초록 ▼

A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical

A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical connectors, and a rigid plug flexibly positioned relative to the second end of the tubular body having second electrical connectors attached to the transmission wires. The flexibly positioned rigid plug is generally capable of a range movement in directions both perpendicular and parallel to a longitudinal axis of the tubular body. In one version, the rigid plug comprises first and second plug elements.

대표청구항 ▼

What is claimed is: 1. A lamp assembly for a substrate processing chamber, the lamp assembly comprising: (a) a tubular body having openings at first and second ends; (b) a lamp element seated in the opening of the first end of the tubular body, the lamp element having a filament and first electric

What is claimed is: 1. A lamp assembly for a substrate processing chamber, the lamp assembly comprising: (a) a tubular body having openings at first and second ends; (b) a lamp element seated in the opening of the first end of the tubular body, the lamp element having a filament and first electrical connectors; (c) transmission wires connected to the first electrical connectors; and (d) a rigid plug flexibly positioned at the second end of the tubular body, the rigid plug comprising second electrical connectors attached to the transmission wires. 2. A lamp assembly according to claim 1 wherein the rigid plug comprises a first plug element holding the second electrical connectors that are attached to the transmission wires. 3. A lamp assembly according to claim 2 wherein the first plug element is not directly attached to the tubular body. 4. A lamp assembly according to claim 2 wherein the rigid plug comprises a second plug element having a fixed position relative to the second end of the tubular body, the second plug element restricting the range of motion of the first plug element. 5. A lamp assembly according to claim 4 wherein the second plug element comprises passages for the transmission wires. 6. A lamp assembly according to claim 4 wherein each transmission wires has a kink on a portion of the transmission wire located on the side of the second plug element opposite the first plug element. 7. A lamp assembly according to claim 4 wherein the second plug element comprises clips which snap fit to a protruding ledge on the first plug element. 8. A lamp assembly according to claim 4 wherein the rigid plug comprises a connector pin connecting the first and second plug elements, the second plug element comprising a pin passage sized to determine the range of movement of the first plug element in directions perpendicular to a longitudinal axis of the tubular body, and the connector pin comprising a flange which is sized to prevent the flange from passing through the pin passage in the second plug element. 9. A lamp assembly according to claim 2 wherein the lamp assembly has a longitudinal axis along the center of the tubular body and the first plug element has freedom of motion in a direction substantially perpendicular to the longitudinal axis. 10. A lamp assembly according to claim 2 wherein the lamp assembly has a longitudinal axis along the center of the tubular body and the first plug element has freedom of motion in a direction substantially parallel to the longitudinal axis. 11. A lamp assembly according to claim 1 wherein the rigid plug comprises a polymer capable of being baked at a temperature of at least about 165째 C. for at least about 15 hours. 12. A lamp assembly according to claim 1 wherein the rigid plug comprises glass-filed nylon, polymide, a Bakelite-type polymer, a ceramic material, high temperature glass, or mixtures thereof. 13. A lamp assembly according to claim 1 comprising a potting compound in the tubular body, the potting compound having a water content of less than 0.1% by weight. 14. A lamp assembly according to claim 13 wherein the potting compound comprises a magnesium phosphate bonded zirconium silicate. 15. A lamp assembly according to claim 13 comprising a stopper to at least partially seal the potting compound in the tubular body, the stopper comprising a slot for inserting the potting compound into the tubular body. 16. A lamp assembly for a substrate processing chamber comprising: (a) a tubular body having first and second ends; (b) a lamp element seated in the first end of the tubular body, the lamp element having a filament and first electrical connectors; (c) transmission wires connected to the first element electrical connectors; (d) a first rigid plug element flexibly positioned relative to the second end of the tubular body, the first rigid plug element having second electrical connectors attached to the transmission wires; and (e) a second rigid plug element attached to the second end of the tubular body, the second rigid plug element restricting the range of motion of the first rigid plug element. 17. A lamp assembly according to claim 16 wherein the second rigid plug element comprises clips which snap fit to a protruding ledge on the first rigid plug element. 18. A lamp assembly according to claim 16 comprising a connector pin connecting the first and second rigid plug elements, the second rigid plug element comprising a pin passage sized to determine the range of movement of the first rigid plug element in directions perpendicular to a longitudinal axis of the tubular body, and the connector pin comprising a flange which is sized to prevent the flange from passing through the pin passage in the second rigid plug element. 19. A lamp assembly according to claim 16 wherein the first and second rigid plug elements comprise glass-filed nylon, polymide, a Bakelite-type polymer, a ceramic material, high temperature glass, or mixtures thereof. 20. A substrate processing chamber comprising: (a) enclosing walls; (b) a substrate support; (c) a gas supply; (d) a plurality of lamp assemblies, each lamp assembly comprising: (i) a tubular body having openings at first and second ends; (ii) a lamp element seated in the opening of the first end of the tubular body, the lamp element having a filament and first electrical connectors; (iii) transmission wires connected to the first electrical connectors; and (iv) a rigid plug flexibly positioned at the second end of the tubular body, the rigid plug comprising second electrical connectors attached to the transmission wires.