초록 ▼

In a temperature controlling apparatus for controlling temperature by using a temperature sensor, a defect state of the temperature sensor is sensed by sensing a change of specific resistance of the temperature sensor. A temperature value of the temperature sensor is detected at each unit time durin

In a temperature controlling apparatus for controlling temperature by using a temperature sensor, a defect state of the temperature sensor is sensed by sensing a change of specific resistance of the temperature sensor. A temperature value of the temperature sensor is detected at each unit time during exchanging of a chemical solution or stopping of a process in a chamber of the semiconductor fabricating process. A lowest temperature among the detected temperature values and a reference temperature predetermined to sense the change of the specific resistance of the temperature sensor, are compared with each other. When the lowest temperature deviates from the reference temperature, a defect of the temperature sensor is confirmed and a message indicative of a defect state and an alarm are generated.

대표청구항 ▼

What is claimed is: 1. A method of sensing a defect of a temperature sensor adapted to measure a temperature of a chemical solution, comprising: detecting a temperature value of the temperature sensor at each unit time over a time period during exchanging of the chemical solution or stopping of a p

What is claimed is: 1. A method of sensing a defect of a temperature sensor adapted to measure a temperature of a chemical solution, comprising: detecting a temperature value of the temperature sensor at each unit time over a time period during exchanging of the chemical solution or stopping of a process in a chamber during a semiconductor fabricating process using the chemical solution; comparing a lowest temperature value among the detected temperature values with a reference temperature to sense a change of a specific resistance of the temperature sensor; and determining that the temperature sensor is defective when the lowest temperature value deviates from the reference temperature. 2. The method of claim 1, further comprising providing a message indicative of a defect state when the temperature sensor is determined to be defective. 3. The method of claim 1, further comprising providing an alarm indicative of a defect state when the temperature sensor is determined to be defective. 4. An apparatus for sensing a defect of a temperature sensor in a temperature controlling apparatus, the temperature sensor sensing a temperature of a chemical solution stored in a chemical bath, the apparatus comprising: a temperature controller that outputs a control signal which represents a temperature value detected from the temperature sensor, stores a determination reference temperature which corresponds to a specific resistance value of the temperature sensor, compares the temperature value detected from the temperature sensor with the determination reference temperature corresponding to the specific resistance value at each unit time over a time period during exchanging of the chemical solution or stopping of a fabrication process using the chemical solution, discriminates a defect of the temperature sensor based on the comparison, and outputs a defect state representation control signal and an alarm control signal. 5. An apparatus for sensing a defect of a temperature sensor in a temperature controlling apparatus, the temperature sensor sensing a temperature of a chemical solution stored in a chemical bath, the apparatus comprising: a temperature controller that outputs a control signal which represents a temperature value detected from the temperature sensor, stores a determination reference temperature which corresponds to a specific resistance value of the temperature sensor, compares the temperature value detected from the temperature sensor with the determination reference temperature corresponding to the specific resistance value at each unit time over a time period during exchanging of the chemical solution or stopping of a fabrication process using the chemical solution, discriminates a defect state of the temperature sensor based on the comparison, and outputs a defect state representation control signal and an alarm control signal; and a display that displays a temperature of the chemical solution, and displays a defect state message of the temperature sensor responsive to the defect state representation control signal output by the temperature controller. 6. The apparatus of claim 5, further comprising an alarm generator that receives the alarm control signal and that generates an alarm. 7. The apparatus of claim 5, wherein the temperature controller further outputs a heater driving control signal adapted to control heating of the chemical solution in response to a signal from the temperature sensor. 8. A method of sensing a defect of a temperature sensor, comprising: detecting a temperature value of the temperature sensor at each unit time while heating temperature cools and falls to a normal temperature when a heating operation is stopped; and comparing a lowest temperature value among the detected temperature values with a reference temperature to sense a change of a specific resistance of the temperature sensor; and sensing a defect state of the temperature sensor when the lowest temperature value deviates from the reference temperature, wherein sensing a defect state of the temperature sensor includes sensing a break in a resistance of the temperature sensor in response to the lowest temperature value among the detected temperature values being less than the reference temperature. 9. A method of sensing a defect of a temperature sensor, comprising: detecting a temperature value of the temperature sensor at each unit time while heating temperature cools and falls to a normal temperature when a heating operation is stopped; and comparing a lowest temperature value among the detected temperature values with a reference temperature to sense a change of a specific resistance of the temperature sensor; and sensing a defect state of the temperature sensor when the lowest temperature value deviates from the reference temperature, wherein sensing a defect state of the temperature sensor includes sensing a short in a resistance of the temperature sensor in response to the lowest temperature value among the detected temperature values being greater than the reference temperature. 10. A method of sensing a defect of a temperature sensor, comprising: storing a reference temperature value corresponding to an expected output value from the temperature sensor at a reference temperature; detecting a temperature value output by the temperature sensor when an actual temperature of the temperature sensor is the reference temperature; comparing the detected temperature value with the reference temperature value; and generating an alarm indicating that the temperature sensor is defective, in response to a result of the comparison between the reference temperature value and the detected temperature value, wherein detecting a temperature value output by the temperature sensor when an actual temperature of the temperature sensor is the reference temperature, comprises: (a) detecting a trial temperature value of the temperature sensor; (b) checking for expiration of a first time interval, and repeating step (a) when the first time interval expires; (c) checking for expiration of a second time interval, and repeating steps (a) and (b) until the second time interval expires; and (d) determining the temperature value of the temperature sensor when the temperature of the temperature sensor is the reference temperature by determining the lowest detected trial temperature value during the second time interval.