최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0712273 (2003-11-14) |
등록번호 | US-7272459 (2007-09-18) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 16 인용 특허 : 314 |
A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs.
A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values. The method further includes the steps of receiving a new set of values for the identified inputs, transforming the new set of values for the identified input using the set of coefficients, and calculating a set of predicted output values using the transformed input values.
What is claimed is: 1. A computer implemented method for controlling a manufacturing apparatus, the method comprising: (a) identifying at least one input, the at least one input causing a change in at least two of a plurality of outputs; (b) storing values of the identified inputs and corresponding
What is claimed is: 1. A computer implemented method for controlling a manufacturing apparatus, the method comprising: (a) identifying at least one input, the at least one input causing a change in at least two of a plurality of outputs; (b) storing values of the identified inputs and corresponding empirical output values along with predicted output values, wherein the predicted output values are calculated based on, in part, the values of the identified inputs; (c) calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values, wherein the score equation is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; ({right arrow over (X)}i')=(X1i',X2i',X3 i') for wafer i together with the transformation parameters ({right arrow over (P)}), to thereby calculate an optimal value of P; (d) calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (e) communicating the transformed input values of (d) to a manufacturing apparatus. 2. The method of claim 1, further comprising; collecting additional empirical data and corresponding input values; calculating a new set of coefficients {right arrow over (P)}new ; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 3. The method of claim 1 further comprising; collecting additional empirical data and corresponding input values; calculating a new set of coefficients as description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 4. A computer implemented system for controlling a manufacturing apparatus, the system comprising: (a) means for identifying at least one input, the at least one input causing a change in at least two of a plurality of outputs; (b) a memory device configured to store values of the identified inputs and corresponding empirical output values along with predicted output values, wherein the predicted output values are calculated based on, in part, the values of the identified inputs; (c) means for calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values, wherein the score equation is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; {right arrow over (X)}i=(X1i,X2i,X3 i) for wafer i together with the transformation parameters {right arrow over (P)}, to thereby calculate an optimal value of {right arrow over (P)}; (d) means for calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (e) means for communicating the transformed input values of (d) to a manufacturing apparatus. 5. The system of claim 4, further comprising: means for collecting additional empirical data and corresponding input values; and means for calculating a new set of coefficients {right arrow over (P)}new, wherein the new set of coefficients is defined as the optimal value of {right arrow over (P)}. 6. The system of claim 4, further comprising: means for collecting additional empirical data and corresponding input values; and means for calculating a new set of coefficients as description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}, wherein the new set of coefficients is defined as the optimal value of {right arrow over (P)}. 7. A computer readable medium for storing instructions being executed by one or more computers, the instructions directing the one or more computers to perform a method for predicting output characteristics of a device produced by a manufacturing apparatus, the method comprising: (a) identifying at least one input, the at least one input causing a change in at least two of a plurality of outputs; (b) storing values of the identified inputs and corresponding empirical output values along with predicted output values, wherein the predicted output values are calculated based on, in part, the values of the identified inputs; (c) calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values, wherein the score equation is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; {right arrow over (X)}i=(X1i,X2i,X3 i) for wafer i together with the transformation parameters {right arrow over (P)}, to thereby calculate an optimal value of {right arrow over (P)}; (d) calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (e) communicating the transformed input values of (d) to a manufacturing apparatus. 8. The medium of claim 7, wherein the method further comprises: collecting additional empirical data and corresponding input values; calculating a new set of coefficients {right arrow over (P)}new; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 9. The medium of claim 7, wherein the method further comprises: collecting additional empirical data and corresponding input values; calculating a new set of coefficients as description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 10. A computer implemented method for controlling a manufacturing apparatus, the method comprising: (a) identifying at least one input that causes a change in at least two of a plurality of outputs; (b) storing values of the identified inputs and corresponding empirical output values; (c) calculating and storing predicted output values, based on, in part, the values of the identified inputs; (d) calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values; (e) calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (f) providing the transformed input values of (e) to a manufacturing apparatus. 11. The method of claim 10, wherein the score function is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; {right arrow over (X)}i=(X1i,X2i,X3 i) for wafer i together with the transformation parameters {right arrow over (P)}, to thereby calculate an optimal value of {right arrow over (P)}. 12. The method of claim 10, further comprising: collecting additional empirical data and corresponding input values; calculating a new set of coefficients {right arrow over (P)}new; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 13. The method of claim 10 further comprising: collecting additional empirical data and corresponding input values; and calculating a new set of coefficients based on the additional empirical data. 14. The method of claim 13, further comprising calculating the new set of coefficients using: description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 15. A computer implemented system for controlling a manufacturing apparatus, the system comprising: (a) means for identifying at least one input that causes a change in at least two of a plurality of outputs; (b) a memory device configured to store values of the identified inputs and corresponding empirical output values along with predicted output values, wherein the predicted output values are calculated based on, in part, the values of the identified inputs; (c) means for calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values; (d) means for calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (e) means for communicating the transformed input values of (d) to a manufactoring apparatus. 16. The system of claim 15, wherein the score equation is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; {right arrow over (X)}i=(X1i,X2i,X3 i) for wafer i together with the transformation parameters {right arrow over (P)}, to thereby calculate an optimal value of {right arrow over (P)}. 17. The system of claim 15, further comprising: means for collecting additional empirical data and corresponding input values; and means for calculating a new set of coefficients {right arrow over (P)}new, wherein the new set of coefficients is defined as the optimal value of {right arrow over (P)}. 18. The system of claim 15, further comprising: means for collecting additional empirical data and corresponding input values; and means for calculating a new set of coefficients based on the additional empirical data. 19. The system of claim 18, wherein the means for calculating is further configured to use the following equation in calculating the new of coefficients: description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}, wherein the new set of coefficients is defined as the optimal value of {right arrow over (P)}. 20. A computer readable medium for storing instructions being executed by one or more computers, the instructions directing the one or more computers to perform a method for predicting output characteristics of a device produced by a manufacturing apparatus, the method comprising: (a) identifying at least one input that causes a change in at least two of a plurality of outputs; (b) storing values of the identified inputs and corresponding empirical output values; (c) calculating and storing predicted output values, based on, in part, the values of the identified inputs; (d) calculating a set of transform coefficients by minimizing a score equation that is a function of, in part, differences between one or more of the empirical output values and their corresponding predicted output values; (e) calculating one or more input values for one or more desired output values based on, in part, the calculated set of transform coefficients; and (f) communicating the transformed input values of (d) to a manufacturing apparatus. 21. The medium of claim 20, wherein the score function is: where: i--number of wafer; k--number of output; yactual--an empirical output value; ypredicted--a predicted output value, as calculated based on transformed inputs for a particular wafer i ({right arrow over (X)}i') {right arrow over (X)}i'=(X1i',X2i',X3 i') is transformed input values in a vector format; {right arrow over (X)}i=(X1i,X2i,X3 i) for wafer i together with the transformation parameters {right arrow over (P)}, to thereby calculate an optimal value of {right arrow over (P)}. 22. The medium of claim 20, wherein the method further comprises: collecting additional empirical data and corresponding input values; calculating a new set of coefficients {right arrow over (P)}new; and using the new set of coefficients as the optimal value of {right arrow over (P)}. 23. The medium of claim 20, wherein the method further comprises: collecting additional empirical data and corresponding input values; calculating a new set of coefficients as description="In-line Formulae" end="lead"{right arrow over (P)}new≡{right arrow over (P)}previous+K({right arrow over (P)}optimum-{right arrow over (P)}previous),description="In-line Formulae" end="tail" wherein Kprevious is a previously calculated optimal value of {right arrow over (P)}; and using the new set of coefficients as the optimal value of {right arrow over (P)}.
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