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Method for structuring an oxide layer applied to a substrate material 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/471
  • H01L-021/02
출원번호 US-0470896 (2002-02-01)
우선권정보 DE-101 04 726(2001-02-02)
국제출원번호 PCT/EP02/001096 (2002-02-01)
§371/§102 date 20031118 (20031118)
국제공개번호 WO02/061854 (2002-08-08)
발명자 / 주소
  • M체nzer,Adolf
  • Schlosser,Reinhold
출원인 / 주소
  • Shell Solar GmbH
대리인 / 주소
    McGlew &
인용정보 피인용 횟수 : 14  인용 특허 : 23

초록

The invention relates to a method for structuring an oxide layer applied to a substrate material. The aim of he invention is to provide an inexpensive method for structuring such an oxide layer. To this end, a squeegee paste that contains an oxide-etching component is printed on the oxide layer thro

대표청구항

We claim: 1. A method for manufacturing a solar cell with a selective emitter layer, comprising the following steps: providing a p-doped semiconductor wafer having a surface, with a front side comprising a light-facing side, and a rear side; forming the selective emitter layer on the light-facing s

이 특허에 인용된 특허 (23)

  1. Fujisaki Tatsuo,JPX ; Tsuzuki Koji,JPX ; Takada Takeshi,JPX ; Takeyama Yoshifumi,JPX, Cleaning method for removal of contaminants.
  2. Hasegawa Hiromi (Niigata JPX) Suzuki Kenichi (Niigata JPX), Composition for forming protective layer of dielectric material.
  3. Slark Andrew,GBX ; Butters Alan,GBX, Dye diffusion thermal transfer printing.
  4. Leech, Edward J.; Russo, Frank D., Epoxy resin based protective coating composition for printed circuit boards.
  5. Leech Edward J. (Oyster Bay NY), Epoxy resin coating composition for printed circuit boards.
  6. Leech Edward J. (Oyster Bay NY) Russo Frank D. (West Sayville NY), Epoxy resin coating compositions for printed circuit boards.
  7. Ichinose Hirofumi (Tsuzuki-gun JPX) Shinkura Satoshi (Tsuzuki-gun JPX) Hasebe Akio (Souraku-gun JPX) Murakami Tsutomu (Nara JPX), Etching method, method of producing a semiconductor device, and etchant therefor.
  8. Gimm Soon Ho (Seoul KRX) Kim Jung Hyang (Inchon KRX), Glass etching composition.
  9. Leech Edward J. (Oyster Bay NY) Russo Frank D. (West Sayville NY), High resolution screen printable resists.
  10. Mueller Werner H. (East Greenwich RI) Khanna Dinesh N. (West Warwick RI), Hydroxy polyimides and high temperature positive photoresists therefrom.
  11. Hogan James V. (323 Sapphire Balboa Island CA 92662), Method for permanently marking glass.
  12. Tanabe Osamu (Nagaokakyo JPX), Method of producing printed circuit boards.
  13. Okinoshima Hiroshige (Annaka JPX) Kato Hideto (Takasaki JPX), Photosensitive polymer composition.
  14. McMaster Harold A. (Woodville OH), Photovoltaic cell fabrication method and panel made thereby.
  15. Tsuzuki Koji (Tsuzuki-gun JPX) Inoue Katsuhiko (Nara JPX) Takada Takeshi (Tsuzuki-gun JPX) Takeyama Yoshifumi (Tsuzuki-gun JPX), Photovoltaic device and manufacturing method of the same.
  16. Nath Prem (Rochester Hills MI) Vogeli Craig N. (New Baltimore MI) Barnard Timothy (Rochester Hills MI), Photovoltaic module fabrication process.
  17. Bauer Michael,DEX ; Rembold Manfred,CHX, Process for flame-proofing organic polymeric materials.
  18. Johnson Daniel R. (West Byfleet GB2) Oktik Sener (Durham City GB2) Ozsan Mehmet E. (Woking GB2) Patterson Michael H. (Frimley GB2), Process for making OHMIC contacts and photovoltaic cell with ohmic contact.
  19. Naoto Okada JP; Masahiro Kanai JP; Hirokazu Ohtoshi JP; Tadashi Hori JP, Process for producing photovoltaic device.
  20. Schmidt Walter (Zurich CHX), Process for the preparation of an optically transparent and electrically conductive film pattern.
  21. Akio Ogawa JP; Manabu Abe JP, Reaction product of primary and tertiary amine-containing compound, dihydrazide an polyisocyanate.
  22. Schlosser Reinhold,DEX ; Munzer Adolf,DEX, Solar cell with a back-surface field method of production.
  23. Ishimaru Toshiaki (Hitachi JPX) Tsukada Katsushige (Hitachi JPX) Hayashi Nobuyuki (Hitachi JPX) Koibuchi Shigeru (Hitachi JPX) Isobe Asao (Hitachi JPX), Soldering mask formed from a photosensitive resin composition and a photosensitive element.

이 특허를 인용한 특허 (14)

  1. Spear, Richard A.; Rutter, Jr., Edward W.; Metin, Lea M.; Xu, Helen X., Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants.
  2. Leung, Roger Yu-Kwan; Zhou, De-Ling; Fan, Wenya, Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks.
  3. Leung, Roger Yu-Kwan; Fan, Wenya; Nedbal, Jan, Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions.
  4. Rana, Virendra V., Crystalline silicon solar cells on low purity substrate.
  5. Zhou, Ligui; Spear, Richard A.; Leung, Roger Yu-Kwan; Fan, Wenya; Xu, Helen X.; Metin, Lea M.; Bhanap, Anil Shriram, Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions.
  6. Weidman, Timothy W.; Mishra, Rohit; Stewart, Michael P.; Cha, Yonghwa Chris; Wijekoon, Kapila P.; Fang, Hongbin, Hybrid heterojunction solar cell fabrication using a doping layer mask.
  7. Weidman, Timothy W.; Mishra, Rohit; Stewart, Michael P.; Cha, Yonghwa Chris; Wijekoon, Kapila P.; Fang, Hongbin, Hybrid heterojunction solar cell fabrication using a metal layer mask.
  8. Tanaka, Yasuo, Method and apparatus for printing conductive ink.
  9. Dimitrov, Dimitre Zahariev; Lin, Ching-Hsi; Lan, Chung-Wen; Wu, Der-Chin, Method for forming solar cell with selective emitters.
  10. Leung, Roger Yu-Kwan; Rutherford, Nicole; Bhanap, Anil, Methods for simultaneously forming doped regions having different conductivity-determining type element profiles.
  11. Stewart, Michael P.; Kumar, Prabhat; Wijekoon, Kapila P.; Zhang, Lin; Ponnekanti, Hari K., Methods of manufacturing solar cell devices.
  12. Huang, Hong Min; Gao, Carol; Ding, Zhe; Peng, Albert; Liu, Ya Qun, Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants.
  13. Weidman, Timothy W.; Mishra, Rohit, Solar cell contact formation process using a patterned etchant material.
  14. Bateman, Nicholas; Gupta, Atul; Hatem, Christopher; Ramappa, Deepak, Use of dopants with different diffusivities for solar cell manufacture.
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