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Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/00
  • C23C-010/54
  • C23C-010/00
출원번호 US-0613951 (2000-07-11)
발명자 / 주소
  • Wendt,Robert G.
  • Wiedeman,Scott
  • Britt,Jeffrey S.
  • Mason,Douglas G.
출원인 / 주소
  • Global Solar Energy, Inc.
대리인 / 주소
    Kolisch Hartwell, P.C.
인용정보 피인용 횟수 : 157  인용 특허 : 16

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (16)

  1. Baron Bill N. (Newark DE) Rocheleau Richard E. (Wilmington DE) Russell T. W. Fraser (Newark DE), Apparatus for continuous deposition by vacuum evaporation.
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  2. Finicle Robert L. (Bay Village OH), Boron nitride crucible.
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  4. Kushiya Katsumi,JPX ; Tachiyuki Muneyori,JPX ; Kase Takahisa,JPX, Equipment for producing thin-film solar cell.
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  5. Tsukazaki Hisashi (Hyogo JPX) Yamanishi Kenichiro (Hyogo JPX) Yasunaga Seiji (Hyogo JPX), Evaporation source with a shaped nozzle.
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  6. Krug Thomas (Hanau am Main DEX) Anderle Friedrich (Hanau-1 DEX) Feuerstein Albert (Bruchkbel DEX) Sichmann Eggo (Gelnhausen DEX) Buschbeck Wolfgang (Hanau am Main DEX), Linear thermal evaporator for vacuum vapor depositing apparatus.
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  7. Matsuda Koichi (Nara JPX) Kondo Takaharu (Tsuzuki-gun JPX) Miyamoto Yusuke (Tsuzuki-gun JPX), Method and apparatus for forming deposited film.
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  8. von Campe Hilmar (Bad Homburg DEX), Method and means for producing a layered system of semiconductors.
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  9. Baron Bill N. (Newark DE) Rocheleau Richard E. (Newark DE) Russell T. W. Fraser (Newark DE), Method for continuous deposition by vacuum evaporation.
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  10. Akram Salman ; Koos Daniel A., Method for depositing a film of titanium nitride.
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  11. Hedstrm Jonas (Stockholm SEX), Method for manufacturing solar cells.
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  12. Barnett Allen M. (Newark DE) Baron Bill N. (Newark DE) Masi James V. (Wilmington DE) Russell T. W. Fraser (Newark DE), Method for the continuous manufacture of thin film solar cells.
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  13. Toyomoto Kazuo (Yokohama JPX) Terada Eigo (Kamakura JPX) Kobayashi Hiroshi (Yokohama JPX) Kageura Yoshiaki (Sagamihara JPX), Permeable polymer membrane for dessication of gas.
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  16. Yoshioka Naoki,JPX ; Ito Seiji,JPX, Unit for vaporizing liquid materials.
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  18. Britt, Jeffrey S.; Albright, Scot; Schoop, Urs, Buffer layer deposition for thin-film solar cells.
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  20. Lee, Howard W. H., Bulk metal species treatment of thin film photovoltaic cell and manufacturing method.
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  21. Lee, Howard W. H., Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method.
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  22. Lee, Howard W. H., Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method.
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  23. Lee, Howard W. H., Chloride species surface treatment of thin film photovoltaic cell and manufacturing method.
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  24. Buquing, Miljon T., Consumable adhesive layer for thin film photovoltaic material.
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  32. Lee, Howard W. H., High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material.
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  33. Wieting, Robert D., Humidity control and method for thin film photovoltaic materials.
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  34. Wieting, Robert D., In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials.
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  35. Black, Russell Weldon; Feldman-Peabody, Scott Daniel; Rathweg, Christopher, In-line deposition system and process for deposition of a thin film layer.
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  36. Fujdala, Kyle L.; Zhu, Zhongliang; Padowitz, David; Markoff Johnson, Paul R.; Chomitz, Wayne A.; Kuchta, Matthew C., Inks with alkali metals for thin film solar cell processes.
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  41. Wieting, Robert D., Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials.
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  42. Liang, Shih-Chang; Huang, Wei-Chieh; Wei, Chao-Nan; Ni, Cuo-Yo; Bor, Hui-Yun, Linear evaporation apparatus for improving uniformity of thin films and utilization of evaporation materials.
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