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[미국특허] Method of manufacturing a probe card 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-031/02
  • G01R-031/26
  • G06F-017/50
출원번호 US-0073187 (2005-03-04)
발명자 / 주소
  • Grube,Gary W.
  • Khandros,Igor Y.
  • Eldridge,Benjamin N.
  • Mathieu,Gaetan L.
  • Lotfizadeh,Poya
  • Tseng,Jim Chih Chiang
출원인 / 주소
  • FormFactor, Inc.
인용정보 피인용 횟수 : 11  인용 특허 : 52

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (52) 인용/피인용 타임라인 분석

  1. Buol Douglas A. (Dallas TX) Mize Dean N. (Garland TX) Pattschull John W. (Garland TX) Wallace Robert M. (Dallas TX), Apparatus for testing integrated circuits.
  2. Pasiecznik ; Jr. John (Malibu CA), Apparatus for testing integrated circuits.
  3. Yojima Masayuki,JPX ; Tsujide Tohru,JPX ; Nakaizumi Kazuo,JPX, Apparatus for testing semiconductor wafer.
  4. Loughmiller,Daniel R., Communication device for a logic circuit.
  5. Legal Dennis Andrew, Configurable probe card for automatic test equipment.
  6. Mok, Sammy; Chong, Fu Chiung, Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies.
  7. Khandros Igor Y. ; Eldridge Benjamin N. ; Mathieu Gaetan L. ; Dozier Thomas H. ; Smith William D., Contact carriers (tiles) for populating larger substrates with spring contacts.
  8. Crowley Richard N. (Aloha OR), Driven guard probe card.
  9. Eldridge Benjamin N. ; Khandros Igor Y. ; Mathieu Gaetan L. ; Pedersen David V., Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals.
  10. Mendenhall David W. (Greenville RI) Goff Jay T. (Cranston RI), Flex dot wafer probe.
  11. Leedy Glenn J. (1061 E. Mountain Dr. Santa Barbara CA 93108), Flexible tester surface for testing integrated circuits.
  12. Huppenthal Jon (Colorado Springs CO), Functional at speed test system for integrated circuits on undiced wafers.
  13. Miller Charles A., High bandwidth passive integrated circuit tester probe card assembly.
  14. Parrish Frank, High density printed circuit board.
  15. Bross Arthur (Poughkeepsie NY) Walsh Thomas J. (Poughkeepsie NY), High density probe.
  16. Whann Welton B. (San Diego CA) Elizondo Paul M. (Escondido CA), High density probe card.
  17. Kwon On-Kyong (Plano TX) Hashimoto Masashi (Garland TX) Malhi Satwinder (Garland TX), High performance test head and method of making.
  18. Shepherd Lloyd T. (Eau Claire WI) August Melvin C. (Chippewa Falls WI) Kruchowski James N. (Eau Claire WI), High power, high density interconnect apparatus for integrated circuits.
  19. Martel Anthony Paul ; McQuade Francis T., Impedance-matched interconnection device for connecting a vertical-pin integrated circuit probing device to integrated circuit test equipment.
  20. Kudla James M. ; Chang Luke, Interface test adapter for actively testing an integrated circuit chip package.
  21. Ong,Adrian E., Layout and use of bond pads and probe pads for testing of integrated circuits devices.
  22. Tervo, Paul A.; Cowan, Clarence E., Low-current pogo probe card.
  23. Leedy Glenn J. (1061 E. Mountain Dr. Santa Barbara CA 93108), Making and testing an integrated circuit using high density probe points.
  24. Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Making discrete power connections to a space transformer of a probe card assembly.
  25. Kasukabe Susumu (Yokohama JPX) Takagi Ryuichi (Tokyo JPX), Manufacturing method of a probe head for semiconductor LSI inspection apparatus.
  26. Palagonia Anthony Michael, Method for forming an interposer for making temporary contact with pads of a semiconductor chip.
  27. Belmont Andre,FRX ; Reynaud Vincent,FRX ; Daniau William,FRX, Method for making cards with multiple contact tips for testing semiconductor chips.
  28. Yanof Arnold W. (Tempe AZ) Dauksher William (Mesa AZ), Method for manufacturing a probe.
  29. DeHaven Robert Keith (Austin TX) Wenzel James F. (Austin TX), Method for manufacturing a stimulus wafer for use in a wafer-to-wafer testing system to test integrated circuits located.
  30. Lum Thomas F. (Austin TX) Wenzel James F. (Austin TX), Method for probing a semiconductor wafer.
  31. Luna L. Jack, Method of connecting a unit under test in a wireless test fixture.
  32. Grube, Gary W.; Khandros, Igor Y.; Eldridge, Benjamin N.; Mathieu, Gaetan L., Method of manufacturing a probe card.
  33. Grube, Gary W.; Khandros, Igor Y.; Eldridge, Benjamin N.; Mathieu, Gaetan L.; Lotfizadeh, Poya; Tseng, Chih-Chiang, Method of manufacturing a probe card.
  34. Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Method of planarizing tips of probe elements of a probe card assembly.
  35. Watanabe Takashi,JPX ; Yoshida Minako,JPX, Method of producing micro contact structure and contact probe using same.
  36. Maddix John Thomas ; Palagonia Anthony Michael ; Pikna Paul Joseph ; Vallett David Paul, Micro probe ring assembly and method of fabrication.
  37. Sugihara Osamu (Nagasaka JPX), Microprobe provided circuit substrate and method for producing the same.
  38. Park, Sung-Joo; So, Byung-Se; Lee, Jung-Joon, Module having test architecture for facilitating the testing of ball grid array packages, and test method using the same.
  39. Jones Mark R. ; Khoury Theodore A., Packaging and interconnection of contact structure.
  40. Driller Hubert (Schmitten DEX) Mang Paul (Schmitten DEX), Printed circuit board testing device with foil adapter.
  41. McQuade Francis T. (Watertown CT) Lander Jack (Danbury CT), Probe assembly for testing integrated circuits.
  42. Higgins H. Dan (323 E. Redfield Chandler AZ 85225), Probe card apparatus.
  43. Higgins H. Dan ; Pandey Rajiv ; Armendariz Norman J. ; Bates R. Dennis, Probe card assembly for high density integrated circuits.
  44. Shinde,Makarand S.; Larder,Richard A.; Cooper,Timothy E.; Shenoy,Ravindra V.; Eldridge,Benjamin N., Probe card configuration for low mechanical flexural strength electrical routing substrates.
  45. Liu Jui-Hsiang (Chandler AZ) Olsen Dennis R. (Scottsdale AZ), Probe card for testing unencapsulated semiconductor devices.
  46. Nakata Yoshiro,JPX, Probe card for wafer-level measurement, multilayer ceramic wiring board, and fabricating methods therefor.
  47. Miley David M., Probe ring having electrical components affixed thereto and related apparatus and processes.
  48. Kasukabe, Susumu; Hasebe, Akio, Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof.
  49. Novak, Istvan; St. Cyr, Valerie A., System and method for testing integrated passive components in a printed circuit board.
  50. Sigler Michael R. (Colorado Springs CO), System for locating probe tips on an integrated circuit probe card and method therefor.
  51. Beaman Brian Samuel ; Fogel Keith Edward ; Lauro Paul Alfred ; Norcott Maurice Heathcote ; Shih Da-Yuan ; Walker George Frederick, Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof.
  52. Aigo Seiichiro (3-15-13 Negishi ; Daito-Ku Tokyo JPX), Unitary probe assembly.

이 특허를 인용한 특허 (11) 인용/피인용 타임라인 분석

  1. Grube,Gary W.; Khandros,Igor Y.; Eldridge,Benjamin N.; Mathieu,Gaetan L.; Lotfizadeh,Poya; Tseng,Chih Chiang, Composite wiring structure having a wiring block and an insulating layer with electrical connections to probes.
  2. Breinlinger, Keith J., Electrical guard structures for protecting a signal trace from electrical interference.
  3. Lin,Yu Hsu; Yeh,Shang Tsang; Li,Chuang Bing, Method for improving via's impedance.
  4. Nakatani, Goro; Sakuragi, Masahiro; Niino, Koichi, Method for manufacturing probe card, probe card, method for manufacturing semiconductor device, and method for forming probe.
  5. Kuo, Yung-Hsin; Lin, Yuan-Li; Huang, Po-Yi, Probe card.
  6. Nakatani, Goro; Sakuragi, Masahiro; Niino, Koichi, Probe card.
  7. Hsu, Chen Jung; Tseng, Chao Cheng, Probing apparatus for semiconductor devices.
  8. Eldridge, Benjamin N.; Reynolds, Carl V.; Saeki, Takao; Urakawa, Yoichi, Probing apparatus with guarded signal traces.
  9. Eldridge, Benjamin N.; Reynolds, Carl V.; Saeki, Takao; Urakawa, Yoichi, Probing apparatus with guarded signal traces.
  10. Sellathamby, Christopher V.; Slupsky, Steven; Moore, Brian, Testing of electronic circuits using an active probe integrated circuit.
  11. Hsu, Ming-Cheng, Universal probe card PCB design.

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