion along the central axis, and a contact tip extending from the resilient portion at a distal end of the structure. The resilient portion of the contact structure is comprised of resilient arms defined in the layers. Opposite ends of the resilient arms may be angularly offset with respect to one another around the central axis. Accordingly, when the contact structure is compressed in an axial direction, the contact tip will rotate around the central axis, while the base remains fixed, providing beneficial wiping action to the contact tip.
대표청구항
▼
1. An elongate, columnar micro-mechanical structure disposed along a central longitudinal axis, the structure comprising:a plurality of laminated structural layers, each of the layers comprised of a structural material; a substantially rigid base portion at a proximal end of the structure; a resilie
1. An elongate, columnar micro-mechanical structure disposed along a central longitudinal axis, the structure comprising:a plurality of laminated structural layers, each of the layers comprised of a structural material; a substantially rigid base portion at a proximal end of the structure; a resilient intermediate portion extending from the base portion along the central axis, the resilient portion comprised of a plurality of arms defined in at least two of the plurality of layers; and a contact tip extending from the resilient portion at a distal end of the structure; wherein the base is comprised of at least a central layer and outer layers of the plurality of layers; and wherein the arms are defined in the outer layers. 2. The structure of claim 1, wherein each of the plurality of arms has a first end attached to the base portion and a second end attached to the contact tip.3. The structure of claim 2, wherein the second end of each of the plurality of arms is displaced around the central axis with respect to its corresponding first end, whereby the contact tip rotates around the central axis with respect to the base portion, when the structure is compressed in the direction of its central axis.4. The structure of claim 2, wherein the second end of each of the plurality of arms is aligned with its corresponding first end with respect to the central axis, whereby the contact tip does not rotate around the central axis with respect to the base portion, when the structure is compressed in the direction of its central axis.5. The structure of claim 2, wherein each of the plurality of arms is defined in an outer layer of the plurality of layers, having the first end and the second end in the one layer.6. The structure of claim 2, wherein each of the plurality of arms is defined in one layer of the outer layers, having the first end and the second end in the one layer.7. The structure of claim 2, wherein each of the plurality of arms is defined in opposite outer layers of the plurality of layers, each arm having the first end in one layer of the outer layers, and the second end in an opposite layer of the outer layers.8. The structure of claim 7, wherein each of the plurality of arms further comprises a portion of a central layer connecting the one layer of the outer layers to the opposite layer of the outer layers.9. The structure of claim 7, wherein each of the plurality of arms further comprises a spliced portion connecting the one layer of the outer layers to the opposite layer of the outer layers.10. The structure of claim 1, wherein the plurality of arms defines a double helix shape.11. The structure of claim 1, wherein each of the plurality of layers is formed by depositing a structural material over a patterned sacrificial layer, and removing the sacrificial layer.12. The structure of claim 1, wherein the plurality of arms in the resilient portion have a serpentine shape.13. The structure of claim 1, wherein outer layers of the plurality of layers are connected to each other at a point in the resilient portion intermediate between the base portion and the contact tip.14. The structure of claim 1, wherein the contact tip comprises an essentially rigid laminate of the plurality of layers.15. The structure of claim 1, wherein each of the plurality of layers comprises a material selected from nickel, cobalt, and alloys thereof.16. The structure of claim 1, further comprising a coating of electrically conductive material generally covering the structure.
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