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[미국특허] Method and system for packaging a MEMS device 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02F-001/00
출원번호 US-0045800 (2005-01-28)
발명자 / 주소
  • Miles,Mark W.
  • Sampsell,Jeffrey B.
  • Palmateer,Lauren
  • Arbuckle,Brian W.
  • Floyd,Philip D.
출원인 / 주소
  • IDC, LLC
대리인 / 주소
    Knobbe Martens Olson & Bear LLP
인용정보 피인용 횟수 : 115  인용 특허 : 20

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (20) 인용/피인용 타임라인 분석

  1. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  2. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  3. Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
  4. Peterson, Kenneth A.; Watson, Robert D., Bi-level microelectronic device package with an integral window.
  5. Kenneth A. Peterson ; Robert D. Watson, Bi-level multilayered microelectronic device package with an integral window.
  6. Shores A. Andrew (212 Carroll Canal Venice CA 90291), Enclosure for electronic devices.
  7. Burton ; Henry W. G., Kit for converting single-glazed window to double-glazed window.
  8. Weigers David G. ; Bremigan ; III Charles F., Laminated acoustic wave touch panel.
  9. Watanabe Takayuki,JPX, Method for preserving polished inorganic glass and method for preserving article obtained by using the same.
  10. David Horsley, Method of fabricating suspended microstructures.
  11. Kenneth A. Peterson ; Robert D. Watson, Microelectronic device package with an integral window.
  12. Thomas P. Glenn ; Steven Webster ; Roy Dale Hollaway, Micromirror device package.
  13. Peterson, Kenneth A.; Watson, Robert D., Multilayered microelectronic device package with an integral window.
  14. Brandenburg, Scott D.; Degenkolb, Thomas A.; Myers, Bruce A., Overmolded electronic package including circuit-carrying substrate.
  15. Low, Yee Leng; Ramsey, David Andrew, Packaging micromechanical devices.
  16. Jokerst Nan M. (Atlanta GA) Brooke Martin A. (Atlanta GA) Allen Mark G. (Atlanta GA), Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical.
  17. Kenneth A. Peterson ; Robert D. Watson, Sealed symmetric multilayered microelectronic device package with integral windows.
  18. Peterson, Kenneth A.; Watson, Robert D., Single level microelectronic device package with an integral window.
  19. Hornbeck Larry J. (Van Alstyne TX), Spatial light modulator.
  20. Larry J. Hornbeck, Support post architecture for micromechanical devices.

이 특허를 인용한 특허 (115) 인용/피인용 타임라인 분석

  1. Hong, John H.; Lee, Chong U., Actuation and calibration of charge neutral electrode of a display device.
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  4. Kothari, Manish; Kogut, Lior; Sampsell, Jeffrey B, Analog interferometric modulator device with electrostatic actuation and release.
  5. Sampsell, Jeffrey B., Backlight displays.
  6. Sampsell, Jeffrey B., Backlight displays.
  7. Sampsell, Jeffrey B., Backlight displays.
  8. Shenoy, Ravindra V.; Mignard, Marc Maurice; Kothari, Manish; Chui, Clarence, Backplate interconnect with integrated passives.
  9. Lewis, Stephen R., Circuits for controlling MEMS display apparatus on a transparent substrate.
  10. Gandhi, Jignesh; Steyn, Jasper Lodewyk; Fijol, John J.; Barton, Roger W.; Lewis, Stephen R.; McAllister, Abraham; Hagood, Nesbitt W., Circuits for controlling display apparatus.
  11. Hagood, IV, Nesbitt W.; Lewis, Stephen R.; McAllister, Abraham; Barton, Roger W.; Payne, Richard S.; Steyn, Jasper Lodewyk, Circuits for controlling display apparatus.
  12. Hagood, Nesbitt W.; Lewis, Stephen R.; McAllister, Abraham; Barton, Roger W., Circuits for controlling display apparatus.
  13. Hagood, Nesbitt W.; Lewis, Stephen R.; McAllister, Abraham; Barton, Roger W., Circuits for controlling display apparatus.
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  15. Lewis, Stephen R.; English, Stephen; McAllister, Abraham, Circuits for controlling display apparatus.
  16. Chui, Clarence; Sampsell, Jeffrey B., Conductive bus structure for interferometric modulator array.
  17. Miles, Mark W., Device for modulating light with multiple electrodes.
  18. Kothari, Manish, Device having a conductive light absorbing mask and method for fabricating same.
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  21. Kothari, Manish; Sethi, Gaurav; Griffiths, Jonathan Charles; Worthington, Eric, Devices and methods for enhancing color shift of interferometric modulators.
  22. Mignard, Marc Maurice; Khazeni, Kasra, Dielectric enhanced mirror for IMOD display.
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  28. Gally, Brian J.; Cummings, William J., Display device.
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  37. Endisch, Denis; Mignard, Marc, Electromechanical device with optical function separated from mechanical and electrical function.
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  40. Sasagawa, Teruo, Electromechanical system having a dielectric movable membrane.
  41. Sasagawa, Teruo, Electromechanical system having a dielectric movable membrane and a mirror.
  42. Lan, Je-Hsiung, High aperture-ratio top-reflective AM-iMod displays.
  43. Silverstein,Louis D.; Lewis,Alan G.; Gille,Jennifer Lee; Xu,Gang, Hybrid color synthesis for multistate reflective modulator displays.
  44. Bita, Ion; Patel, Sapna; Chan, Clayton Ka Tsun; Ganti, SuryaPrakash; Arbuckle, Brian W., Illumination devices and methods of fabrication thereof.
  45. Bita, Ion; Patel, Sapna; Chan, Clayton Ka Tsun; Ganti, SuryaPrakash; Arbuckle, Brian W., Illumination devices and methods of fabrication thereof.
  46. Griffiths, Jonathan Charles; Sampsell, Jeffrey B., Infrared and dual mode displays.
  47. Lasiter, Jon Bradley, Interconnect structure for MEMS device.
  48. Mienko, Marek; Griffiths, Jonathan Charles, Interferometric display with interferometric reflector.
  49. Lee, Donovan; Khazeni, Kasra, Interferometric modulator display devices.
  50. Djordjev, Kostadin; Khazeni, Kasra; Govil, Alok, Interferometric modulator displays with reduced color sensitivity.
  51. Ganti, Surya; Khazeni, Kasra; Sampsell, Jeff, Interferometric modulator in transmission mode.
  52. Ganti, Surya; Khazeni, Kasra; Sampsell, Jeff, Interferometric modulator in transmission mode.
  53. Xu, Gang, Interferometric optical modulator with broadband reflection characteristics.
  54. Kim, Je Hong; Gandhi, Jignesh, Light guides and backlight systems incorporating light redirectors at varying densities.
  55. Kim, Je Hong; Gandhi, Jignesh, Light guides and backlight systems incorporating light redirectors at varying densities.
  56. Kim, Je Hong; Gandhi, Jignesh, Light guides and backlight systems incorporating prismatic structures and light redirectors.
  57. Kim, Je Hong; Gandhi, Jignesh, Light guides and backlight systems incorporating prismatic structures and light redirectors.
  58. Kim, Je Hong; Gandhi, Jignesh, Light guides and backlight systems incorporating prismatic structures and light redirectors.
  59. Khazeni, Kasra; Kothari, Manish; Xu, Gang; Bita, Ion; Narayanan, Kollengode S., Light turning device with prismatic light turning features.
  60. Bita, Ion; Hong, John H.; Alam, Khurshid S., Light-based sealing and device packaging.
  61. Wu, Joyce H.; Andersson, Mark B.; Steyn, Jasper Lodewyk, MEMS anchors.
  62. Wu, Joyce H.; Andersson, Mark B.; Steyn, Jasper Lodewyk, MEMS anchors.
  63. Chung, Wonsuk; Ganti, SuryaPrakash; Zee, Stephen, MEMS device and interconnects for same.
  64. Lewis, Alan G.; Kothari, Manish; Batey, John; Sasagawa, Teruo; Tung, Ming Hau; U'Ren, Gregory D.; Zee, Stephen, MEMS device and interconnects for same.
  65. Sasagawa, Teruo, MEMS device and interconnects for same.
  66. Zhong, Fan; Wang, Chun-Ming; Zee, Stephen, MEMS device with integrated optical element.
  67. Natarajan, Bangalore R.; Ganti, Surya, MEMS devices and processes for packaging such devices.
  68. Kogut, Lior; Tung, Ming-Hau; Tung, Yeh-Jiun, MEMS devices requiring no mechanical support.
  69. Hagood, Nesbitt W.; Steyn, Jasper Lodewyk; Payne, Richard S.; Gandhi, Jignesh; Fijol, John J.; Barton, Roger W.; Fike, III, Eugene E., MEMS display apparatus.
  70. Sampsell, Jeffrey Brian; Gally, Brian James; Floyd, Philip Don, MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same.
  71. Hagood, IV, Nesbitt W.; Steyn, Jasper Lodewyk; Brosnihan, Timothy J.; Gandhi, Jignesh; Fijol, John J.; Payne, Richard S.; Barton, Roger, MEMS-based display apparatus.
  72. Brosnihan, Timothy J.; Andersson, Mark B., Manufacturing structure and process for compliant mechanisms.
  73. Hong, John Hyunchul; Ma, Jian J.; Chang, Tallis Young; Lee, Chong Uk, Matching layer thin-films for an electromechanical systems reflective display device.
  74. Hong, John Hyunchul; Ma, Jian Jim; Chang, Tallis Young; Lee, Chong Uk, Matching layer thin-films for an electromechanical systems reflective display device.
  75. Tao, Yi; Zhong, Fan; de Groot, Wilhelmus A., Mechanical layer and methods of forming the same.
  76. Tao, Yi; Lee, Hojin; Zhong, Fan, Mechanical layer and methods of making the same.
  77. Steyn, Jasper Lodewyk; Brosnihan, Timothy J.; Wu, Joyce H.; Andersson, Mark B.; Payne, Richard S.; Fijol, John J.; Barton, Roger W.; Hagood, IV, Nesbitt W., Mechanical light modulators with stressed beams.
  78. Steyn, Jasper Lodewyk; Brosnihan, Timothy J.; Wu, Joyce H.; Andersson, Mark B.; Payne, Richard S.; Fijol, John J.; Barton, Roger W.; Hagood, Nesbitt W., Mechanical light modulators with stressed beams.
  79. Sampsell, Jeffrey B., Method and apparatus for low range bit depth enhancement for MEMS display architectures.
  80. de Groot, Wilhelmus A.; Gudlavaleti, Sauri; Tung, Yeh-Jiun, Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices.
  81. Chui,Clarence, Method and device for a display having transparent components integrated therein.
  82. Miles, Mark W., Method and device for modulating light.
  83. Chui, Clarence; Cummings, William J.; Gally, Brian J., Method and device for multistate interferometric light modulation.
  84. Gally, Brian J.; Cummings, William J.; Palmateer, Lauren; Floyd, Philip D.; Chui, Clarence, Method and system for packaging a display.
  85. Sampsell, Jeffrey B., Method for packing a display device and the device obtained thereof.
  86. Tung, Ming-Hau; Kogut, Lior, Method of manufacturing MEMS devices providing air gap control.
  87. Tung, Ming-Hau; Kogut, Lior, Method of manufacturing MEMS devices providing air gap control.
  88. Hagood, Nesbitt W.; Steyn, Jasper Lodewyk; Payne, Richard S.; Gandhi, Jignesh; Fijol, John J.; Barton, Roger W.; Fike, III, Eugene E., Methods and apparatus for actuating displays.
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  93. Hagood, Nesbitt W.; Steyn, Jasper Lodewyk; Fijol, John J., Methods for manufacturing fluid-filled MEMS displays.
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  95. Chui, Clarence; Endisch, Denis; Kogut, Lior; Tung, Ming Hau; Tung, Yeh Jiun; Chiang, Chih Wei, Microelectromechanical device with optical function separated from mechanical and electrical function.
  96. Djordjev, Kostadin, Microelectromechanical device with spacing layer.
  97. Djordjev, Kostadin, Microelectromechanical device with spacing layer.
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  99. Sasagawa, Teruo, Microelectromechanical system having a dielectric movable membrane and a mirror.
  100. Stephanou, Philip Jason; Burns, David William; Shenoy, Ravindra V., Microspeaker with piezoelectric, metal and dielectric membrane.
  101. Bita, Ion; Kogut, Lior; Tung, Ming Hau, Modulating the intensity of light from an interferometric reflector.
  102. Camacho, Zigmund Ramirez; Bathan, Henry Descalzo; Tay, Lionel Chien Hui; Punzalan, Jeffrey D., Packaging system with hollow package and method for the same.
  103. Mignard, Marc Maurice, Periodic dimple array.
  104. Kothari, Manish; Xu, Gang; Khazeni, Kasra, Photovoltaic devices with integrated color interferometric film stacks.
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  110. Khazeni, Kasra; Kothari, Manish, Simultaneous light collection and illumination on an active display.
  111. Fijol, John J.; Gandhi, Jignesh; Shufelt, Mark J., Spacers for maintaining display apparatus alignment.
  112. Luo, Qi; Tai, Qiuxian, Spatial light modulator.
  113. Tung, Yeh-Jiun, Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control.
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