Pressure energized pressure vessel opening and closing device and method of providing therefor
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-016/00
C23F-001/00
B65D-053/00
출원번호
US-0353192
(2003-01-27)
발명자
/ 주소
Sheydayi,Alexei
출원인 / 주소
Tokyo Electron Limited
대리인 / 주소
Haverstock &
인용정보
피인용 횟수 :
2인용 특허 :
187
초록▼
A closure assembly coupled to a vessel including a chamber and an access port in communication with the chamber, the closure assembly comprising: a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access
A closure assembly coupled to a vessel including a chamber and an access port in communication with the chamber, the closure assembly comprising: a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access port at a first location thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location. An actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber to maintain the door assembly in the closed position. The actuator moves between a non-actuated and actuated position within an actuator bore, the actuator in the actuated position when a desired amount of pressure is applied to the actuator bore.
대표청구항▼
What is claimed is: 1. A closure assembly coupled to a vessel including a chamber and an access port for receiving a wafer, the access port in communication with the chamber, the closure assembly comprising: a. a door assembly coupled to the vessel and configured to move between an open position an
What is claimed is: 1. A closure assembly coupled to a vessel including a chamber and an access port for receiving a wafer, the access port in communication with the chamber, the closure assembly comprising: a. a door assembly coupled to the vessel and configured to move between an open position and a closed position, wherein the door assembly further comprises a lever element coupled to the vessel, the lever element rotatable about a fulcrum point between the open position and the closed position, the door assembly in contact with the access port at a first location, thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location; and b. an actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber and thereby maintaining the door assembly in the closed position. 2. The closure assembly according to claim 1 wherein the door assembly is configured to rotate about a fulcrum point when in the closed position, the counteracting force is substantially equivalent to the force applied to the door assembly. 3. The closure assembly according to claim 1 wherein the actuator is configured to allow the door assembly to move from the closed position to the open position in response to a desired amount of pressure released from the chamber. 4. The closure assembly according to claim 3 wherein the vessel further comprises a pressure conduit coupled to the actuator, wherein the pressure conduit channels the pressure to the chamber and the actuator. 5. The closure assembly according to claim 4 further comprising a regulator valve positioned within the pressure conduit, wherein the regulator valve collects the desired amount of pressure within the pressure conduit to actuate the actuator before allowing the pressure to enter the chamber. 6. The closure assembly according to claim 1 wherein the door assembly further comprises: a. a door member for covering the access port in the first location; and b. an extendable member coupled to the door member, wherein the extendable member drives the door member between the open and closed positions. 7. The closure assembly according to claim 6 wherein the door assembly further comprises a sealing element coupled to the door member and configured to provide a seal between the door member and the access port. 8. The closure assembly according to claim 6 further comprising an arm member for locking the door member into the closed position. 9. The closure assembly according to claim 6 further comprising a guiding element having a first feature facing the outer surface of the vessel, the guiding element coupled to the vessel. 10. The closure assembly according to claim 9 wherein the door member includes a second feature configured to correspond with the first feature of the guiding element, wherein the first feature and the second feature form a fulcrum point when mated in communication with one another and the door member is covering the access port. 11. A pressure energized closure device coupled to a vessel having a chamber configured to be pressurized within, the vessel having an access port to receive a wafer, the access port configured on an outer surface of the vessel and in communication with the chamber, the closure device comprising: a. a door assembly configured to move between a first position and a second position, the door assembly configurable to form an airtight condition within the chamber in the second position; b. a pressure conduit within the vessel and coupled to the chamber, the pressure conduit configured to pressurize the chamber; c. an actuator in moveable contact with the door assembly and coupled to the pressure conduit, the actuator configured to maintain the door assembly in the second position in response to pressure within the pressure conduit; and, d. a lever element coupled to the vessel, the lever element rotatably about a fulcrum point between the first position and the second position. 12. The pressure energized closure device according to claim 11 wherein the actuator is configured to allow the door member to move from the second position to the first position in response to a desired amount of pressure being released from the pressure conduit. 13. The pressure energized closure device according to claim 12 wherein the vessel further comprises a pressure port coupled to the pressure conduit, wherein the pressure port provides pressure to the pressure conduit. 14. The pressure energized closure device according to claim 13 further comprising a regulator valve positioned within the pressure conduit, wherein the regulator valve collects the desired amount of pressure within the pressure conduit to actuate the actuator before allowing the pressure to enter the chamber. 15. The pressure energized closure device according to claim 11 wherein the door assembly further comprises: a. a door member for covering the access port; and b. an extendable member coupled to the door member, wherein the extendable member drives the door member between the open and closed positions. 16. The pressure energized closure device according to claim 15 wherein the door assembly further comprises a sealing element coupled to the door member, the sealing element positionable between the door member and the outer surface of the vessel. 17. The pressure energized closure device according to claim 15 further comprising an arm member for locking the door member in the closed position. 18. The pressure energized closure device according to claim 15 further comprising a guiding element coupled to the vessel, the guiding element having a first feature facing the outer surface of the vessel. 19. The pressure energized closure device according to claim 18 wherein the door member includes a second feature configured correspond with the first feature of the guiding element, wherein the first feature and the second feature form a fulcrum point when mated in communication with one another and the door member is covering the access port. 20. A closure assembly coupled to a vessel including a chamber and an access port for receiving a wafer, the access port in communication with the chamber, the closure assembly comprising: a. a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access port at a first location, thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location; and b. an actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber and thereby maintaining the door assembly in the closed position, wherein the actuator is configured within an actuator bore, the actuator bore configured within the vessel and coupled with the chamber, the actuator configured to move between a non-actuated position and an actuated position within the actuator bore, the actuator in the actuated position when a desired amount of pressure is applied to the actuator bore. 21. The closure assembly according to claim 20, wherein the actuator is configured to allow the door assembly to move from the closed position to the open position in response to a desired amount of pressure released from the chamber. 22. The closure assembly according to claim 21, wherein the vessel further comprises a pressure conduit coupled to the actuator, wherein the pressure conduit channels the pressure to the chamber and the actuator. 23. The closure assembly according to claim 22, further comprising a regulator valve positioned within the pressure conduit, wherein the regulator valve collects the desired amount of pressure within the pressure conduit to actuate the actuator before allowing the pressure to enter the chamber. 24. The closure assembly according to claim 20, wherein the door assembly further comprises: a. a door member for covering the access port in the first location; and b. an extendable member coupled to the door member, wherein the extendable member drives the door member between the open and closed positions.
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