[특허]Port structure in semiconductor processing system

[미국특허] Port structure in semiconductor processing system 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23F-001/00 H01L-021/306 H01L-021/02 C23C-016/00 B65G-049/07
출원번호	US-0503940 (2003-02-17)
등록번호	US-7279067 (2007-10-09)
우선권정보	JP-2002-047189(2002-02-22)
국제출원번호	PCT/JP03/001644 (2003-02-17)
§371/§102 date	20040817 (20040817)
국제공개번호	WO03/071598 (2003-08-28)
발명자 / 주소	Yoshida,Tetsuo Sasaki,Yoshiaki Saeki,Hiroaki Taniyama,Yasushi Takizawa,Hiroshi
출원인 / 주소	Tokyo Electron Limited
대리인 / 주소	Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보	피인용 횟수 : 23 인용 특허 : 2

초록 ▼

In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

대표청구항 ▼

What is claimed is: 1. A port structure for loading and unloading a substrate to be processed into and from a semiconductor processing system, wherein an inside of the system is set to have a positive pressure compared to an outside thereof by a gas supply, the port structure comprising: a bulkhead for partitioning the inside and the outside of the system and having a port for passing therethrough the substrate to be processed; a door for opening and closing the port; a table disposed outside the system to face the port, wherein the table is provided with a mount region for mounting thereon an open cassette accommodating therein a plurality of substrates to be processed in multi-levels; a hood rotatably disposed between a closed position and an open position with respect to the table, wherein the hood at the closed position forms, together with the bulkhead and the table, a closed space surrounding the mount region and the port, the closed space having a size to accommodate therein the cassette mounted on the mount region, and the hood at the open position exposes the mount region; a driving unit for rotating the hood; first ventholes formed through at least one of the bulkhead and the door so as to introduce the gas from the inside of the system into the closed space; and second ventholes formed through the table so as to discharge the gas out of the closed space. 2. The port structure of claim 1, wherein a leading end portion of the hood at the closed position is in a noncontact state wherein there exists a narrow gap between the leading end portion and a part facing thereto. 3. The port structure of claim 1, wherein the driving unit is disposed under the table and covered with a driving unit cover for preventing particles from being scattered. 4. The port structure of claim 1, wherein the table has a slit for passing the rotating hood therethrough, and the hood is located under the table while in the open position. 5. The port structure of claim 4, wherein the second ventholes are disposed between the mount region and the slit. 6. The port structure of claim 1, wherein a break for stopping a rotation of a driving axis is disposed at the driving axis of the driving unit. 7. The port structure of claim 6, wherein the break is covered with a break cover for preventing particles from being scattered. 8. The port structure of claim 1, wherein the hood includes a mountable and detachable window for maintaining and repairing an inner surface of the hood. 9. The port structure of claim 1, wherein the hood is coupled to a transfer member for transferring a driving force of the driving unit to the hood via a resilient member, and the resilient member is compressed by an external force exerted to the hood to allow a distance between the hood and the transfer member to be reduced. 10. The port structure of claim 6, further comprising a sensor for detecting a presence of an obstacle disposed near the port and a control unit for operating the break when the sensor detects the obstacle. 11. The port structure of claim 10, wherein the driving unit includes an actuator operated by a fluid in an opening direction and a closing direction, and a fluid pressure in both the opening direction and the closing direction is applied to the actuator when the break is operated. 12. The port structure of claim 1, further comprising a pair of protection plates standing at both sides of the table to cover both side surfaces of the hood while maintaining slight gaps therebetween.

이 특허에 인용된 특허 (2) 인용/피인용 타임라인 분석

Glenn L Sindledecker, Ergonomic load port.
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Bonora Anthony C. ; Netsch Robert ; Sullivan Patrick ; Fosnight William J. ; Shenk Joshua ; Noma Edwin, SMIF-compatible open cassette enclosure.
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이 특허를 인용한 특허 (23) 인용/피인용 타임라인 분석

Englhardt, Eric A.; Rice, Michael R.; Hudgens, Jeffrey C.; Hongkham, Steve; Pinson, Jay D.; Salek, Mohsen; Carlson, Charles; Weaver, William T; Armer, Helen R., Cartesian cluster tool configuration for lithography type processes.
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Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Cartesian robot cluster tool architecture.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lu, Brian, Cluster tool architecture for processing a substrate.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lu, Brian, Cluster tool architecture for processing a substrate.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lu, Brian, Cluster tool architecture for processing a substrate.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
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Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
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Schneider, Reinhard, Device and method for chemically and electrolytically treating work pieces using a conveyor system to transport work pieces between treatment tanks.
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Ku, Shao-Yen; Yang, Chi-Ming; Chiang, Ming-Tsao; Tzeng, Yu-Fen; Lin, Chin-Hsiang, Integrated apparatus to assure wafer quality and manufacturability.
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Ogura, Hiroyuki; Mitsuhashi, Tsuyoshi; Fukutomi, Yoshiteru; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units.
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Fukutomi, Yoshiteru; Mitsuhashi, Tsuyoshi; Ogura, Hiroyuki; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Parallel substrate treatment for a plurality of substrate treatment lines.
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Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a Cartesian robot cluster tool.
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Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
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Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
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Fukutomi, Yoshiteru; Mitsuhashi, Tsuyoshi; Ogura, Hiroyuki; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus.
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Fukutomi, Yoshiteru; Mitsuhashi, Tsuyoshi; Ogura, Hiroyuki; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Port structure in semiconductor processing system 원문보기