초록 ▼

This invention is to guarantee that in separating a plate member such as a bonded substrate stack, a fluid is injected to an appropriate portion of the plate member. While a bonded substrate stack (50) is rotated, the vertical position of its peripheral portion is measured throughout its perimeter b

This invention is to guarantee that in separating a plate member such as a bonded substrate stack, a fluid is injected to an appropriate portion of the plate member. While a bonded substrate stack (50) is rotated, the vertical position of its peripheral portion is measured throughout its perimeter by a measuring device (150). Then, while the vertical position of a nozzle (120) is dynamically adjusted on the basis of the measurement result, and at the same time, the bonded substrate stack (50) is rotated, the bonded substrate stack (50) is separated into two substrates at a porous layer by injecting a fluid ejected from the nozzle (120).

대표청구항 ▼

1. A separating apparatus for separating a plate member at a separation layer of the plate member, comprising:a holding portion that holds a plate member; an ejecting portion that ejects a fluid so as to separate the plate member held by said holding portion; a measuring device arranged to measure a

1. A separating apparatus for separating a plate member at a separation layer of the plate member, comprising:a holding portion that holds a plate member; an ejecting portion that ejects a fluid so as to separate the plate member held by said holding portion; a measuring device arranged to measure a position of a peripheral portion of the plate member held by said holding portion; and a driving portion arranged to dynamically drive at least one of said holding portion and said ejecting portion on the basis of a measurement result obtained by said measuring device so that a fluid ejected from said ejecting portion is injected into a concave portion on a peripheral side of the plate member held by said holding portion during separation of the plate member. 2. The apparatus according to claim 1, wherein said driving portion dynamically drives at least one of said holding portion and said ejecting portion on the basis of the measurement result obtained by said measuring device so that the fluid ejected from said ejecting portion is injected into a bonding interface of the plate member, which is located at the concave portion on the peripheral side, or into the separation layer through the concave portion.3. The apparatus according to claim 1, wherein said measuring device measures a position, of the peripheral portion of the plate member held by said holding portion, in a direction perpendicular to the separation layer.4. The apparatus according to claim 3, wherein said driving portion has a mechanism that dynamically drives at least one of said holding portion and said ejecting portion in the direction perpendicular to the separation layer on the basis of the measurement result obtained by said measuring device during separation of the plate member held by said holding portion.5. The apparatus according to claim 1, wherein said driving portion has a mechanism that dynamically changes a direction of said ejecting portion on the basis of the measurement result obtained by said measuring device during separation of the plate member held by said holding portion.6. The apparatus according to claim 1, whereinthe apparatus further comprises a rotating mechanism that rotates said holding portion which holds the plate member so as to rotate the plate member about an axis perpendicular to the separation layer, and the fluid is injected into the plate member throughout a perimeter of the plate member by rotating the plate member while ejecting the fluid from said ejecting portion during separation of the plate member. 7. The apparatus according to claim 6, wherein said measuring device measures the position of the peripheral portion of the plate member rotated by said rotating mechanism throughout the perimeter of the plate member.8. The apparatus according to claim 1, wherein after the plate member is held by said holding portion and before separation of the plate member is started, said measuring device measures the position of the peripheral portion of the plate member held by said holding portion.9. The apparatus according to claim 1, wherein measurement of the position of the peripheral portion of the plate member by said measuring device and separation of the plate member are performed simultaneously, and said driving portion dynamically drives at least one of said holding portion and said ejecting portion on the basis of measurement results sequentially supplied from said measuring device during separation of the plate member.10. The apparatus according to claim 1, wherein the plate member has a disk shape.11. The apparatus according to claim 1, wherein said holding portion horizontally holds the plate member.12. The apparatus according to claim 1, wherein the separation layer is a layer formed by anodization or ion implantation.