IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0745640
(2003-12-29)
|
우선권정보 |
KR-10-2002-0088446(2002-12-31) |
발명자
/ 주소 |
- Chae,Kyung Su
- Song,Hyun Ho
|
출원인 / 주소 |
- LG. Philips LCD Co., Ltd.
|
대리인 / 주소 |
Birch, Stewart, Kolasch &
|
인용정보 |
피인용 횟수 :
3 인용 특허 :
7 |
초록
▼
An apparatus for inspecting rubbing inferiority of an alignment film of a liquid crystal display device by spraying moisture particles, the apparatus including a moisture storing unit for storing moisture, and a moisture particle generating unit for pelletizing moisture ejected from the moisture sto
An apparatus for inspecting rubbing inferiority of an alignment film of a liquid crystal display device by spraying moisture particles, the apparatus including a moisture storing unit for storing moisture, and a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying on a substrate.
대표청구항
▼
What is claimed is: 1. An apparatus for forming an alignment film of a liquid crystal display device, comprising: means for depositing the alignment film on a substrate; rubbing means for rubbing the alignment film; and inspecting means for inspecting rubbing inferiority of the alignment film, whe
What is claimed is: 1. An apparatus for forming an alignment film of a liquid crystal display device, comprising: means for depositing the alignment film on a substrate; rubbing means for rubbing the alignment film; and inspecting means for inspecting rubbing inferiority of the alignment film, wherein the inspecting means includes: a moisture storing unit for storing moisture; and a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying the pelletized moisture on the alignment film. 2. The apparatus of claim 1, wherein the moisture particle generating unit includes a filter having a pore size of tens of μm. 3. The apparatus of claim 1, wherein the moisture particles have a size corresponding to tens of μm. 4. The apparatus of claim 1, further comprising a pipe for connecting the moisture storing unit and the moisture particle generating unit. 5. The apparatus of claim 1, wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate. 6. An apparatus for forming an alignment film of a liquid crystal display device, comprising: means for depositing the alignment film on a substrate; rubbing means for rubbing the alignment film; and inspecting means for inspecting rubbing inferiority of the alignment film, wherein the inspecting means includes: a moisture storing unit for storing moisture; a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying on the alignment film, the moisture particle generating unit including a filter with pores having a size of tens of μm; and a pipe for connecting the moisture storing unit and the moisture particle generating unit. 7. The apparatus of claim 6, wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate. 8. An inspection method for detecting rubbing inferiority, which comprises: providing an apparatus comprising a moisture storing unit for storing moisture, and a moisture particle generating unit for pelletizing moisture; spraying the pelletized moisture on a substrate; and visually inspecting the substrate. 9. The method of claim 8, wherein the moisture particle generating unit includes a filter having a pore size of tens of μm. 10. The method of claim 8, wherein the moisture particles have a size corresponding to tens of μm. 11. The method of claim 8, wherein the apparatus further comprises a pipe for connecting the moisture storing unit and the moisture particle generating unit. 12. The method of claim 8, wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate. 13. An inspection method for detecting rubbing inferiority, which comprises: providing an apparatus comprising a moisture storing unit for storing moisture, a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit, the moisture particle generating unit including a filter with pores having a size of tens of μm, and a pipe for connecting the moisture storing unit and the moisture particle generating unit; spraying the pelletized moisture on a substrate; and visually inspecting the substrate. 14. The method of claim 13, wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate. 15. The method of claim 13, wherein the moisture particles have a size corresponding to tens of μm. 16. The apparatus of claim 1, wherein the moisture storing unit contains water. 17. The apparatus of claim 1, wherein the moisture particle generating unit includes a filter having a pore size of 10-200 μm. 18. The apparatus of claim 1, wherein the moisture particle generating unit includes a filter made from stainless steel, nylon, polyvinylidene difluoride, polypropylene or polytetrafluorethylene. 19. The apparatus of claim 6, wherein the moisture storing unit contains water. 20. The apparatus of claim 6, wherein the filter has a pore size of 10-200 μm. 21. The apparatus of claim 6, wherein the filter is made from stainless steel, nylon, polyvinylidene difluoride, polypropylene or polytetrafluorethylene.
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