IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0050782
(2005-02-07)
|
등록번호 |
US-7255478
(2007-08-14)
|
우선권정보 |
KR-10-2004-0009743(2004-02-13) |
발명자
/ 주소 |
- Ahn,Byung il
- Lee,Suk won
- Song,Se kyong
|
출원인 / 주소 |
- Samsung Electronics Co., Ltd.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
1 |
초록
▼
A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus is movable along a surface of a base and includes an air bearing placed on a base, a connector connecte
A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus is movable along a surface of a base and includes an air bearing placed on a base, a connector connected to an upper part of the air bearing and provided with a supporter in a center thereof, the supporter having a flexure hinge structure to allow the air bearing to be freely rotated relative to the base, and the carrier supported by the supporter of the connector to be transported while keeping a level with respect to the surface of the base. With this configuration, a movement of the air bearing does not affect the carrier, thereby improving accuracy and reliability of the transporting apparatus.
대표청구항
▼
What is claimed is: 1. A transporting apparatus to move a carrier along a surface of a base, comprising: an air bearing placed on the base; and a connector connected to an upper part of the air bearing and provided with a supporter at a center thereof, the supporter having a flexure hinge structure
What is claimed is: 1. A transporting apparatus to move a carrier along a surface of a base, comprising: an air bearing placed on the base; and a connector connected to an upper part of the air bearing and provided with a supporter at a center thereof, the supporter having a flexure hinge structure to allow the air bearing to be freely rotated relative to the base, wherein the carrier is supported by the supporter of the connector to be transported while remaining a level with respect to the surface of the base. 2. The transporting apparatus according to claim 1, wherein the supporter of the connector comprises a dual type flexure hinge structure having a first supporter and a second supporter concentrically formed on the same surface. 3. The transporting apparatus according to claim 2, wherein one of the first supporter of the connector and the carrier comprises a coupling protrusion and the other one of the first supporter of the connector and the carrier comprises a coupling hole corresponding to the coupling protrusion. 4. The transporting apparatus according to claim 3, wherein the air bearing comprises a seating portion on which the connector is placed, and the seating portion comprises an interference-preventing groove to allow the air bearing to be rotated without interfering with the supporter of the connector. 5. The transporting apparatus according to claim 2, wherein the air bearing comprises a vacuum preload type air bearing. 6. The transporting apparatus according to claim 1, further comprising an actuator connected to the carrier and transporting the carrier. 7. The transporting apparatus according to claim 1, wherein the air bearing comprises a vacuum preload type air bearing. 8. The transporting apparatus according to claim 1, wherein one of the first supporter of the connector and the carrier comprises a coupling protrusion and the other one of the first supporter of the connector and the carrier comprises a coupling hole corresponding to the coupling protrusion. 9. The transporting apparatus according to claim 8, wherein the air bearing comprises a seating portion on which the connector is placed, and the seating portion comprises an interference-preventing groove to allow the air bearing to be rotated without interfering with the supporter of the connector. 10. A transporting apparatus to move a carrier along a surface of a base, comprising: an air bearing to generate a layer of air so that the air bearing floats over the surface of the base; and a connector having a coupling part connected to the air bearing, a supporter disposed inside the coupling part to be connected to the carrier, and a flexure hinge formed between the coupling part and the support to remain a level regardless of the surface of the base. 11. The transporting apparatus according to claim 10, wherein the connector comprises a cutout portion formed between the coupling part and supporter to separate the coupling part from the supporter except at the flexure hinge. 12. The transporting apparatus according to claim 10, wherein the supporter comprises a first supporter and a second supporter, and the flexure hinge comprises a first flexure hinge formed between the first supporter and the second supporter, and a second flexure hinge formed between the second supporter and the coupling part. 13. The transporting apparatus according to claim 12, wherein the first flexure hinge is disposed to be perpendicular to the second flexure hinge with respect to a central axis of the connector. 14. The transporting apparatus according to claim 12, wherein the first flexure hinge comprises a pair of first flexure sub-hinges, the second flexure hinge comprises a pair of second flexure sub-hinges, and the first flexure sub-hinges are disposed on a line perpendicular to a line on which the second flexure sub-hinges are disposed. 15. The transporting apparatus according to claim 14, wherein the supporter further comprises first cutout portions formed between the first supporter and the second supporter, and second cutout portions formed between the second supporter and the coupling part. 16. The transporting apparatus according to claim 15, wherein the first supporter is separated from the second supporter along the first cutout portions except at the first flexure sub-hinges, and the second supporter is separated from the coupling part along the second cutout portions except at the second flexure sub-hinges. 17. The transporting apparatus according to claim 15, wherein the first cutout portions are formed between the first flexure sub-hinges, and the second cutout portions are formed between the second flexure sub-hinges. 18. The transporting apparatus according to claim 15, wherein the first cutout portions are separated from each other in a circumferential direction of a central axis of the connector. 19. The transporting apparatus according to claim 15, wherein the first support, the second support, and the coupling part are disposed in a radial direction of a central axis of the connector in order. 20. The transporting apparatus according to claim 15, wherein the air bearing comprises a seating portion to be coupled to the coupling part of the connector, and an interference-preventing groove formed within the seating portion to correspond to the first and second supporters so that the first and second supporters move freely within the interference-preventing groove.
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