초록 ▼

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular as

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

대표청구항 ▼

We claim: 1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including: identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their

We claim: 1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including: identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions; recognizing in the controller a current context of operation of a particular semiconductor manufacturing device; transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and receiving from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context. 2. The method of claim 1, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed. 3. The method of claim 2, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested. 4. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including: identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to reduce data sensed from one or more semiconductor manufacturing devices, based on the context descriptions; recognizing in the controller a current context of operation of a particular semiconductor manufacturing device; transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and receiving from the particular smart sensors reduced data sensed by the smart sensors, responsive to the transmitted current context. 5. The method of claim 4, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed. 6. The method of claim 5, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested. 7. The method of claim 4, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network. 8. The method of claim 4, wherein the identifying includes loading identifying data into the controller. 9. The method of claim 4, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device. 10. The method of claim 9, wherein the semiconductor manufacturing device is a chamber of a multi-chamber cluster tool. 11. The method of claim 4, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device. 12. The method of claim 4, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device. 13. The method of claim 4, wherein the current context includes identification of a recipe step being carried out on the particular semiconductor manufacturing device. 14. The method of claim 4, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device. 15. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including: identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to calibrate their sensing of data from one or more semiconductor manufacturing devices, based on the context descriptions; recognizing in the controller a current context of operation of a particular semiconductor manufacturing device; transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and receiving from the particular smart sensors data, sensed by the smart sensors, calibrated responsive to the transmitted current context. 16. The method of claim 15, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed. 17. The method of claim 16, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested. 18. The method of claim 15, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network. 19. The method of claim 15, wherein the identifying includes loading identifying data into the controller. 20. The method of claim 15, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device. 21. The method of claim 15, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device. 22. The method of claim 15, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device. 23. The method of claim 15, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device. 24. A controller adapted to monitoring processes or equipment performance in a semiconductor manufacturing operation, the controller including: a processor; memory coupled to the processor; one or more ports coupled to the processor, adapted to communicate with smart sensors; and logic and resources operable with the processor, adapted to identify a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions; recognize a current context of operation of a particular semiconductor manufacturing device; transmit to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and receive from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context. 25. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including: receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device; analyzing at the controller the reduced data, responsive to the current context, and determining that additional detail should be requested; and transmitting a request for the additional detail from the data sensed by at least one specific smart sensor. 26. The method of claim 25, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested. 27. The method of claim 25, further including prior to the receiving step: recognizing in the controller the current context of operation of the particular semiconductor manufacturing device; and transmitting to the one or more particular smart sensors the current context. 28. The method of claim 25, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network. 29. The method of claim 25, wherein the identifying includes loading identifying data into the controller. 30. The method of claim 25, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device. 31. The method of claim 25, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device. 32. The method of claim 25, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device. 33. The method of claim 25, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device. 34. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including: a processor; memory coupled to the processor; one or more ports coupled to the processor, adapted to communicate with smart sensors; and logic and resources operable with the processor, adapted to receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device; analyze the reduced data, responsive to the current context, and determine that additional detail should be requested; and transmit to at least one specific smart sensor a request for the additional detail from the data sensed. 35. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including: receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device; providing a data user at least some of the reduced data and receiving from the data user an inquiry for additional detail; and transmitting to at least one specific smart sensor a request for the additional detail from the data sensed. 36. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including: a processor; memory coupled to the processor; one or more ports coupled to the processor, adapted to communicate with smart sensors and a data user; and logic and resources operable with the processor, adapted to receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device; provide the data user at least some of the reduced data and receive from the data user an inquiry for additional detail; and transmit to at least one specific smart sensor a request for the additional detail from the data sensed. 37. A controller-aided method of controlling equipment performance monitoring in a semiconductor manufacturing operation, the method including: identifying to a controller capabilities of at least one smart sensor that is adapted to recognize a plurality of context descriptions; and to adapt its sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions; receiving at the smart sensor from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and transmitting to the controller data sensed by the smart sensor, responsive to the received current context. 38. The method of claim 37, further including receiving a request from the controller to provide additional detail from the data sensed. 39. The method of claim 38, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested. 40. The method of claim 37, further including reducing data sensed by the smart sensor responsive to the transmitted current context and prior to transmitting the data sensed. 41. The method of claim 37, further including calibrating the smart sensor responsive to the transmitted current context and prior to transmitting the data sensed. 42. The method of claim 37, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device. 43. The method of claim 37, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device. 44. The method of claim 37, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device. 45. The method of claim 37, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device. 46. The method of claim 37, wherein the smart sensor includes a simple sensor and a smart adapter, wherein the smart adapter includes logic and resources adapted to recognize a plurality of context descriptions; and to adapt the sensor's sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions. 47. The method of claim 46, wherein the simple sensor is an incumbent sensor being adapted to respond to the current context received from the controller. 48. A smart sensor adapted to monitoring equipment performance in a semiconductor manufacturing operation, the smart sensor including: a processor; memory coupled to the processor; one or more ports coupled to the processor, adapted to communicate with at least one controller; and logic and resources operable with the processor, adapted to recognize a plurality of context descriptions and to adapt the smart sensors sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions; receive from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and transmit to the controller data sensed by the smart sensor, responsive to the received current context. 49. The device of claim 48, wherein the smart sensor includes a simple sensor and a smart adapter, wherein the smart adapter includes the logic and resources adapted to recognize a plurality of context descriptions and to adapt the incumbent sensors sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions. 50. The method of claim 49, wherein the simple sensor is an incumbent sensor being adapted to respond to the current context received from the controller.