IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0916084
(2004-08-11)
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발명자
/ 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 |
피인용 횟수 :
8 인용 특허 :
7 |
초록
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An apparatus and method is disclosed for automatically controlling single-input-multi-output (SIMO) systems or processes. The control output signals of a plurality of single-input-single-output (SISO) automatic controllers are combined by a combined output setter so that these SISO controllers are c
An apparatus and method is disclosed for automatically controlling single-input-multi-output (SIMO) systems or processes. The control output signals of a plurality of single-input-single-output (SISO) automatic controllers are combined by a combined output setter so that these SISO controllers are converted to a multi-input-single-output (MISO) automatic controller based on certain criteria; and its resulting controller output signal is able to manipulate only one actuator to control a plurality of continuous process variables or attempt to minimize a plurality of error signals between the setpoints and their corresponding process variables. Without the need of building process mathematical models, this inventive apparatus and method is useful for automatically controlling unevenly paired multivariable systems or processes where there are less system inputs than outputs including but not limited to industrial furnaces, rapid thermal processing (RTP) chambers, chemical mechanical planarization (CMP) systems, and distillation columns.
대표청구항
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The invention claimed is: 1. A multi-input-single-output controller for a process having a plurality of process outputs which are controlled by one controller output applied to one actuator whose output is the input of said process, said controller comprising: a) a plurality of neural networks each
The invention claimed is: 1. A multi-input-single-output controller for a process having a plurality of process outputs which are controlled by one controller output applied to one actuator whose output is the input of said process, said controller comprising: a) a plurality of neural networks each including: i) an error input representative of the difference between a predetermined setpoint and one of said process outputs; ii) a normalization unit for normalizing said error input to a predetermined range of values; iii) a scaling function for scaling said normalized error input to produce a value E1 of the form or an equivalent thereof, in which Kc is the controller gain; Tc is the user-selected time constant of said process; N(쨌) is the normalization function of said normalization unit; and e(t) is the value of said error input at any given time; iv) a layer of input neurons having as their inputs successively time-delayed values of E1; v) a layer of hidden neurons each having as its output the sum of individually weighted ones of said successively time-delayed values of E1; vi) an output neuron having as its output the sum of a first function of the individually weighted outputs of said hidden neurons; vii) a control signal which is at least in part the denormalized value of a second function of the output of said output neuron; and b) said control signals of said plurality of neural networks being combined by a combined output setter to produce said controller output. 2. The controller of claim 1, in which said control signal of each neural network is the sum of said denormalized value and the value Kc e(t), or an equivalent thereof. 3. The controller of claim 1, in which the said plurality is 2. 4. The controller of claim 3, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=Rv1(t)+(1-R)v2( t)description="In-line Formulae" end="tail" or an equivalent thereof, in which 0≦u(t) ≦100; 0≦R≦1; R is a constant; and v1(t) and v2(t) are said control signals of the said neural networks. 5. The controller of claim 3, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which 0≦u(t) ≦100; Kc1 and Kc2 are user-selected controller gains for each of the said neural network, respectively; and v1(t) and v2(t) are said control signals of the said neural networks. 6. The controller of claim 3, in which there are two additional feedforward controllers and the combined feedback and feedforward controller signals u1(t) and u2(t) are of the form description="In-line Formulae" end="lead"u 1(t)=v1(t)+vƒ1( t)description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u 2(t)=v2(t)+vƒ2( t)description="In-line Formulae" end="tail" or an equivalent thereof, in which v1(t) and v 2(t) are the said control signals of the said neural networks, respectively; and vf1(t) and vf2(t) are the feedforward controller outputs. 7. The controller of claim 6, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=Ru1(t)+(1-R)u2( t),description="In-line Formulae" end="tail" or an equivalent thereof, in which 0≦u(t) ≦100; 0≦R≦1; R is a constant; and u1(t) and u2(t) are the combined feedback and feedforward controller signals. 8. The controller of claim 6, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which 0≦u(t) ≦100; Kc1 and Kc2 are user-selected controller gains for each of the said neural network, respectively; and u1(t) and u2(t) are the combined feedback and feedforward controller signals. 9. The controller of claim 1, in which the said plurality is 3. 10. The controller of claim 9, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1v1(t)+R2 v2(t)+(1-R1-R2) v3(t),description="In-line Formulae" end="tail" or an equivalent thereof, in which 0≦u(t) ≦100; 0≦R1≦1; 0≦R2≦1; 0≦R1+ R2≦1; R1 and R2 are constants; and v1(t), v2(t), and v3(t) are said control signals of the said neural networks. 11. The controller of claim 9, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which 0≦u(t) ≦100; Kc1, Kc2, and Kc3 are user-selected controller gains for each of the said neural network, respectively; and v1(t), v2(t), and v3(t) are said control signals of the said neural networks. 12. The controller of claim 9, in which there are three additional feedforward controllers and the combined feedback and feedforward controller signals u1(t), u2(t) and u 3(t) are of the form description="In-line Formulae" end="lead"u 1(t)=v1(t)+vƒ1( t)description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u 2(t)=v2(t)+vƒ2( t)description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u 3(t)=v3(t)+vƒ3( t)description="In-line Formulae" end="tail" or an equivalent thereof, in which v1(t), v2 (t), and v3(t) are the said control signals of the said neural networks, respectively; and vf1(t), vf2(t), and v f3(t) are the feedforward controller outputs. 13. The controller of claim 12, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1u1(t)+R2 u2(t)+(1-R1-R2) u3(t)description="In-line Formulae" end="tail" or an equivalent thereof, in which 0≦u(t) ≦100; 0≦R1≦1; 0≦R2≦1; 0≦R1+ R2≦1; R1 and R2 are constants; and u1(t), u2(t), and u3(t) are the combined feedback and feedforward controller signals. 14. The controller of claim 12, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which 0≦u(t) ≦100; Kc1, Kc2, and Kc3 are user-selected controller gains for each of the said neural network, respectively; and u1(t), u2(t), and u3(t) are the combined feedback and feedforward controller signals. 15. The controller of claim 1, in which the said plurality is M. 16. The controller of claim 15, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1v1(t)+R2 v2(t)+ . . . +(1-R1-. . .-RM-1)vM(t),description="In-line Formulae" end="tail" or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; 0≦R1 ≦1; 0≦R2≦1; . . . ; 0≦RM-1≦1; 0≦R1 +R2+ . . . +RM-1≦1; R1, R 2, . . . , RM-1 are constants; and v1(t), v 2(t), . . . , vM(t) are said control signals of the said neural networks. 17. The controller of claim 15, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; Kc1, Kc2, . . . , KcM are user-selected controller gains for each of the said neural network, respectively; and v1(t), v2(t), . . . , vM(t) are said control signals of the said neural networks. 18. The controller of claim 15, in which there are M additional feedforward controllers and the combined feedback and feedforward controller signals u1(t), u2(t), . . . , uM(t) are of the form description="In-line Formulae" end="lead"u 1(t)=v1(t)+vƒ1( t)description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u 2(t)=v2(t)+vƒ2( t)description="In-line Formulae" end="tail" description="In-line Formulae" end="lead". . .description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u M(t)=vM(t)+vƒM( t),description="In-line Formulae" end="tail" or an equivalent thereof, in which v1(t), v2 (t), . . . , vM(t) are the said control signals of the said neural networks, respectively; and v1(t), v2(t), . . . , vfM(t) are the feedforward controller outputs. 19. The controller of claim 18, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1u1(t)+R2 u2(t)+ . . . +(1-R1-. . .-RM-1)uM(t),description="In-line Formulae" end="tail" or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; 0≦R1 ≦1; 0≦R1≦1; 0≦R2≦1; . . . ; 0≦R M-1≦1; 0≦R1+R2+ . . . + RM-1≦1; R1, R2 . . . , RM-1 are constants; and u1(t), u2(t), . . . , u M(t) are the combined feedback and feedforward controller signals. 20. The controller of claim 18, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; Kc1, Kc2, . . . , KcM are user-selected controller gains for each of the said neural network, respectively; and u1(t), u2(t), . . . , uM(t) are the combined feedback and feedforward controller signals. 21. A multi-input-single-output PID controller for a process having a plurality of process outputs which are controlled by one controller output applied to one actuator whose output is the input of said process, said controller comprising: a) a plurality of PID controllers in the form or an equivalent thereof, in which Kp is the proportional gain; Ti is the integral time; Td is the derivative time; and uj(t) is the output of the jth PID, j=1, 2, . . . M; and b) said control signals of said plurality of PID controllers being combined by a combined output setter to produce said controller output. 22. The controller of claim 21, in which the said plurality is 2. 23. The controller of claim 22, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=Ru1(t)+(1-R)u2( t),description="In-line Formulae" end="tail" or an equivalent thereof, in which 0≦u(t) ≦100; 0≦R≦1; R is a constant; and u1(t) and u2(t) are the outputs of the said PID controllers. 24. The controller of claim 22, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which 0≦u(t) ≦100; Kp1 and Kp2 are user-selected PID controller gains, respectively; and u1(t) and u2(t) are the outputs of the said PID controllers. 25. The controller of claim 21, in which the said plurality is M. 26. The controller of claim 25, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1u1(t)+R2 u2(t)+ . . . +(1-R-. . .-RM-1) uM(t),description="In-line Formulae" end="tail" or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; 0≦R1 ≦1; 0≦R2≦1; . . . ; 0≦RM-1≦1; 0≦R1 +R2+ . . . +RM-1≦1; R1, R 2, . . . , RM-1 are constants; and u1(t), u 2(t), and uM(t) are the outputs of the said PID controllers. 27. The controller of claim 25, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; Kp1, Kp2, . . . , KpM are user-selected PID controller gains, respectively; and u1(t), u2(t), and uM(t) are the outputs of the said PID controllers. 28. A multi-input-single-output controller for a process having a plurality of process outputs which are controlled by one controller output applied to one actuator whose output is the input of said process, said controller comprising: a) a plurality of single-input-single-output (SISO) controllers C1, C2, . . . , CM in the form description="In-line Formulae" end="lead"u 1(t)=ƒ(e1(t),t, P 11, P12, . . . , P1l),description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u 2(t)=ƒ(e2(t),t, P 21, P22, . . . , P2l),description="In-line Formulae" end="tail" description="In-line Formulae" end="lead". . .description="In-line Formulae" end="tail" description="In-line Formulae" end="lead"u M(t)=ƒ(eM(t),t, P M1, PM2, . . . , PMl),description="In-line Formulae" end="tail" or an equivalent thereof, in which M=1, 2, 3, 4, 5 . . . ; t is time; P11, P12, . . . , P11 are tuning parameters for controller C1; P21, P22, . . . , P2l are tuning parameters for controller C2; . . . ; and PM1, PM2 . . . , PMl are tuning parameters for controller CM; and b) said control signals of said plurality of the SISO controllers being combined by a combined output setter to produce said controller output. 29. The controller of claim 28, in which said controller output is generated by the said combined output setter in the form: description="In-line Formulae" end="lead"u( t)=R1u1(t)+R2 u2(t)+ . . . +(1-R1-. . .-RM-1)uM(t),description="In-line Formulae" end="tail" or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; 0≦R1 ≦1; 0≦R2≦1; . . . ; 0≦RM-1≦1; 0≦R1 +R2+ . . . +RM-1≦1; R1, R 2, . . . , RM-1 are constants; and u1(t), u 2(t), and uM(t) are the outputs of the said SISO controllers, respectively. 30. The controller of claim 28, in which said controller output is generated by the said combined output setter in the form: or an equivalent thereof, in which M=3, 4, 5, . . . ; 0≦u(t)≦100; P11, P21, . . . , PM1 are gains for controller C1, C2, . . . , CM, respectively; and u1(t), u2(t), and u M(t) are the outputs of the said SISO controllers, respectively. 31. The controller of claim 1, 21, or 28, in which said combined output setter includes individual controls that can be set freely within said output range to produce said controller output. 32. The controller of claim 1, 21, or 28, in which the said controller output is re-scalable from the 0 to 100 range to an engineering value range by using a linear function. 33. The controller of claim 1, 21, or 28, in which the said controller output is arranged to include selectable control limits or control constraints. 34. The controller of claim 1, 21, or 28, in which said controller is a computer program embodied in a digital medium.
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