Micro silicon fuel cell, method of fabrication and self-powered semiconductor device integrating a micro fuel cell
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/76
H01M-004/86
출원번호
US-0147353
(2002-05-16)
우선권정보
EP-0830314 (2001-05-17)
발명자
/ 주소
D'Arrigo, Giuseppe
Coffa, Salvatore
Spinella, Rosario Corrado
출원인 / 주소
STMicroelectronics S.r.l.
대리인 / 주소
Allen, Dyer, Doppelt, Milbrath &
인용정보
피인용 횟수 :
1인용 특허 :
9
초록▼
A fuel cell for an electrical load circuit includes a first monocrystalline silicon substrate and a positive half-cell formed therein, and a second monocrystalline silicon substrate and a positive half-cell formed therein. Each half-cell includes a microporous catalytic electrode permeable to a gas
A fuel cell for an electrical load circuit includes a first monocrystalline silicon substrate and a positive half-cell formed therein, and a second monocrystalline silicon substrate and a positive half-cell formed therein. Each half-cell includes a microporous catalytic electrode permeable to a gas and connectable to the electrical load circuit. A cell area is defined on a surface of each respective monocrystalline silicon substrate, and includes a plurality of parallel trenches formed therein for receiving the gas to be fed to the respective microporous catalytic electrode. A cation exchange membrane separates the two microporous catalytic electrodes. Each half-cell includes a passageway for feeding the respective gas to the corresponding microporous catalytic electrode.
대표청구항▼
1. A fuel cell comprising:a first monocrystalline doped silicon substrate having a positive half-cell formed in a cell area defined on a surface thereof, said positive half-cell comprising parallel microporous strips of a positive catalytic electrode material, permeable to a fuel gas, connectable to
1. A fuel cell comprising:a first monocrystalline doped silicon substrate having a positive half-cell formed in a cell area defined on a surface thereof, said positive half-cell comprising parallel microporous strips of a positive catalytic electrode material, permeable to a fuel gas, connectable to an electrical load circuit of the fuel cell, and a plurality of parallel trenches formed under said parallel microporous strips of a positive catalytic electrode material for the passage of the fuel gas fed thereto;a second monocrystalline doped silicon substrate having a negative half-cell formed in a cell area defined on a surface thereof, said negative half-cell comprising parallel microporous strips of a negative catalytic electrode material, permeable to an oxygen containing gas, connectable to the electrical load circuit of the fuel cell, and a plurality of parallel trenches formed under said microporous strips of a negative catalytic electrode material for the passage of the oxygen containing gas fed thereto;a cation exchange membrane interposed over the defined cell areas between said positive and negative half-cells for hydraulically separating them and contacting said parallel microporous strips of positive and negative catalytic electrode material;means for supplying the fuel gas to said parallel microporous strips of a positive catalytic electrode material;means for supplying the oxygen containing gas to said parallel microporous strips of a negative catalytic electrode material and for exhausting the products of the electrode reaction; andeach of said parallel microporous positive and negative strips of catalytic electrode material being respectively alternated with parallel current distributing strips and current collecting strips of solid metal, the parallel microporous positive and negative catalytic electrode material being deposited in a heterogeneous columnar crystalline skeleton residue in the trenches and at least partly filling them to define a microporous geometrically complementary structure of the supporting heterogeneous columnar crystalline skeleton residue.2. A fuel cell according to claim 1, wherein said respective supporting heterogeneous columnar crystalline skeleton residue in the trenches is at least partly etched away leaving said parallel microporous strips of a positive and negative catalytic electrode material overhanging their respective trenches and being mechanically and electrically connected to adjacent parallel current distributing and current collecting strips of solid material.3. A fuel cell according to claim 2, wherein said strips of solid metal are in electrical contact with the respective monocrystalline silicon substrate along separation peaks of adjacent parallel trenches.4. A fuel cell according to claim 2, wherein said strips of solid metal comprises at least one of gold, platinum, iridium, rhodium and alloys of at least one thereof.5. A fuel cell according to claim 2, wherein said plurality of porous metal strips comprises at least one of platinum, palladium, iridium, rhodium, ruthenium and alloys thereof.6. A fuel cell according to claim 1, wherein said porous heterogeneous columnar crystalline skeleton residue comprises at least one of a p+ and n+ doping.7. A fuel cell comprising:a first monocrystalline substrate comprising a positive half-cell formed in a cell area defined on a surface thereof, said positive half-cell comprising parallel microporous strips of a positive electrode material, and a plurality of parallel trenches formed under said parallel microporous strips of a positive electrode material for the passage of a first gas fed thereto;a second monocrystalline substrate comprising a negative half-cell formed in a cell area defined on a surface thereof, said negative half-cell comprising parallel microporous strips of a negative electrode material, and a a plurality of parallel trenches formed under said microporous strips of a negative electrode material for the passage of a second gas fed thereto;an exchange membrane interposed over the defined cell areas between said positive and negative half-cells for hydraulically separating them and contacting said parallel microporous strips of positive and negative electrode material;a first passageway for feeding the first gas to said parallel microporous strips of a positive electrode material;a second passageway for feeding the second gas to said parallel microporous strips of a negative electrode material and for exhausting products of a reaction between said positive and negative electrode materials; andeach of said parallel microporous positive and negative strips of electrode material being respectively alternated with parallel current distributing strips and current collecting strips of solid metal, the parallel positive and negative electrode material being deposited in a heterogeneous columnar crystalline skeleton residue in the trenches and at least partly filling them to define a microporous geometrically complementary structure of the supporting heterogeneous columnar crystalline skeleton residue.8. A fuel cell according to claim 7, wherein said positive electrode material comprises a microporous catalytic electrode that is permeable to the first gas; and wherein said negative electrode material comprises a microporous catalytic electrode that is permeable to the second gas and to the products of the reaction between said positive and negative electrode material.9. A fuel cell according to claim 7, wherein the first gas comprises a fuel gas; and wherein the second gas comprises oxygen.10. A fuel cell according to claim 7, wherein said exchange membrane comprises a cation exchange membrane.11. A fuel cell according to claim 7, wherein each electrode material comprises a plurality of coplanar and parallel porous metal strips, each porous metal strip being formed above a trench in said cell area and being electrically connected to at least one adjacent solid metal strip.12. A fuel cell according to claim 11, wherein said strips of solid metal are formed alternately between said porous metal strips for electrically connecting the plurality of porous metal strips to a respective monocrystalline silicon substrate.13. A fuel cell according to claim 11, wherein said strips of solid metal comprises at least one of gold, platinum, iridium, rhodium and alloys of at least one thereof.14. A fuel cell according to claim 11, wherein said plurality of porous metal strips of solid metal comprises at least one of platinum, palladium, iridium, rhodium, ruthenium and alloys thereof.15. A fuel cell according to claim 7, wherein said porous heterogeneous columnar crystalline skeleton residue comprises at least one of a p+ and n+ doping.16. An integrated semiconductor device comprising:a first substrate comprising:an electrical load circuit formed on said first substrate, anda positive half-cell formed in a cell area defined on a surface of said first substrate and comprising parallel microporous strips of a positive electrode material connected to said electrical load circuit, and a plurality of trenches formed said parallel microporous strips of a positive electrode material for the passage of a first gas fed thereto;a second substrate comprising a negative half-cell formed in a cell area defined on a surface of and comprising parallel microporous strips of a negative electrode material connected to said electrical load circuit, and a a plurality of trenches formed trenches formed under said microporous strips of a negative electrode material for the passage of a second gas fed thereto;an exchange membrane interposed over the defined cell areas between said positive and negative half-cells for hydraulically separating them and contacting said parallel microporous strips of positive and negative electrode material;a first reservoir for providing the first gas to said microporous strips of a positive electrode material;a second reservoir for providing the second gas to said microporous strips of a negative electrode material and for removing products of a reaction between said first and second electrode materials; andeach of said microporous positive and negative strips of electrode material being respectively alternated with current distributing strips and current collecting strips of solid metal, the positive and negative electrode material being deposited in a heterogeneous columnar crystalline skeleton residue in the trenches and at least partly filling them to define a microporous geometrically complementary structure of the supporting heterogeneous columnar crystalline skeleton residue.17. An integrated semiconductor device according to claim 16, wherein said first and second substrates each comprises monocrystalline silicon.18. An integrated semiconductor device according to claim 17, further comprising a fuel gas reservoir connected to said first reservoir for providing the first gas.19. An integrated semiconductor device according to claim 18, wherein said fuel gas reservoir comprises a bottle containing the first gas, the first gas comprising pressurized hydrogen.20. An integrated semiconductor device according to claim 16, wherein said positive electrode comprises a microporous catalytic electrode that is permeable to the first gas; and wherein said negative electrode comprises a microporous catalytic electrode that is permeable to the second gas and to the products of the reaction between said first and second electrodes.21. An integrated semiconductor device according to claim 16, wherein the first gas comprises a fuel gas; and wherein the second gas comprises oxygen.22. An integrated semiconductor device according to claim 16, wherein the plurality of trenches are parallel trenches.23. An integrated semiconductor device according to claim 16, wherein said exchange membrane comprises a cation exchange membrane.24. An integrated semiconductor device according to claim 16, wherein said strips of solid metal comprises at least one of gold, platinum, iridium, rhodium and alloys of at least one thereof.25. An integrated semiconductor device according to claim 16, wherein said plurality of porous metal strips comprises at least one of platinum, palladium iridium, rhodium, ruthenium and alloys thereof.26. An integrated semiconductor device according to claim 16, wherein said porous heterogeneous columnar crystalline skeleton residue comprises at least one of a p+ and n+ doping.27. An integrated semiconductor device according to claim 16, further comprising a gas reservoir connected to said second reservoir for providing the second gas.28. An integrated semiconductor device according to claim 27, wherein said gas reservoir comprises a bottle containing the second gas, the second gas comprising pressurized methanol and water.
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