초록 ▼

Containers for providing vapor phase reactant from liquid sources include bubbler designs and designs in which carrier gas flows over the liquid surface. Among the bubbler arrangements, a bypass conductance is provided to release excess pressure from the gas volume inside the container, or an enlarg

Containers for providing vapor phase reactant from liquid sources include bubbler designs and designs in which carrier gas flows over the liquid surface. Among the bubbler arrangements, a bypass conductance is provided to release excess pressure from the gas volume inside the container, or an enlarged bubbler tube is provided with a volume sufficient to accommodate all possible liquid backflow without having the liquid exit the container. Among the overflow designs, flow dividers provide a tortuous path for the gas to increase the time exposure of carrier gas packets to the evaporating liquid surface. The flow dividers can be microporous to encourage capillary action, thereby increasing the evaporating surface. The tortuous gas flow path can be separated from the liquid phase by a breathable semi-porous membrane that permits vapor phase reactant to pass through but prohibits liquid from passing in the other direction.

대표청구항 ▼

I claim: 1. A liquid source chemical vaporizer for vaporizing liquid source chemical and delivering vapor phase chemical, comprising: a container configured to hold liquid source chemical up to a liquid fill level and to additionally define an inner gas volume; a carrier gas inlet communicating car

I claim: 1. A liquid source chemical vaporizer for vaporizing liquid source chemical and delivering vapor phase chemical, comprising: a container configured to hold liquid source chemical up to a liquid fill level and to additionally define an inner gas volume; a carrier gas inlet communicating carrier gas into the container; a gas outlet communicating with a vapor deposition reactor and the inner gas volume of the container; and a porous element comprising at least one opening positioned to be in contact with liquid source chemical and a plurality of openings positioned to be in contact with the inner gas volume within the container. 2. The source chemical vaporizer of claim 1, wherein the carrier gas inlet comprises a bubbler tube extending through the inner gas volume into the liquid source chemical, the porous element being the bubbler tube, whereby the inner gas volume is above the liquid fill level and communicates gas through pores in the bubbler tube. 3. The source chemical vaporizer of claim 2, wherein pores in the bubbler tube are sized to produce a flow rate to the inner gas space above the liquid fill level, under normal operation, of greater than about 50% of a flow rate of carrier gas through a bottom of the bubbler tube producing bubbles within the liquid source chemical. 4. A liquid source bubbler system, comprising: a container configured to hold liquid source chemicals; a bubbler tube communicating with an inert gas source, the bubbler tube extending into an opening within a liquid storage space; a gas outlet communicating with a vapor deposition reactor and an inner gas space defined within the container above the liquid storage space; and a by-pass conductance route through the bubbler tube configured to release excess gas pressure from within the inner gas space, thereby inhibiting liquid flow up the bubbler tube. 5. The source chemical vaporizer of claim 1, wherein the material of the porous element is microporous. 6. The source chemical vaporizer of claim 1, wherein the porous element is a porous feeding tube. 7. The source chemical vaporizer of claim 6, wherein the porous feeding tube is configured such that hydrostatic pressure of a liquid column within the porous feeding tube is about equal to a pressure difference across walls of the porous feeding tube. 8. The source chemical vaporizer of claim 6, wherein pores of the porous feeding tube serve as a by-pass conductance for releasing overpressure in the inner gas volume. 9. The source chemical vaporizer of claim 1, wherein the porous element has a porosity between about 30% and 70%. 10. The source chemical vaporizer of claim 1, wherein the porous element has a porosity between about 40% and 60%. 11. The source chemical vaporizer of claim 1, wherein the porous element defines the gas flow path within a porous feeding tube having a conductance that is a linear function of a length of the tube.