초록 ▼

An optical measuring device capable of improving the precision of detection of contamination on a protective glass is disclosed. With threshold values as large as 90%, 50%, 10% of a peak value of a scan signal, measured values Q90, Q50, Q10 of a dimension of a work to be measured are derived, respec

An optical measuring device capable of improving the precision of detection of contamination on a protective glass is disclosed. With threshold values as large as 90%, 50%, 10% of a peak value of a scan signal, measured values Q90, Q50, Q10 of a dimension of a work to be measured are derived, respectively. It is determined whether a difference between the measured value Q90 and the measured value Q50 (or a variation of the measured value) is equal to or larger than a predetermined reference value. (B)-(D) show the presence of contamination on the protective glass, equal to or larger than the reference value. (A) shows the absence of contamination, lower than the reference value. It is then determined whether a difference between the measured value Q50 and the measured value Q10 is equal to or larger than a predetermined reference value. (D) shows the presence of thick contamination on the protective glass, equal to or larger than this reference value. Accordingly, a buzzer is driven and a red lamp is turned on to give the alarm to the operator to remove the contamination immediately.

대표청구항 ▼

What is claimed is: 1. An optical measuring device, comprising: a projector means operative to use a collimated beam derived from a beam emitted from a light-emitting element to repeatedly scan a scan region in which a work to be measured locates; a photoreceptor element operative to receive a beam

What is claimed is: 1. An optical measuring device, comprising: a projector means operative to use a collimated beam derived from a beam emitted from a light-emitting element to repeatedly scan a scan region in which a work to be measured locates; a photoreceptor element operative to receive a beam transmitted through said scan region to provide a scanned signal; a binarized signal generator means configured to binarize said scanned signal with a plurality of different threshold values to generate a plurality of binarized signals; an arithmetic means operative to calculate on the basis of said binarized signals a measured value associated with said work to be measured; a decision means operative to compare a plurality of measured values calculated at said arithmetic means on the basis of said binarized signals to determine whether an abnormality arises on an optical path of said beam from said light-emitting element to said photoreceptor element; and a notice means operative to notice said abnormality if said decision means determines that said abnormality arises. 2. The optical measuring device according to claim 1, wherein the number of said plurality of different threshold values for use in said binarized signal generator means is three or more, wherein said decision means compares measured values on each of combinations of said plurality of measured values to determine the degree of said abnormality, and wherein said notice means provides different notices in accordance with the degree of said abnormality. 3. The optical measuring device according to claim 1, wherein said binarized signal generator means includes a threshold value switching circuit operative to switch among said plurality of threshold values. 4. The optical measuring device according to claim 1, further comprising a display operative to indicate any one of said plurality of measured values as a measured value. 5. The optical measuring device according to claim 1, wherein said projector means includes a polygon mirror held rotatably and configured to use light from said light-emitting element for scanning, and a collimator lens configured to convert light reflected from said polygon mirror into said collimated light. 6. The optical measuring device according to claim 1, wherein said plurality of different threshold values for use in said binarized signal generator means are at least three or more, including a first threshold value, a second threshold value smaller than said first threshold value, and a third threshold value smaller than said second threshold value, wherein said decision means executes a first decision on whether a difference between a measured value obtained with said first threshold value and a measured value obtained with said second threshold value is equal to or larger than a reference value, and executes a second decision on whether a difference between a measured value obtained with said second threshold value and a measured value obtained with said third threshold value is equal to or larger than a reference value, and wherein said notice means provides a first notice if both said first decision and said second decision are positive, and provides a second notice if only said first decision is positive. 7. The optical measuring device according to claim 6, further comprising a memory to store said reference value. 8. The optical measuring device according to claim 1, further comprising a condenser lens for condensing said collimated light, wherein said photoreceptor receives light condensed through said condenser lens. 9. The optical measuring device according to claim 1, further comprising a detector means operative to detect the start or end of a scan in said scan region by said projector means and provide a timing signal, wherein said binarized signal generator means selects on the basis of said timing signal an edge of a shaped signal shaped with said threshold value to generate said binarized signal. 10. The optical measuring device according to claim 1, further comprising a detector means operative to detect the start or end of a scan in said scan region by said projector means and provide a timing signal, wherein said binarized signal generator means includes a threshold value switching circuit operative to switch among said plurality of threshold values, said threshold value switching circuit operative to switch among said plurality of threshold values based on said timing signal. 11. An abnormality detecting method operative to detect an abnormality in an optical measuring device, said optical measuring device comprising: a projector means operative to use a collimated beam derived from a beam emitted from a light-emitting element to repeatedly scan a scan region in which a work to be measured locates; a photoreceptor element operative to receive a beam transmitted through said scan region to provide a scanned signal; a binarized signal generator means configured to binarize said scanned signal to generate a binarized signal; and an arithmetic means operative to calculate on the basis of said binarized signal a measured value associated with said work to be measured, said method comprising: a binarized signal generating step generating in said binarized signal generator means a plurality of binarized signals using a plurality of threshold values, a decision step comparing a plurality of measured values calculated on the basis of each of a plurality of said binarized signals to determine whether an abnormality arises on an optical path of said beam from said light-emitting element to said photoreceptor element; and a notice step noticing said abnormality by outputting a notice signal indicating that said abnormality arises. 12. The abnormality detecting method according to claim 11, wherein the number of said plurality of different threshold values for use in said binarized signal generator means is three or more, wherein said decision step compares measured values on each of combinations of said plurality of measured values to determine the degree of said abnormality, and wherein said notice step provides different notices in accordance with the degree of said abnormality. 13. The abnormality detecting method according to claim 11, wherein said plurality of different threshold values for use in said binarized signal generator means are at least three or more, including a first threshold value, a second threshold value smaller than said first threshold value, and a third threshold value smaller than said second threshold value, wherein said decision step executes a first decision on whether a difference between a measured value obtained with said first threshold value and a measured value obtained with said second threshold value is equal to or larger than a reference value, and executes a second decision on whether a difference between a measured value obtained with said second threshold value and a measured value obtained with said third threshold value is equal to or larger than a reference value, and wherein said notice step provides a first notice if both said first decision and said second decision are positive, and provides a second notice if only said first decision is positive.