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| 국가/구분 | United States(US) Patent 등록 |
|---|---|
| 국제특허분류(IPC7판) |
|
| 출원번호 | US-0036739 (2005-01-14) |
| 등록번호 | US-7266889 (2007-09-11) |
| 발명자 / 주소 |
|
| 출원인 / 주소 |
|
| 대리인 / 주소 |
|
| 인용정보 | 피인용 횟수 : 12 인용 특허 : 423 |
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
What is claimed is: 1. A method of constructing a membrane probe comprising: (a) creating a depression in a substrate having a geometry substantially pyramidal in shape, wherein said substrate has a crystal grain and said depression has at least one substantially flat surface inclined relative to s
What is claimed is: 1. A method of constructing a membrane probe comprising: (a) creating a depression in a substrate having a geometry substantially pyramidal in shape, wherein said substrate has a crystal grain and said depression has at least one substantially flat surface inclined relative to said crystal grain, said surface and said crystal grain defining an acute angle therebetween; (b) locating conductive material within said depression, a conductive trace electrically connected to said conductive material, and membrane supporting said conductive material; (c) removing said substrate from said conductive material; and (d) roughening an outer surface of said conductive material.
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