초록 ▼

The positive and negative ion beam merging system extracts positive and negative ions of the same species and of the same energy from two separate ion sources. The positive and negative ions from both sources pass through a bending magnetic field region between the pole faces of an electromagnet. Si

The positive and negative ion beam merging system extracts positive and negative ions of the same species and of the same energy from two separate ion sources. The positive and negative ions from both sources pass through a bending magnetic field region between the pole faces of an electromagnet. Since the positive and negative ions come from mirror image positions on opposite sides of a beam axis, and the positive and negative ions are identical, the trajectories will be symmetrical and the positive and negative ion beams will merge into a single neutral beam as they leave the pole face of the electromagnet. The ion sources are preferably multicusp plasma ion sources. The ion sources may include a multi-aperture extraction system for increasing ion current from the sources.

대표청구항 ▼

1. Apparatus for producing a neutral beam, comprising:a positive ion source for producing positive ions;a negative ion source for producing negative ions of the same species as the positive ions;said positive ion source having an extraction system means for producing a positive ion beam and said neg

1. Apparatus for producing a neutral beam, comprising:a positive ion source for producing positive ions;a negative ion source for producing negative ions of the same species as the positive ions;said positive ion source having an extraction system means for producing a positive ion beam and said negative ion source having an extraction system means for producing a negative ion beam having substantially the same energy and speed as the positive ion beam, and said positive ion source with extraction system means disposed with respect to said negative ion source with extraction system means for producing nonparallel positive and negative ion beams;a bending magnet disposed to provide a magnetic field region into which the nonparallel beams of positive and negative ions pass;wherein the positive and negative ion sources with extraction system means are symmetrically positioned with respect to the bending magnet so that the positive and negative ion beams merge together to form a neutral beam.2. The apparatus of claim 1 wherein the bending magnet comprises an electromagnet having a pair of pole faces, with the bending magnetic field region formed between the pole faces.3. The apparatus of claim 1 wherein the ion sources are multicusp plasma ion sources.4. The apparatus of claim 3 wherein the ion sources have multi-aperture extraction systems for increasing ion current from the ion sources.5. The apparatus of claim 4 wherein the multi-aperture extraction system comprises a pair of spaced curved electrodes having a plurality of aligned apertures therein for extracting multiple beamlets.6. The apparatus of claim 5 wherein the apertures are holes or slits.7. The apparatus of claim 5 further comprising a third spaced electrode having a central aperture therein, wherein the beamlets merge together to form a single beam which passes through the third electrode.8. The apparatus of claim 1 wherein the ion sources are sources of D+ and D? ions or T+ and T? ions for fusion applications.9. The apparatus of claim 1 wherein the ion sources are sources of B+ and B? ions or P+ and P? ions or BF+ and BF? ions or BF2+ and BF2? ions for ion implantation applications.