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특허 상세정보

Polishing composition storage container

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) A46B-017/00   
미국특허분류(USC) 210/526; 210/522; 210/519; 210/802; 210/803; 015/264; 220/608; 220/607; 220/571
출원번호 US-0300196 (2002-11-20)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 5  인용 특허 : 13
초록

The invention provides devices and methods for removing and trapping large and/or dense abrasive particles from a polishing slurry. The polishing slurry is introduced into a container and allowed to stagnate, thereby causing large and/or dense particles to separate from the slurry under the influence of gravity. The container includes a cavity or plurality of cavities defined by an inner surface of the container into which the separated particles sink. To prevent the large and/or dense particles from becoming re-suspended into the slurry, the size and s...

대표
청구항

What is claimed is: 1. A container for transporting and/or storing a polishing slurry having abrasive particles suspended therein, the container comprising: an interior surface defining a volume for storing the slurry, the interior surface further defining a cavity for retaining abrasive particles settling from the slurry; and an opening for receiving and/or emptying the slurry, wherein the container defines a volumetric capacity and the cavity is sized to retain about 0.1 wt. % to about 5 wt. % of the total abrasive particles in the slurry when the con...

이 특허에 인용된 특허 (13)

  1. Bouc Gary L. ; Faltys Michael. Bulk packaging container. USP2001066244459.
  2. Henderson Angus D. (Bayside NY) Verhoff Francis H. (South Bend IN) Periale John M. (Central Islip NY). Clarifier. USP1976063963624.
  3. Young Ronald A. (London GB3). Cleaning equipment. USP1989114878264.
  4. Rauworth Barry L. (Victoria MN) Hennen John M. (Eden Prairie MN). Composite, pressure-resistant drum type container. USP1997015597085.
  5. Bromwell Robert A. ; Harris Jack E. ; Imboden Alan M. ; Sommer Karl L. ; Witkowski Thomas G.. Container for bulk materials. USP1998085794818.
  6. Kresin Hermann (Bergneustadt DEX). Cup-shaped container. USP1986034577775.
  7. Hakker Johannes Cornelis (Noorderweg 81c NL-3761 EV Soest NLX). Device for cleaning paint brushes or the like. USP1997115687444.
  8. Lee Hyosong M. (Malmvgen 20 S-147 00 Tumba SEX). Device for continuous separation of solid particles from a liquid suspension. USP1987104701260.
  9. Roggenstein Walter (Freiburg DEX) Rustemeyer Paul (Gundelfingen DEX). Method for separating coarse grained and agglomerate pigment particles from a suspension. USP1989114883603.
  10. Kyoichi Miyazaki JP; Matsuomi Nishimura JP; Kazuo Takahashi JP. Polishing apparatus with slurry screening. USP2002036352469.
  11. Salzer Richard (Stuttgart DEX) Schwering Hans-Ulrich (Leonberg DEX). Process and apparatus for purification of industrial waste water. USP1982094351733.
  12. Robinson Karl M. ; Andreas Michael. Slurries for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods and apparatuses for making and using such slurries. USP2000096124207.
  13. Jackson Ronald C. ; Faber Robert D. ; Bushman Donald W.. Soil separation apparatus. USP1999105971199.