IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0845947
(2004-05-14)
|
발명자
/ 주소 |
- Bente,H. Bryan
- Henderson,Robert Clark
|
출원인 / 주소 |
- Agilent Technologies, Inc.
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
5 |
초록
▼
An electro-mechanical variable fluid flow restrictor includes a support having a passage and a seal surface, a deformable seal that is engageable with the seal surface, and a bias member for exerting an electronically controlled variable bias against the deformable seal. The seal surface includes c
An electro-mechanical variable fluid flow restrictor includes a support having a passage and a seal surface, a deformable seal that is engageable with the seal surface, and a bias member for exerting an electronically controlled variable bias against the deformable seal. The seal surface includes channels formed in its surface that extend beneath the deformable seal. The bias member can exert a bias sufficient to cause the deformable seal to fill the channels, preventing fluid flow through the channels. When the bias member decreases the bias against the deformable seal, the deformable seal gradually moves out of the channels, allowing fluid flow through the channels, and through the passage in a flow control. The deformable seal does not need to separate from the seal surface to allow fluid flow. Instead, fluid flows through the small, controlled flow areas created when the deformable seal withdraws from the channels.
대표청구항
▼
We claim: 1. An electro-mechanical variable fluid flow restrictor, comprising: an electronic controller operatively coupled to the variable fluid flow restrictor; a pressure sensor coupled to the electronic controller; an electronically controlled electro-mechanical actuator operatively coupled to
We claim: 1. An electro-mechanical variable fluid flow restrictor, comprising: an electronic controller operatively coupled to the variable fluid flow restrictor; a pressure sensor coupled to the electronic controller; an electronically controlled electro-mechanical actuator operatively coupled to the variable fluid flow restrictor and responsive to the electronic controller; the variable fluid flow restrictor further comprising a support having a passage and a seal surface, the seal surface having at least one channel; a deformable seal engageable with the seal surface and with the at least one channel; and a bias member capable of exerting an electronically controlled variable bias against the deformable seal, wherein when the variable fluid flow restrictor opens, the deformable seal at least partially disengages the at least one channel prior to disengaging from the seal surface enabling fluid to flow through the at least one channel and through the passage, thus making the restrictor a closed-loop electronically controlled variable fluid flow restrictor. 2. The electro-mechanical variable fluid flow restrictor of claim 1, wherein the deformable seal is capable of deformation such that the deformable seal substantially fills a cross section of the at least one channel, substantially blocking fluid flow through the at least one channel. 3. The electro-mechanical variable fluid flow restrictor of claim 2, wherein the bias member is translatable within activity of the support to exert the variable bias against the deformable seal. 4. The electro-mechanical variable fluid flow restrictor of claim 1, wherein the bias member can decrease the bias against the deformable seal so that the deformable seal moves at least partially out of the at least one channel, allowing fluid flow through the at least one channel and through the passage. 5. The electro-mechanical variable fluid flow restrictor of claim 1, wherein the passage extends through the support to the seal surface, and the at least one channel extends outward from the passage. 6. The electro-mechanical variable fluid flow restrictor of claim 1, wherein the at least one channel comprises a plurality of channels extending radially outward from the passage. 7. The electro-mechanical variable fluid flow restrictor of claim 3, wherein the electro-mechanical variable fluid flow restrictor is implemented in a pressure regulator. 8. The electro-mechanical variable fluid flow restrictor of claim 3, wherein the electro-mechanical variable fluid flow restrictor is implemented in a flow controller. 9. The electro-mechanical variable fluid flow restrictor of claim 3, wherein the electro-mechanical variable fluid flow restrictor is implemented in a proportional valve. 10. The electro-mechanical variable fluid flow restrictor of claim 3, wherein the electro-mechanical variable fluid flow restrictor is implemented in a mass flow controller. 11. An electro-mechanical variable fluid flow restrictor, comprising: an electronic controller operatively coupled to the variable fluid flow restrictor; a pressure sensor coupled to the electronic controller; an electronically controlled electro-mechanical actuator operatively coupled to the variable fluid flow restrictor and responsive to the electronic controller; the variable fluid flow restrictor further comprising a support having a passage and a seal surface, the seal surface having at least one channel; a deformable seal engageable with the seal surface and with the at least one channel; and a bias member capable of exerting an electronically controlled variable bias against the deformable seal, wherein the deformable seal is capable of deformation such that the deformable seal substantially fills a cross section of the at least one channel, substantially blocking fluid flow through the at least one channel, wherein the bias member is translatable within a cavity of the support to exert the variable bias against the deformable seal, wherein the bias member can decrease the bias against the deformable seal so that the deformable seal moves at least partially out of the at least one channel prior to disengaging from the seal surface, allowing fluid flow through the at least one channel and through the passage, wherein the passage extends through the support to the seal surface, and the at least one channel extends outward from the passage, wherein the at least one channel comprises a plurality of channels extending radially outward from the passage, thus making the restrictor a closed-loop electronically controlled variable fluid flow restrictor. 12. An electro-mechanical pressure regulator, comprising: an electronic controller; a pressure sensor coupled to the electronic controller; an electronically controlled electro-mechanical actuator responsive to the electronic controller; and a flow control responsive to the actuator, the flow control comprising: a support having a passage and a seal surface, the seal surface comprising a plurality of channels extending radially outward from the passage a deformable seal engageable with the seal surface and with the channels; and a bias member, wherein the bias member exerts a bias against the deformable seal, wherein the deformable seal is capable of deformation such that the deformable seal substantially fills a cross section of the channels, substantially blocking fluid flow through the channels, wherein the bias member exerts a variable bias against the deformable seal in response to the actuator, wherein the bias member can decrease a bias against the deformable seal so that the deformable seal moves at least partially out of the channels prior to disengaging from the seal surface, allowing fluid flow through the channels and through the passage, and wherein the passage extends through the support to the seal surface, thus making the pressure regulator a closed-loop electronically controlled pressure regulator. 13. The electro-mechanical pressure regulator of claim 12, wherein the deformable seal is a cylindrical deformable elastomer seal. 14. The electro-mechanical pressure regulator of claim 12, wherein the deformable seal is an o-ring. 15. The electro-mechanical pressure regulator of claim 12, wherein the bias member is at least partially disposed in a cavity of the support, and includes a projection that is translatable within the passage, the bias member being translatable within the cavity to exert the variable bias against the deformable seal. 16. The electro-mechanical pressure regulator of claim 12, wherein the electro-mechanical pressure regulator is implemented in a pressure regulator. 17. The electro-mechanical pressure regulator of claim 12, wherein the electra-mechanical pressure regulator is implemented in a flow controller. 18. The electro-mechanical pressure regulator of claim 12, wherein the electro-mechanical pressure regulator is implemented in a proportional valve. 19. The electro-mechanical pressure regulator of claim 12, wherein the electro-mechanical pressure regulator is implemented in a mass flow controller. 20. An electro-mechanical variable pressure regulator, comprising: an electronic controller; a pressure sensor coupled to the electronic controller; an electronically controlled electro-mechanical actuator responsive to the electronic controller; and a flow control responsive to the actuator, the flow control comprising: a support having a passage and a seal surface, the seal surface comprising a plurality of channels extending radially outward from the passage; a deformable seal engageable with the seal surface and with the channels; and a bias member, wherein the bias member exerts a bias against the deformable seal, wherein the deformable seal is capable of deformation such that the deformable seal substantially fills a cross section of the channels, substantially blocking fluid flow through the channels, and wherein the passage extends through the support to the seal surface, thus making the pressure regulator a closed-loop electronically controlled pressure regulator.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.