초록 ▼

A flow control valve apparatus using a flow control valve manufactured via micro-machining is provided. The flow control valve has a substrate defining at least one orifice through which a fluid can flow, a support member formed on a first surface of the substrate, at least one flap corresponding to

A flow control valve apparatus using a flow control valve manufactured via micro-machining is provided. The flow control valve has a substrate defining at least one orifice through which a fluid can flow, a support member formed on a first surface of the substrate, at least one flap corresponding to the at least one orifice, a pair of elastic flexures connecting the support member to the at least one flap, and a driving means for displacing the at least one flap between the first and second positions to control fluid flow through the at least one orifice. The support member is formed adjacent to the at least one orifice and the at least one flap extends from the support member to fittingly engage the at least one orifice in a first and second position. Also, the pair of elastic flexures provides an elastic restorative force proportional to a displacement of the at least one flap between the first and second positions.

대표청구항 ▼

What is claimed is: 1. A flow control valve comprising: a substrate defining at least one orifice through which a fluid can flow; a support member formed on a first surface of the substrate, wherein the support member is formed adjacent to the at least one orifice; at least one flap corresponding

What is claimed is: 1. A flow control valve comprising: a substrate defining at least one orifice through which a fluid can flow; a support member formed on a first surface of the substrate, wherein the support member is formed adjacent to the at least one orifice; at least one flap corresponding to the at least one orifice, wherein the at least one flap extends from the support member to fittingly engage the at least one orifice in a first and second position; a pair of elastic flexures connecting the support member to the at least one flap, wherein the pair of elastic flexures provides an elastic restorative force proportional to a displacement of the at least one flap between the first and second positions; and a driving means for displacing the at least one flap between the first and second positions to control fluid flow through the at least one orifice. 2. The flow control valve of claim 1, wherein when the flap is displaced in the first position, the fluid flow through the at least one orifice is minimized. 3. The flow control valve of claim 2, wherein when the flap is displaced in the second position, the fluid flow through the at least one orifice is maximized. 4. The flow control valve of claim 1, wherein the driving means comprises: a pair of electrode pads formed a distance apart on a first surface of the support member; a coil having first and second ends electrically connected to the pair of electrode pads, respectively, wherein the coil is formed on a first surface of the flap; at least one permanent magnet disposed above the flap; and at least one permanent magnet disposed below the flap. 5. The flow control valve of claim 4, wherein the electrode pads and the coil comprise a conductive material. 6. The flow control valve of claim 4, further comprising a pair of connecting members, wherein each connecting member is formed on each elastic flexure to connect the pair of electrode pads to the coil. 7. The flow control valve of claim 1, wherein the flow control valve is manufactured by a batch process using a micro-machining technology. 8. The flow control valve of claim 1, wherein at least one of the substrate, the support member, the elastic flexure, and the flap are comprised of silicon. 9. The flow control valve of claim 1, further comprising an oxide layer formed between the substrate and the support member. 10. The flow control valve of claim 1, wherein the orifice is circular in shape. 11. The flow control valve of claim 1, wherein the flap is circular in shape. 12. The flow control valve of claim 1, wherein the elastic flexure is formed in a zigzag shape. 13. The flow control valve of claim 1, wherein the elastic flexure comprises a cantilever. 14. The flow control valve of claim 1, wherein the elastic flexure comprises a torsion beam. 15. The flow control valve of claim 1, further comprising a plurality of orifices and a corresponding plurality of flaps, wherein the plurality of orifices have approximately equivalent areas and the fluid flow through each orifice is controlled by displacing each of the plurality of flaps individually. 16. The flow control valve of claim 15, wherein a maximal displacement is associated with each of the plurality of flaps and the maximal displacement of each of the plurality of flaps differs from the other flaps. 17. The flow control valve of claim 1, further comprising a plurality of orifices and a corresponding plurality of flaps, wherein a circumference of each of the plurality of orifices differs from the other orifices and the fluid flow is controlled by displacing each of the plurality of flaps individually. 18. The flow control valve of claim 1, wherein the fluid flow rate is controlled by a method comprising pulse width modulation (PWM). 19. A flow control valve apparatus comprising: an upper housing comprising an inlet flow channel; a lower housing comprising a outlet flow channel, wherein the lower housing is coupled to the upper housing to form a space therein; a flow control valve mounted within the space defined by the upper and lower housings and comprising at least one flap which is displaced by an electromagnetic force to control a fluid flow exiting through the outlet flow channel; and a pair of permanent magnets, wherein each permanent magnet comprises at least one orifice and is disposed above and under the flow control valve, respectively. 20. The flow control valve apparatus of claim 19, wherein the flow control valve apparatus is manufactured by a batch process using a micro-machining technology. 21. The flow control valve apparatus of claim 19, wherein the flow control valve further comprises: a substrate defining at least one orifice through which a fluid flows; a support member formed on a first surface of the substrate, wherein the support member is formed adjacent to the at least one orifice and the at least one flap extends from the support member to open and close the at least one orifice; a pair of elastic flexures connecting the support member to the at least one flap, wherein the pair of elastic flexures provides an elastic restorative force proportional to a displacement of the at least one flap; a pair of electrode pads formed a distance apart on a first surface of the support member; and a coil having first and second ends electrically connected to the pair of electrode pads, respectively, wherein the coil is formed on a first surface of the flap. 22. The flow control valve apparatus of claim 21, wherein the flow control valve further comprises a pair of connecting members, wherein each connecting member is formed on each elastic flexure to connect the pair of electrode pads to the coil. 23. The flow control valve apparatus of claim 19, wherein a pressure difference is generated between the inlet flow channel and the outlet flow channel.