초록 ▼

Management of move requests from a factory system to an automated handling system (AMHS) is provided. In one embodiment, a method and system is provided which includes receiving a move request from the factory system and selectively passing the move request to the AMHS based on a comparison of the m

Management of move requests from a factory system to an automated handling system (AMHS) is provided. In one embodiment, a method and system is provided which includes receiving a move request from the factory system and selectively passing the move request to the AMHS based on a comparison of the move request with one or more conditions of the AMHS. The move request may be selectively passed to the AMHS by, for example, passing the move request to the AMHS without modification, changing a destination tool identified in the move request and/or delaying the move request, or canceling the move request. By selectively passing the move request based on conditions of the AMHS, move requests can more efficiently be managed and the throughput of the automated material handling system can be increased.

대표청구항 ▼

We claim: 1. A method of managing move requests from a factory system to an automated material handling system (AMHS), comprising: selectively passing a move request to the AMHS in response to a comparison of the move request with one or more conditions of the AMHS, said one or more conditions incl

We claim: 1. A method of managing move requests from a factory system to an automated material handling system (AMHS), comprising: selectively passing a move request to the AMHS in response to a comparison of the move request with one or more conditions of the AMHS, said one or more conditions including that the designated target does not have an excessive number of previously received move requests that are backlogged for the designated target the excessive number defined by a threshold limit for the designated target. 2. The method of claim 1, wherein selectively passing a move request includes passing the move request to the AMHS without modification. 3. The method of claim 1, wherein selectively passing the move request includes modifying the move request and passing the modified move request to the AMHS. 4. The method of claim 3, wherein the move request includes a destination tool and modifying the move request includes changing the destination tool identified in the move request. 5. The method of claim 4, further including storing an original move request and sending, after a period of time, the original move request to the AMHS for moving a lot identified in the original move request to the destination tool in the original move request. 6. The method of claim 3, wherein modifying the move request includes delaying the move request for a period of time and passing the modified move request includes passing the move request to the AMHS after the period of time. 7. The method of claim 1, wherein selectively passing the move request includes canceling the move request without passing the move request to the AMHS. 8. The method of claim 1, wherein the move request identifies a source tool and wherein selectively passing the move request includes storing the move request in a queue for the identified source tool. 9. The method of claim 8, wherein storing the move request in the queue includes comparing a number of move requests in an active queue for the source tool against a threshold limit and storing the move request in the active queue only if the number of move requests in the active queue is equal to or less than the threshold limit. 10. The method of claim 9, wherein storing the move request in the queue includes storing the move request in a pending queue if the number of move requests in the active queue exceed the threshold limit. 11. The method of claim 10, wherein selectively passing the move request includes moving the move request from the pending queue to the active queue for the source tool when the number of move requests in the active queue falls below the threshold limit. 12. The method of claim 1, wherein selectively passing the move request includes storing the move request in a pending queue and the method further includes reordering move requests within the pending queue in response to a change in a priority of a wafer lot identified by the move request. 13. The method of claim 1, further including associating a broker system with selected tools and bypassing the comparison with a move request to a selected tool. 14. The method of claim 1, wherein the comparison includes a comparison of a tool identified in the move request against one or more conditions of the tool. 15. A manufacturing system for managing move requests in a factory, comprising: an automated material handling system (AMHS) for moving material around the factory; a factory system for generating move requests for moving material; and a broker system coupled to the factory system and the AMHS for selectively passing a move request to the AMHS in response to a comparison of the move request with one or more conditions of the AMHS, said one or more conditions of the AMHS including that the designated target does not have an excessive number of previously received move requests that are backlogged for the designated target, the excessive number defined by a threshold limit for the designated target. 16. The system of claim 15, wherein the broker system selectively passes the move request by passing the move request to the AMHS without modification. 17. The system of claim 15, wherein the broker system selectively passes the move request by modifying the move request and passing the modified move request to the AMHS. 18. The system of claim 17, wherein the move request includes a destination tool and the broker system modifies the move request by changing the destination tool identified in the move request. 19. The system of claim 18, wherein the broker system stores an original move request and sends, after a period of time, the original move request to the AMHS for moving a lot identified in the original move request to the destination tool in the original move request. 20. The system of claim 19, wherein the broker system modifies the move request by delaying the move request for a period of time and passing the modified move request includes passing the move request to the AMHS after the period of time. 21. The system of claim 15, wherein the broker system selectively passes the move request by canceling the move request without passing the move request to the AMHS. 22. The system of claim 15, wherein the move request includes a destination tool and wherein the broker system selectively passes the move request by storing the move request in a queue for the destination tool in the move request. 23. The system of claim 22, wherein the broker system compares a number of move requests in an active queue for the destination tool against a threshold limit and stores the move request in the active queue only if the number of move requests in the active queue is equal to or less than the threshold limit. 24. The system of claim 22, wherein the broker system stores the move request in a pending queue if a number of move requests in the active queue exceed the threshold limit. 25. The system of claim 22, wherein the broker system moves the move request from the pending queue to the active queue for the tool when a number of move requests in the active queue falls below the threshold limit. 26. The system of claim 15, wherein the broker system includes a pending queue and selectively passing the move request includes storing the move request in a pending queue, wherein the broker reorders move requests within the pending queue in response to a change in a priority of a wafer lot identified by the move request. 27. The system of claim 15, wherein the move request includes a source tool and wherein the AMHS includes a plurality of tools including one or more particular tools not associated with the broker system, wherein if the source tool is one of the particular tools the move request bypasses the broker system. 28. The system of claim 15, wherein the comparison includes a comparison of a tool identified in the move request against one or more conditions of the tool. 29. A manufacturing system for managing move requests in a factory, comprising: means for moving material around the factory; means for generating move requests for moving material; and means, coupled to the moving means and the generating means, for selectively passing a move request to the moving means in response to a comparison of the move request with one or more conditions of the moving means, said one or more conditions including that the designated target does not have an excessive number of previously received move requests that are backlogged for the designated target, the excessive number defined by a threshold limit for the designated target. 30. The system of claim 29, wherein the move request includes a destination tool and wherein the passing means selectively passes the move request by storing the move request in a queue for the destination tool in the move request. 31. The system of claim 30, wherein the passing means compares a number of move requests in an active queue for the destination tool against a threshold limit and stores the move request in the active queue only if a number of move requests in the active queue is equal to or less than the threshold limit. 32. The system of claim 30, wherein the passing means stores the move request in a pending queue if a number of move requests in the active queue exceeds the threshold limit. 33. The system of claim 30, wherein the passing means moves the move request from the pending queue to the active queue for the tool when a number of move requests in the active queue falls below the threshold limit.